3 Port Air Operated Valve

) VPA VPA 1P 3R 32 3 NO 7 VPA3 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 For vacuum/VPA542V-1(-F) 02 03 A B 1/4, 3/8 2(A) port 41.1 2 x 4.2 (For mounting) 26 NC 2A 3.5 (1.6) 31 25.6 91 (9) 2 x 4.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5 (50) 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port (Distance between ports) 1P 3R 32 3 NO 7 M5 x

7.5

Please refer to Precautions for Handling Pneumatic Devices (M-03-E3A) for Safety Instructions and 3/4/5 Port Solenoid Valves Precautions. Fitting Assembly Replacement Caution M5, M3 port block assembly By replacing a valves fitting assembly, it is possible to change the port size of the 4(A), 2(B), 1(P), and 3/5(E) ports.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(External pilot port) 4 B A Insulation: Black () 23 PE B A 38 46 Insulation: Red (+) X EB EA P 21 69 6.4 21.5 123.3 67.2 M5 x 0.8 (Pilot EXH. port) 71.2 (For E type) L (Lead wire length) 4.1 1.55 0.3 mm2 26.5 11.5 13.5 20.5 20.5 5 x 3/8", 1/4" (Piping ports) 33 L plug connector with cover (LL) 52-SY7140 (R) -LL02 03 L 118.2 (Lead wire length) Insulation: Red (+)

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

5 Port Solenoid Valve

Output) Serial Transmission System IP67 compliant Indicator light Manual override L2 L1 79.5 72 46 P = 25 65.5 6.5 2 x M5 Mounting hole B A B A A A B A B A B A 163 143 9 9 10 A A A A A A A 42 34.5 80 B B B B B 55.5 SI Unit Please use drip proof plug assembly (AXT100-B04A) with unused conduit port (G1/2). n 1 2 3 4 5 6 7 Stations D side 8 U side 3/4" 3(R) port 1/2" 1(P) port 4 x G1/2 Conduit

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

Compact Cylinder with Lock Series CLQ

(Example) For bore size 40 Part number A type mounting bracket . YA-03 Joint . YU-03 J E T1 B 2-D through 2-O counter bore (mm) Bore size (mm) B D E J M O Part no.

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Vacuum Pad

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

E-P HYREG ® Series VY1 1

port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2

Compact Cylinder with Air Cushion and Lock Series RLQ

Mounting bracket YA-03 YA-05 55 100 6 8 18 22 56 67 YA YB YU Type A mounting bracket Type B mounting bracket Joint Type B Mounting Bracket Applicable mounting bracket Bore size (mm) Joint Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 RS Allowable eccentricity (mm) M W T2 V 32 40 50 63 Bore size 1 Eccentricity tolerance Joint 0.5 Backlash

RLQ

YA YB YU Type A mounting bracket Type B mounting bracket Joint Type B Mounting Bracket Applicable mounting bracket Bore size (mm) Joint Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 RS Allowable eccentricity (mm) M W T2 V 32 40 50 63 Bore size 1 Eccentricity tolerance 0.5 Backlash J E Joints are not included with the A or B type

Plug-in/Plug Lead: Single Unit

pilot port) With connector on D side (FD) 2-6-12 Base Mounted Series VQ5000 Plug-in Unit Bottom ported drawing With connector on U side (FU) 106 46.8 59.2 VQC 83.5 9 9 55.5 M5 ground screw 2n-Rc 1/2 4(A), 2(B) port SQ 34.5 VQ0 n U side X 12 VQ4 B 2 A 4 6 B A VQ5 B 2 A 4 VQZ 5 SMC SMC SMC SMC SMC B A VQD B 2 A 4 4 B A P = 41 L1 L2 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 A 4 B 2 1

125

Applicable cable O.D. 3.5 to 7 63.9 Max. 10 101.7 56.4 45.1 VEX3121: M5 VEX3122: None (Port PA/Pilot air) M5 (Port PE/ Pilot exhaust) Pg7 M5 (Port P1/Pilot air) M5 (Port P2/Pilot air) Manual override A B P2 P1 102.6 PA 3 R A 2 A 2 64.1 61.8 59.1 58.6 58.1 58.1 1 P 1730 3 Port 3 Position Valve VEX3 Series Dimensions: Body Ported/VEX332 External pilot solenoid: VEX3321 Internal pilot solenoid

Compact Cylinder with Air Cushion and Lock Series RLQ

(mm) Joint A type mounting bracket B type mounting bracket 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 RS Allowable eccentricity (mm) M W T2 V 32 40 50 63 Bore size 1 Eccentricity tolerance 0.5 Backlash J E Joints are not included with A type and B type mounting brackets.

Series AS-FM/AS-M/ASD-FM

100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.