5 Port Solenoid Valve, Series VQC

160.5 4 87 135.5 162.5 173 5 97.5 146 175 185.5 6 108 156.5 187.5 198 7 118.5 167 187.5 198 8 129 177.5 200 210.5 9 139.5 188 212.5 223 10 150 198.5 225 235.5 11 160.5 209 237.5 248 12 171 219.5 250 260.5 13 181.5 230 250 260.5 14 192 240.5 262.5 273 15 202.5 251 275 285.5 16 213 261.5 287.5 298 VV5QC21 S Kit (Serial Transmission Kit: EX500) (L3) (L4) L2 L1 38.5 P = 16 34.5 38.5 76.5 1 1

LEF-OM002xx

Weight Model LEFS16 Stroke(mm) 50 100 150 200 250 300 350 400 450 500 Weight(kg) 0.83 0.90 0.98 1.05 1.13 1.20 1.28 1.35 1.43 1.50 0.12 Additional weight for lock(kg) Model LEFS25 Stroke(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Weight(kg) 1.70 1.84 1.98 2.12 2.26 2.40 2.54 2.68 2.82 2.96 3.10 3.24 3.38 3.52 3.66 3.80 0.26 Additional weight for lock(kg) Model LEFS32

MXW Series Long Stroke Slide Table

150 150 Long Stroke Slide Table MXW Series Dimensions MXW 20 Stoke: 150, 175, 200, 225, 250 (mm) Operating port 2-Rc (PT) 1/8 Width across hexagon socket hole 4 J 20 Scale: 20% 10 Width across flats 13 8-M5 x 0.8 thread depth 13 (Helisert) 6H9 +0.03 depth 5.5 6H9 +0.03 depth 5.5 0 0 7 72 98 48 Y Y 25 160 40 40 40 L 11 24 24 K A 60 50 32.5 Z A N-M6 x 1 thread depth 12 (N-1) x H G Bottom

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Profile Design ISO/VDMA Air Cylinder Series CP95

Bore stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 700 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 800 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600, 700, 800 1400 100 25, 50, 80, 100, 125, 160, 200,

Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

4/5 Port Solenoid Valve

Station n L1 L2 Station 2 78 50 Station 20 438 410 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 65 Series SYJ7000 Type 42: Side Ported/SS5YJ7-42Stations C6,N7 C8,N9 [ ]: AC Grommet (G) 122 [126.4] Approx. 300 (Lead wire length) Manual override L1 14 L2 4-4.5

CV/MVGQ

Standard Stroke Standard stroke (mm) Note) Bore size (mm) Symbol Specifications 25, 50, 75, 100, 125, 150 20 -XA Change of rod end shape 25, 50, 75, 100, 125, 150 25 25, 50, 75, 100, 125, 150, 200 32 25, 50, 75, 100, 125, 150, 200, 250 40 Note 1) Intermediate stroke except mentioned above is produced upon receipt of order.

LJ1H

Positioning distance (mm) 1 10 100 250 500 10 0.4 1.3 10.3 25.3 50.3 100 0.4 0.5 1.4 2.9 5.4 Speed (mm/s) 300 0.4 0.5 0.8 1.3 2.1 600 0.4 0.5 0.7 1.0 1.4 Values will vary slightly depending on the operating conditions.

Table of Contents

200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

Fieldbus System

219.7 230.2 240.7 251.2 261.7 272.2 282.7 293.2 303.7 314.2 324.7 335.2 345.7 127 139.5 152 164.5 177 177 189.5 202 214.5 227 239.5 239.5 252 264.5 277 289.5 302 314.5 314.5 327 339.5 352 364.5 377 137.5 150 162.5 175 187.5 187.5 200 212.5 225 237.5 250 250 262.5 275 287.5 300 312.5 325 325 337.5 350 362.5 375 387.5 31 Plug-in Unit: For EX260 Integrated-type (For Output) SerialTransmission

Air Slide Table/Long Stroke Type Series MXY

Symbol Specifications X7 PTFE grease Standard Stroke (mm) X9 Grease for food X11 Adjusting bolt, long specification (Adjustment range: 15 mm) X12 Adjusting bolt, long specification (Adjustment range: 25 mm) Magnetic holding force 19 34 77 Standard stroke 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350, 400 Model MXY6 MXY8 MXY12 Model MXY6 MXY8 MXY12 X39 Fluororubber

48

[lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8 11 300 300 250 250 Overhang: L4 [mm] Overhang: L4 [mm] m L4 500 mm stroke or less 200 200 600 mm stroke or less 150 150 100 100 600 mm stroke 50 50 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8 11 500 500 Overhang: L5 [mm] Overhang: L5 [mm] 400 400 500 mm stroke or less m 300 300 L5 600 mm stroke or less

asilltr

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.

Air Cylinder NCQ7 Series Compact Cylinder

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.

Air Catch Sensor Series ISA

ISA2-G ISA2-H Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.0 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.0 0.6 0.4 0.5 mm 0.5 0.25 mm Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4

LEC-OM07605CN

EMC (2) EMC EMC MCCB MC 1 4 L1 (1) 2 5 (1) L2 3 6 L3 E L11 L21 ( (RSPD-250-U4) () (2) (2) (RSPD-250-U4) (OKAYA) 1 2 3 1. AC200V240VL1L3L2 2. 11 29 11.

CP95

, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320

CP95

, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320

Series AP500

psig (1.0 MPa) 100 0.69 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 40 0.28 20 0.14 0 0.00 0 50 100 150 200 250 300 350 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.