Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40

XLAQ/XLDQ

55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

D-A93 D-M9B D-M9N, D-M9P Type Load voltage Load current range Indicator light Application 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA, 5 to 20 mA 2.5 to 40 mA 40 mA or less Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC Reed auto switch Solid state auto switch Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0 M5 x 0.8 14 12.5 21.5 19 22 19 19 16 16 14 6 5 7.6 depth 6.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110 98.5 113.5 9.5 depth 8 105 115 120 125 83 88 93 98 103 108 118 128 106 111 116 121 126 131 141 151 5.5 9 4.5 20 25 15.5

JIS Standard Hydraulic Cylinder

25 32 M20 x 1.5 31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 CHK B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 CHN H 0.1 0.4 D +0.1 0 50 40 185 145 57 79 M48 x 1.5 76 40 M8 x 1.25 +0.07 0 25 16 76 60 25 32 M16 x 1.5 26 16 M5 x 0.8 CHM C +0.084 0 31.5 20 90 70 30 40 M20 x 1.5 31 20 M5

Compact Rotary Actuator Series CRQ2

, 15 10, 15 20, 30, 40 10, 15, 20, 30, 40 10, 15, 20, 30, 40 Change in angle adjustable range 0 to 100 Change in angle adjustable range 90 to 190 Chart 5.

Environment

20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces, Same surface) With 1 pc. 70 75 80 85 95 100 15 D-A9 70 + 40 (n 4)/2 n = 4, 8, 12, 16 80 + 40 (n 4)/2 n = 4, 8, 12, 16 85 + 40 (n 4)/2 n = 4, 8, 12, 16 95 + 40 (n 4)/2 n = 4, 8, 12, 16 100 + 40 (n 4)/2 n = 4, 8, 12, 16 15 + 40 (n 2)/2 n = 2, 4, 6, 8 75 + 40 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

Air Slide Table Series MXS

MXS6-30 MXS6-10 MXS6-40 MXS6-50 MXS6-40 MXS6-50 0.005 0.01 0.01 10 20 30 40 10 20 30 10 20 30 40 0 0 0 Load (N) Load (N) Load (N) 8 8 8 Lr=50 mm 0.020 0.04 0.05 MXS8-75 MXS8-50 MXS8-20 MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 0.03 MXS8-40 MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-75 MXS8-30 MXS8-20 0.010 0.02 MXS8-20 MXS8-10 0.02 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 95 (n 4) 2 15 + 40 (n 2) 2 80 + 40 (n 4) 2 85 + 40 (n 4) 2 (n 4) 2 (n 4) 2 D-M9/M9W 80 + 40 95 + 40 90 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting B L F G BZ FZ Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange Solid state Auto switch M9B, M9BW Reed

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

mm 300 100 200 MGJ 100 100 MGP 80 Load mass m (kg) Load mass m (kg) Load mass m (kg) 80 80 MGQ 10 10 10 63 63 63 MGG 50 50 50 MGC 40 1 1 1 25 20 25 20 40 32 40 32 MGF 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 MGZ Stroke (mm) Stroke (mm) Stroke (mm) MGT 2.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches 32 40 50 63 80 100 2 (Same surface) 50 D-M9l D-M9lW 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-M9lV D-M9lWV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 55 50 D-M9lA 1, 2 (Different surfaces) 15 10 n 15 + 40 (n 2) 10 + 40 (n 2) 2 (Same surface) 40 D-M9lAV 1,

Air Cylinder Series CS1

32 40 8 60 55 34 39 28 4 5 M36 x 1.5 4 x 40 110 86.5 76.5 +0.1 0 0.1 0.3 0.080 0.142 40 50 8 67 70 44 32 4 5 M40 x 1.5 4 x 40 125 94.5 84.5 42.5 CG1 +0.1 0 0.1 0.3 0.080 0.142 40 50 8 67 70 44 40 4 5 115 105 M45 x 1.5 4 x 55 125 180, 200 250 300 42.5 +0.1 0 0.1 0.3 0.080 0.142 50 63 9 86 66 M56 x 2 53 50 5 6 144 132 5 x 65 160 75.5 MB +0.12 0 0.1 0.3 0.100 0.174 63 80 9 71 M64 x 2 66 63

CJ2X/CUX/CQSX/CQ2X/CM2X

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

Plate Cylinder

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Size 25 32 40 50 63 Part no.

CJ2X/CUX/CQSX/CQ2X/CM2X

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

CJ2X/CUX/CQSX/CQ2X/CM2X

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

58

(Different surfaces, Same surface), With 1 pc. 105 15 110 115 15 + 40(n 2) 2 (n = 4, 8, 12, 16) 105 + 40(n 4) 2 110 + 40(n 4) 2 115 + 40(n 4) 2 With n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) With 2 pcs.

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility