Air Slide Table

MXQR2550 MXQR2575 MXQR2510 MXQR2520 MXQR2530 MXQR2540 MXQR2510 MXQR2520 MXQR2530 MXQR2540 MXQR25-100 MXQR25-125 MXQR25-150 0.12 MXQR25-75 0.10 MXQR25-40 MXQR25-40 MXQR25-125 MXQR25-100 MXQR25-75 MXQR25-100 MXQR25-40 Table displacement (mm) Table displacement (mm) Table displacement (mm) MXQR25-100 MXQR25-125 MXQR25-150 0.06 0.08 MXQR25-30 MXQR25-150 MXQR25-50 MXQR25-30 MXQR25-50 MXQR25-125

MGP

(mm) Standard stroke (mm) Bore size (mm) PW Q R B C DA G GA GB H J K L MM ML NN PB 20 25 18 70 78 62 10 36 10.5 8.5 83 18 18 24 M5 x 0.8 13 M5 x 0.8 10.5 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 25 28.5 26 78 78.5 62.5 12 42 11.5 9 93 21 21 30 M6 x 1.0 15 M6 x 1.0 13.5 (mm) U VA VB WA WB X Bore size (mm) XA XB S T 75st or less Over 250st Over 75st to 175st Over 175st to 250st

MG

M5 x 0.8 56 10 38 5 44 110 27 60 105 200 28 70 30 3 81 3.5 54 M6 x 1.0 72 12 44 17 44 120 300 39 77 117 167 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 200 34 78 38 4 91 4.5 64 M6 x 1.0 82 12 50 17 44 120 300 39 77 117 167 MGPM (Slide bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 50 st 25 st 75 to 100 st 75 to 100 st 125 to 200 st 250 st or more 125 to 200 st

SX

Block separation lever (Push type) (Station n) (Station 1) (DIN rail dimension) (mm) 2 stations 135.5 125 105 15 3 4 5 6 7 8 stations Stations n L1 L2 L3 L4 148 137.5 121 13.5 160.5 150 137 11.5 185.5 175 158 16 198 187.5 169 14.5 210.5 200 185 125 235.5 225 201 17 C4 C6 C8 SS5X5-45TUStations BNote) The L1 to L4 dimensions of SS5X5-45TDStations Bare identical to those of SS5X545TUStations

Environment

to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 Note 1) Range within which the rod can move.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

6 233 221 204.5 7 259.5 247.5 231 8 286 274 257 9 312 300 283.5 10 338.5 326.5 310 L1 L2 L3 : With light/surge voltage suppressor 3-4-30 31 5 Port Pilot Operated Solenoid Valve Rubber Seal Series VF3000 S Mount: VV5F3-70, VV5F3-71 Individual EXH: VV5F3-70-3 (G) (E) (T) (D, Y) Double Manual override (Non-locking) (SUP port) (3 position: 100.5) (3 position type) Single (3 position: 90.5) Y

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

7.5

Note 2) For manifold dimensions including elbow fitting, refer to page 24. 2 n L L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 L3 L4 223 235.5 248 248 260.5 273 285.5 298 298 310.5 323 335.5 348 348 135.5 135.5 148 160.5 173 185.5 185.5 198 210.5 125 125 137.5 150 162.5 175 175 187.5 200 212.5 225 237.5 237.5 250 262.5 275 287.5 287.5 300 312.5

Table of Contents

70 G 27 40 54 54 66 66 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 E 47 47 H 22 23 26 25 35 35 C 26 36 38 40 38 41 45 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specifications Metal bowl B 82 121 142 176

C95Series

I~} a: D-A59W -25 60 70 65 11 0 115 120 1 pC. 15 .. I ~ .pa. (':'!." 15 . I~ _OJ ~I~) -25 60 70 65 11 0 115 120 OF5J5 1 pC. 10 :!l. 2 pes , ~~~ 70 75 95 120 125 130 !i 1 pc. 10 0 DF!

AC Servo Motor Driver (Pulse input type/Positioning type ）

initial communication 0 1 1 0 Load-side encoder initial communication Transmission data error 3 error 1 70.7 DB Load-side encoder initial communication Incompatible encoder (Note 6) 70.8 DB 70.A Load-side encoder initial communication Process error 1 DB 70.B Load-side encoder initial communication Process error 2 DB 70.C Load-side encoder initial communication Process error 3 DB 70.D Load-side

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes

7ND9071en

For ambient temperature over 70 C / 158 F use a heat resistant cable and cable gland suitable for at least 90 C / 194 F.

ZP

How to Order B01 H N 40 25 ZPX A18 J Mounting thread Pad diameter (mm) A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 40 50 40 50 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Pad type Buffer stroke (Rotating) H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 N S NBR Silicon rubber 100 Spring Force U Urethane rubber F Fluoro rubber 40 to 80 Pad diameter 100, 125 E EPR 6.9

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Exhaust NVFR4400 NVFR4410 % 2.8 180 70 or less 1.S1 (0.73) center 1h 2.8 Pressure NVFR4500 NVFR451 0 % 3.S 180 70 or less 1.S1 (0.73) center 1h 3.S The Agures lIated are without subplate.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Kit components 1 70% flat black Rod cover Aluminum alloy 40 CHA40-PS 2 70% flat black Head cover Aluminum alloy 50 CHA50-PS Hard anodized Aluminum alloy 3 Cylinder tube 63 CHA63-PS Carbon steel Nos. 17 to 22 from the chart at left 80 CHA80-PS 4 Hard chromium electroplated Piston rod Carbon steel 100 CHA100-PS 5 Piston Aluminum alloy 125 CHA125-PS 6 Cushion ring Rolled steel 160 CHA160-PS

Table of Contents

N.C. 125 AC 250 AC 30 DC 125 DC 1.3 0.8 2.5 1.5 0.7 0.5 1.5 1 3 0.05 2 0.05 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 1500 VAC, Hz for 1 min.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 10-SY3000 10-SY7000 Port size Weight (g) Port size Weight (g) M8 Connector Actuation type Valve model Valve model Actuation type Grommet L/M plug connector DIN terminal Grommet L/M plug connector M8 Connector A, B A, B Single Single 51 55 49 105 109 103 126 2 position 2 position Double Double 73 81 70 128 136 125 170 10-SY360--M5 10-SY760--

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

100 1000 70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Series SV

related components Total stroke time s Solenoid valve Tubing Speed controller Silencer 0.0 0.4 0.8 1.2 1.6 2.0 2.4 2.8 3.2 3.6 4.0 800 MB 63 10% 30% 50% 600 Stroke mm 70% 30% AS3201F -02-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200