3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) When specifying more than one option, indicate them alphabetically. 1.12-55 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 VV5QZ25C C Station Port size 33 (11) Grommet(G) (35) 25 (7.5) C6: One-touch fitting for 6 C4: One-touch fitting for 4 01: Rc(PT)1/8 2n-01, C4, C6 11 11.8 7.4 25.5 Mounting holes (5.5) U Side n B 2 A 4 5 Manual override 4 (L4) (L3) L1 L2 3 P=16 21.7 2 P=16

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS22l1FG-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS22l1FG-01-03(S)A 5/32" 8.2 AS22l1FG-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS22l1FG-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS22l1FG-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 17 (18)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

23.1 16 27.1 12.7 20.4 14.3 31.1 36.1 27.5 3.2 9.3 1/4" 12 12 32.1 13.5 R 1/8 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

KJ

Weight Color of release button Model KDM10-01 KDM10-03 KDM10-07 No. of connecting tubes 1 8 5 32 1 4 5 16 1 8 5 32 1 4 5 16 300 g 10 Red KDM10-09 520 g KDM20-01 20 KDM20-03 520 g KDM20-07 KDM20-09 950 g KDM20 Applicable Tubing Tubing material Tubing O.D.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" 1/4" 5/16" Inch size 3/16" 1/4" 5/16" 3/8" Flow Direction Symbols on Body Meter-out type Meter-in

Modular F.R.L. Unit

AC20C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 Y200 IS1000M-20 Model Description AC25C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AC30C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AC40C G46-10-02 GC3-10AS G46-2-02 GC3-2AS AC40C-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS Round Square embedded type 1.0MPa Note 1) Note 2) Pressure gauge Attachments Accessories Round Square embedded type N.O.

Table of Contents

, 16 3/8, 16 1/2, 16 1500 2000 2500 3000 28.5 Composed effective area So (mm2) Composed effective area So (mm2) Composed effective area So (mm2) 100 RHC = 0.7 38 47 0.5 56.5 MK(2) 0.1 0.3 10, 12, 16 1/4, 3/8 50 RS Q G 500 15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

HRX-OM-X071

AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 41 Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in one-touch fitting 65.2 [67.4] Approx. 300 (Lead

A

1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(Size: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering

EXxx-OMU0020CN

Valve diagnostics 2 Valve Module16 Valves (16 coils) FFh . 5-10 Valve diagnostics 2 Bit Description Explanation 0 Valve 16, 17 diagnostics 01 1 Valve 18, 19 diagnostics 01 2 Valve 20, 21 diagnostics 01 3 Valve 22, 23 diagnostics 01 4 Valve 24, 25 diagnostics 01 5 Valve 26, 27 diagnostics 01 6 Valve 28, 29 diagnostics 01 7 Valve 30, 31 diagnostics 01 38 No.EX-OMU0020CN 5.2.

HRX-OM-X084

AL.01AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 scree Contact output signal 2 alarm AL.01 AL.01AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01 MT.01MT.05

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

SFOD-OMT0005CN

01-194) Over current E <> -66- <> <> I sent ALM (1-195) E <> (01-196) E <> <>EEPROM (01-197) E <> (EEPROM 10 ) <>CPU (CPU ) CPU (01-198) CPU E <> *1 (code)-3 Byte16-19 10 -67- 16/ A () (50mm ) () ( ) 5m 5m 10%(15m 20%) -68- 17/ 17.1.

HRX-OM-T004

(Request):01030107F4 [CR][LF] (Response):0183027A [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 83 Function (03h+80h) 0100 Head address of register out of range 02 Error Code (Specified register address is out of range.) 0007 Quantity of register to read 7A LRC F4 LRC 4.9 Negative response HRS090 Series 4-16 HRX-OM-T004

HRX-OM-R028

(Response) [STX] 01[ACK] PV100187 [ETX] [0Fh] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address R Request message to read [ACK] Normal response message PV1 Circulating fluid discharge temperature PV1 Circulating fluid discharge temperature [65h] BCC value 00187 Read information (18.7oC) [0Fh] BCC value 5.8 Command explanation HRSH Series 5-16 HRX-OM-R028