LJ1H

Lateral 0.2 0.1 200 300 500 100 Load point distance (mm) LJ1H20 LJ1H30 10 20 10 Lateral load 100% 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 1000 Horizontal load 50% Horizontal load 100% 1000 Horizontal load 50% 500 500 200 Amount of deflection (m) Amount of deflection (m) 200 100 100 50 50 20 20 10 10 Lateral load 100% 5 Lateral load 50% 5 Horizontal empty weight deflection

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Lateral 0.2 0.1 200 300 500 100 Load point distance mm LJ1H20 LJ1H30 20 10 Lateral load 100% 10 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 Horizontal load 50% 1000 Horizontal load 100% 1000 Horizontal load 50% 500 500 Amount of deflection m Amount of deflection m 200 200 100 100 50 50 20 20 10 Lateral load 100% 10 5 Lateral load 50% 5 Horizontal empty weight deflection 2 2

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Standard Strokes Bore size [mm] Standard stroke [mm] Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 1000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 1900 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 100 25

JXCx-OMU0004

300 40 300 30 300 12 300 2 40 400 30 400 15 400 50 400 40 400 15 400 3 50 500 40 500 20 500 60 500 50 500 20 500 4 60 600 50 600 25 600 80 600 60 600 25 600 5 80 700 60 700 30 700 100 700 80 700 30 700 6 100 800 80 800 40 800 200 800 100 800 40 800 7 200 900 100 900 50 900 300 900 200 900 50 900 8 300 1000 200 1000 75 1000 500 1000 300 1000 75 1000 9 400 1200 300 1200 100 1200 600 1200 400

MGG

20 27 5.5 6 8 4 16 134 150 102 118 9 9 85 140 M8 35 149 16 170 50 93 95 134 50 75 25 75, 100, 125 34 6.5 9 10 7 19 170 186 134 150 9 9 105 175 M8 45 149 16 170 50 93 95 134 50 75 32 150, 200, 250 34 6.5 9 10 7 19 170 186 134 150 9 9 105 175 M8 45 182 19 194 55 103 115 152 56 90 40 300 38 7 11 12 7 21 190 210 140 160 11 12 115 200 50 M10 For long strokes Bore size (mm) Stroke range (mm) Bore

NCM

Applicable load Relay, PLC Load voltage 24 VDC 100 VAC 200 VAC Load current range Note 3) 5 to 50 mA 5 to 25 mA 5 to 12.5 mA Contact protection circuit Built-in Internal voltage drop 2.4 V or less (to 20 mA)/3.5 V or less (to 50 mA) Indicator light Red LED illuminates when turned ON. Standard Conforming to CE D-B6 (Without indicator light) D-B64 Auto switch part no.

Thermo-chiller

to 230 VAC (50/60 Hz) M5 R5.5-5 (3 cores x AWG10) Including grounding cable 30 30 HRLE090-m-20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) M5 R5.5-5 4 cores x 5.5 mm2 30 (4 cores x AWG10) Including grounding cable HRLE090-m-40 3-phase 380 to 415 VAC (50/60 Hz) 3-phase 460 to 480 VAC (60 Hz) M8 R5.5-8 20 An example of the cable specifications is when two kinds of vinyl insulated

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

High Vacuum Angle Valve

plug connector M type plug connector 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz XLA U 5 24 VDC 6 12 VDC S type: Not available for AC.

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

Base Mounted Metal Seal/Rubber Seal Series VQ

Coil rated voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Wiring Specifications The lead wires are connected to the valve as shown below. Connect each to the power supply side.

CLS

With rod boot Bore size (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 l M MB MM P S T U V W Z ZZ MA N RR f h ZZ1 S e Z1 Z 383 ZZ 412 Z1 406 ZZ1 435 19 19 22 26 26 30 1/2 1/2 3/4 3/4 3/4 1 5 5 5 35 40 45 50 50 65 35 35 39 39 39 49 29 32 36 44 44 55 M30 x 1.5 98 30 30 30 383 412 40 40 40 45 45 55 30

SYJ300/500/700

It is already built-in to the rectifier circuit. 50 60 100 VAC Hz 1 2 200 VAC Hz 50 60 50 60 110 VAC Hz [115 VAC Hz] 3 Electrical entry 50 60 50 60 50 60 DIN terminal D With connector 4 220 VAC Hz [230 VAC Hz] DO Without connector DC specifications of type "D" and "DO" is only available with 12 and 24 V DC. Power saving circuit is not available in the case of "D", "DO" type.

Guide Cylinder Series MGG

9 9 75 135 M8 30 130 35 65 70 100 35 54 M6 x 1 depth 13 100 75, 100 125, 150 200, 250 300 14 16 134 150 102 118 9 9 85 140 M8 35 135 40 73 80 106 35 60 M6 x 1 depth 13 120 17 19 170 186 134 150 9 12 105 175 M8 45 170 50 93 95 134 50 75 M8 x 1.25 depth 16 140 23 21 190 210 140 160 11 12 115 200 50 194 55 103 115 152 56 90 M10 x 1.5 depth 21 M10 170 Bracket Mounting Stroke Long Stroke Stroke

C76

101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to 100 70 77 101 to 150 82 89 151 to 200 201 to 300 120 127 301 to

C76

KK Stroke Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to 100 70 77 101 to 150 82 89 151 to 200

IDU/IDF

Power supply Inlet air pressure (MPa) 0.15 to 0.1 4W Power consumption Ambient temperature (Humidity) (C) 2 to 40 (Relative humidity of 85% or less) 2 to 43 JIS Symbol Three phase 200/220VAC (50/60Hz) Three phase 380VAC (50Hz) Three phase 415VAC (50Hz) Three phase 200/220VAC (50/60Hz) Three phase 380VAC (50Hz) Three phase 415VAC (50Hz) Three phase 200/220VAC (50/60Hz) Power source Refrigerated

Programless controller Step motor (servo 24 VDC)

LEFS16A LEFS16B LEFS25H LEFS25A Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s] [mm/s2] [mm/s2] 0 10 200 5 200 20 200 12 200 1 20 300 10 300 30 300 20 300 2 30 400 15 400 40 400 30 400 3 40 500 20 500 50 500 40 500 4 50 600 25 600 60 600 50 600 5 60 700 30 700 80 700 60 700 6 80 800 40 800 100 800 80 800 7 100 900 50

Electric Actuators

] Set value of pushing force [%] Duty ratio [%] Continuous pushing time [minute] 60 or less 100 70 or less 100 70 30 3 80 70 10 100 15 1 100 50 5 12 Series LEPS Dynamic Allowable Moment Model Mounting orientation Load overhanging direction m: Work load L: Overhang to the work load center of gravity [mm] LEPS6 LEPS10 LEPS6m-25 LEPS6m-50 LEPS10m-25 LEPS10m-50 200 200 200 200 Overhang: L1