Modular F.R.L. Pressure Control Equipment

G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type G27-10-R1 Pressure gauge Note 1) Attachments Note 3) G27-10-R1 Round type (with color zone) Square Note 2) embedded type GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] Note 4) ISE35-R-25-MLA [ISE35-R-25-M

Valve Single Unit

SX (Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) L plug connector (L): SX3240(R)-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

JXCx-OMX0009

The basic parameter is not correct for the following condition: (Settable range) (1) Stroke(-) < Stroke (+) (2) W-Area 1 < W-Area 2 ( If both W-Area1 and W-Area2 is 0, the alarm will not be activated.) Parameter value is wrong Parameter ALM B RESET (3) Maximum pushing force < Maximum pushing force of actuator (01-049) Modify the basic parameter setting.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Speed Controller with Indicator

: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1 T H (Width across flats) Metric Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-23 (S) 3.2 7.2 13 (13) AS221FS-01-04 (S) 4 8.2 AS221FS-01-06 (S) 6 10.4 14 (13) AS221FS-01-08 (S) 8 13.2 22.4 29.5 14.2 15 (14) AS221FS

SQ1000/2000

1 Port plugs> CP VVQZ3000 w e r t

KJ

A VMG M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 1.4 2.4 1.1 1.4 2.4 1.8 2.5 1.6 1.8 2.5 5 7 4.5 5 7 9 11 8.5 9.3 11.3 13 15 12.5 13.3 15.3 4.0 4.4 4.0 4.1 4.5 M5 x 0.8 M-5ALN-6 M-5ALU-6 M5 x 0.8 Barb Elbow for Nylon Tubing: M-5ALHN-4/-6 Barb Elbow for Soft Tubing: M-5ALHU-3/-4/-6 Effective area (mm2) Weight (g) Width across flats 7 M-5ALHN-4 M-5ALHU-3/-4 Model A B C D M-5ALHN-4 M-5ALHN

Modular/F.R.L. Units Series AC

0.5 m 0.5 m 0.5 m 3 m 3 m 3 m 3 m Option 500 Note) This product is for overseas use only according to the new Measurement Law.

Air Fittings & Tubing

See p.2.2-15. 2.2-10 Series KQ2 Male connector: KQ2H 01-32 KQ2H03-32 07-32 01-32 KQ2H03-32 07-32 Tube O.D. (inch) M Min. hole dia. Thread UNF NPT H (Hex.) (1) Weight (g) Part No.

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.

0.

M-type plug connector (M) P.2 (A) 2 M-type plug connector (M) Rubber Metal VQZ100 + 1 (P) 3 (R) N.O.

VZ100/300/500

: 600 mm Bracket (Mounting hole) (Mounting hole) (Mounting screw) (P , A, R port) (PE port) L plug connector (L) VZ52-L-01 M plug connector (M) VZ52-M-01 DIN terminal (D) VZ52-D-01 Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-32 33 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Base Mounted

Valve Single Unit

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

VZ5000

Closed Center/Exhaust Center/Pressure Center VZ5320 Grommet (G), (H) VZ5 20-01 G H (Mounting hole for manifold) 3 4 5 Manual override (Non-locking) VZ5420 VK VZ VF (Lead wire length) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire

Modular F.R.L. Unit

AC20C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 Y200 IS1000M-20 Model Description AC25C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AC30C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AC40C G46-10-02 GC3-10AS G46-2-02 GC3-2AS AC40C-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS Round Square embedded type 1.0MPa Note 1) Note 2) Pressure gauge Attachments Accessories Round Square embedded type N.O.

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Rubber seal 5 Port Solenoid Valve Series SYJ7000

manifold mounting) 1/8 (A, B port) One-touch fitting (A, B port) (4.9) 2-3.2 (For mounting) (Light/surge voltage suppressor) Applicable tubing O.D.: 6, 1/4" : 8, 5/16" 35 36 + 28 25 16.1 31.5 [38.5] 21 1.6 P R2 R1 18 1.6 (PE port) 1/8 (P, R1, R2 port) 27.2 L plug connector (L): SYJ7220-L-01 M plug connector (M): SYJ7220-M-01 DIN terminal (D): SYJ7220-D-01 M8 connector (W0): SYJ7220-W0-01

Series KP/KPQ/KPG

D2 A L2 H Connection threads Union Tee: KPQT, KPGT (M5) H (width across flats) 2-Applicable tubing Effective area mm D1 Model L1 TPH TPS A Note 1) Applicable tubing O.D. mm Connection threads R (M5) Weight g L2 D2 M M L1 M L1 8 10 14 8 10 14 12 14 KPGT04-M5 KPGT04-01 KPGT04-02 KPGT06-M5 KPGT06-01 KPGT06-02 KPGT08-01 KPGT08-02 KPGT10-02 KPGT10-03 KPGT12-03 KPGT12-04 KPQT04-M5 KPQT04-01 KPQT04