5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

10 stations Rc 3/4 Note 1) Max. 10 stations.

AC Servo Motor Driver (CC-Link Type ）

4 10.

LG1H

LG1H/ Aluminum body With single end support and table moved to the end of the stroke W 10 50 Horizontal load 100% Horizontal load 50% 10 20 Amount of deflection (m) Horizontal Load point distance 1000 500 100 200 W 50 20 10 5 Lateral load 100% 1 2 Lateral load 50% Horizontal empty weight deflection Lateral empty weight deflection Load point distance Lateral 0.5 0.1 0.2 100 200 300 500 1000

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

0.

Blanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 L Dimensions (mm) A Applicable fitting size d Model A L D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 D L DIN rail AXT100-DR-l 7.5 As for l, enter the number from the DIN rail dimensions table.

Smooth Cylinder/Low Speed Cylinder

Vacuum port, Refief port 1 to 200 mm/s 0.5 to 200 mm/s 8 M8 x 1.25 10 12 14 M14 x 1.5 8 M8 x 1.25 10 12 14 M14 x 1.5 REC M10 x 1.25 M10 x 1.25 +1.4 0 mm CY 1/8 1/8 1/4 1/4 M5 x 0.8 CX CX Precautions MQ RHC Be sure to read before handling.

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

SV

400 CM2 20 MB 32 10% 30% 50% 70% 10% 30% 50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150

VFS

. 3 8 10 stations 10 Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations Symbol Porting specifications (A, B) Passage Symbol R1, R2 P 1 Side 2 Bottom Common Common Caution Option When using an exhaust cleaner, mount it downwards.

1.63

pressure 0.5 MPa Ball bushing MGPWL20 to 25, MGPWA20 to 25 (5) 25 stroke or less, V = 200 mm/s or less (6) Over 26 stroke, 100 stroke or less, V = 200 mm/s or less 10 10 25 25 20 20 Load mass m (kg) Load mass m (kg) 1 1 0.1 0.1 10 100 10 100 Eccentric distance L (mm) Eccentric distance L (mm) (7) Over 101 stroke, 200 stroke or less, V = 200 mm/s or less 10 25 20 Load mass m (kg) 1 0.1 10

CA2

10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 10 12 16 20 25 16 19 23 28 36 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 15 18 25 8 11 11 13 16 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 6-8-36 37 Series CA2Q Air

CXWM/CXWL

Bore size/Stroke (mm) 10 (25), 50, 75, 100 16 (25), 50, 75, 100, 125, 150, 175, 200 20 (25), 50, 75, 100, 125, 150, 175, 200 25 (25), 50, 75, 100, 125, 150, 175, 200 (25), (50), 75, 100, 125, 150, 175, 200 End lock 32 R End lock Note1) For the strokes indicated in the parentheses of the 10, 16 and 25, shock absorbers are to be mounted on both sides of the plate.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

200 Mey m 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

(mm) 125 14 10 17 160 180 14 10 17 140 14.5 10 17 200 14.5 10 17 13 10 17 D-Z7/Z80 D-A3/A44/A5/A6 D-A59W D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W D-F5BAL/F5NTL/F59F D-G39/K39 ~ = " Hs A 13 12 7.5 8 7 7 6 6 7 7 " Ht 5.5 5 6 6 5 ~ = 10 10 10 11 11 Since this is a guideline including hysteresis, not meant to be guaranteed.

Membrane Air Dryer

50 50 100 100 200 200 Size Drain discharge H Note Symbol 3 5 10 20 method Manual $ $ $ $ Nil valve Auto-drains listed on N.C.

Thermo-chiller

VAC (50 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) Electrical system Earth leakage breaker (Standard) Rated current A 30 Sensitivity current mA 30 Rated operating current 50/60 Hz A 14/17 Rated power consumption 50/60 Hz kW(kVA) 4.3/5.3 (4.9/5.8) Communication function

5 Port Solenoid Valve Series VQZ1000/2000/3000

200 100 0 SV VQZ2121-C6 SYJ SZ 800 700 600 500 400 300 200 100 0 VP4 VQZ3121-C6 S0700 VQ Base Mounted Bore size VQ4 Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series VQ5 6 10 16 20 25 32 40 40 50 63 80 100 VQC 800 700 600 500 400 300 200

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

, 15, 25 10, 15, 20 125 to 160 125 to 160 125 to 200 12 to 100 80 to 100 63 to 100 40 to 100 32 to 100 40 to 100 32 to 100 32 to 100 20 to 63 20 to 50 20 to 80 16 to 32 10 to 32 12 to 25 20 to 40 20 to 40 20 to 40 20 to 40 32 to 63 25 to 50 25 to 40 25 to 40 6 to 32 32, 40 Bore size 6, 10 10 16 20 25 20 25 D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39

10

If there is something you do not know, please contact SMC. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.