Precautions 1

151 to 200 201 to 300 101 to 150 151 to 200 201 to 300 20 25 32 40 81 93 106 131 25 37.5 50 75 23.5 10.5 12.5 36 30 68 18 85 97 110 135 25 37.5 50 75 23.5 10.5 12.5 36 32 72 18 85 97 110 135 25 37.5 50 75 23.5 10.5 36 12.5 32 72 18 102 27 46 90 115 140 25 37.5 50 75 10.5 12.5 41 77 20 D(mm) ZZ Bore size (mm) -X 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 143 156 168 181

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80

Air Slide Table

125 MXQR20-150 MXQR20-40 MXQR20-100 MXQR20-125 MXQR20-150 0.06 MXQR20-50 MXQR20-150 MXQR20-100 0.08 MXQR20-125 MXQR20-30 0.04 MXQR20-20 MXQR20-100 0.04 MXQR20-20 MXQR20-10 0.04 0.02 MXQR20-10 0.02 0 0 0 100 200 300 100 200 300 400 500 600 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQR25-150 MXQR2550 MXQR2575 MXQR2510 MXQR2520 MXQR2530 MXQR2540 MXQR2510 MXQR2520 MXQR2530

Vacuum Module Series ZX

(Individual exhaust for Pilot valve) Rated voltage Ejector assembly Combination/ ZX-WD Used as a unit by attaching an adapter/ ZX-W 1 100 VAC 110 VAC 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Applicable to plug connector only.

ZX

ZX 36 A VJ10 ZR Rated voltage Lead wire length ZM (Mounting hole) Symbol L (mm) Symbol Rated voltage Lead wire color Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.)

Series SV

IP65 MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN (mm) 8 7 6 5 4 3 2 1 Stations 185.5 173 160.5 148 135.5 123 110.5 98 Rail length L1 175 162.5 150 137.5 125 112.5 100 87.5 Mounting pitch L2 158 146 134 122 110 98 86 74 Manifold length L3 13.5 13.5 13 13 12.5 12.5 12 12 L4 Input block (M12) only (Pitch) P = 20

7ND9071en

Measurement range 110 with freely rotating feedback shaft.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

T-slot 1 110 2-T-slot 2 170 8-9 Body mounting reference plane 110 (T-slot pitch) 20 80 3.3 5.8 76 1.7 5.3 4-8H10 depth 19 T-slot 1 dimensions (Switch groove) 110 30 (65) Stroke + 97 110 8 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

CV/MVGQ

2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 10 35 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 35 + 30 (n 2) n = 2, 3, 4 90 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 110

Electric Actuator

Note 2) For interface use, supply 24 VDC o10% 150 mA using an external source. Note 3) The failure (ALM) is ON during normal conditions.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

/N.O. 10-SV3000 Double solenoid 102 2(B) 4(A) 2(B) 4(A) 3 position 110 Single solenoid 186 10-SV4000 Double solenoid 190 1(P) 5(EA) 3(EB) 5(EA) 3(EB) 1(P) 3 position 211 N.C./N.O. N.C./N.O.

AC Servo Motor Driver (CC-Link Type ）

The following graphs show overload protection characteristics. 1000 1000 Operating Operating Operating 100 100 Operation time [s] Operation time [s] Servo-lock Servo-lock 10 10 1 1 0.1 0.1 350 100 200 300 400 0 50 150 250 350 100 200 300 350 0 50 150 250 Load ratio [%] (Note 1, 2, 3) ) (Note 1, 2) Load ratio [%] LECSC2-T7, LECSC2-T8, LECSC2-T9 LECSC2-T5 Note1.

Step Motor Controller

Note 2) For interface use, supply 24 VDC 10% 150 mA using an external source. Note 3) The failure (ALM) is ON during normal conditions.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

MY1

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

AC Servo Motor Driver (CC-Link Type ）

Igm: Leakage current of the servo motor (Found from Table 13.4.) 120 120 100 100 Leakage current Leakage current 80 80 60 60 40 40 [mA] [mA] 20 20 0 2 0 14 100 5.5 38 2 3.5 8 1422 38 80 150 5.5 30 60 100 3.5 8 22 60 150 30 80 Cable size[mm2] Cable size[mm2] a. 200V class b. 400V class Fig. 13.4 Leakage current example (lg1, lg2) for CV cable run in metal conduit 13 26 13.

Air Slide Table Series MXQ

150 50 100 200 50 100 200 0 (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) 20 20 20 Lr = 160mm MXQ20-150 MXQ20-125 0.08 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-40 MXQ20-50 0.12 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 0.06 Table displacement mm Table displacement mm Table displacement mm 0.06 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-50 MXQ20

VZS

5 121 130 4 101 110 3 81 90 2 61 70 L1 L2 Insert plug with lead wire: VV5ZS2-51GStation 1Port size 2-4.5 mounting hole Manual override 2n-Rc 1/8, 1/4 Indicator light U side (n) (2) (1) Stations D side 2-C6, C8 A 2 B 10.7 31.5 (Port size: One-touch fitting type) (Electrical entry) n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181