Precautions 1

Confirm S dimension and solenoid dimensions. 1569 Series CVM5 Head Side Flange Style (G) CVM5G Bore size Stroke Max. 21 Min. 18 x Mounting hole Width across flats B2 Manual override Width across flats B1 Width across flats NA x In the case of 40 Mounting hole S + Stroke Z + Stroke ZZ + Stroke In the case of 20 to 32 (mm) HX H2 H1 H FZ FY FX FT FD F D Eh8 C2 B2 B1 B AL A Stroke range Bore

Environment

B2 LECSB2/Pulse input (Absolute encoder) 200 V to 230 V C2 LECSC2/CC-Link (Absolute encoder) 200 V to 230 V !

Directional Control Driver for Electric Cylinder

size 3) DC motor (cylinder size 5) Option Cable for power supply terminal LC3F2 1 C1 02 1 CN1 Power Supply Terminal Table 2 3 1 Optional cable color Terminal Function Pin number Cable type Cable length 01 02 1 m 2 m Yellow/Green FG Frame ground 1 Cable for CN1 power supply terminal C1 Cable length 60 5 60 5 2 Brown DC (+) Driver power supply (+24 V) Cable for control terminal LC3F2 1 C2

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Applicable bore size SNJ-016C SNKJ-016C 10 16 C1 d C2 d B1 B2 H1 H2 14 17 16.2 19.6 4 4 7 8 8.1 9.2 3.2 4 M10 x 1.0 M12 x 1.0 M4 x 0.7 M5 x 0.8 The applicable mounting nuts are different from those for standard cylinders. 7 B CJ2W-Z Series 10-/1121-/22Double Rod Cylinder 10, 16 How to Order Clean series 10 11 Relief type Vacuum suction type M9BW Z 60 16 L W 2 J D C 10 B M9BW Z 60 16 L

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators d C2 C1 B2 H2 B1 H1 Material: Carbon steel (mm) Material: Carbon steel (mm) Part no. Applicable bore size Part no.

CV/MVGQ

override Mounting hole REC Width across flats B1 CX CY Width across flats B2 Width across flats NA MQQ M Mounting hole S + Stroke Z + Stroke ZZ + Stroke RHC In the case of 40 In the case of 20 to 32 MK(2) Single acting, Spring extend: CVM3G T Bore size Stroke RS Q G RS H A RZQ MI W S CEP1 H + Stroke CE1 Z + 2 x Stroke ZZ + 2 x Stroke CE2 ML2B I H1 H FZ FY FX FT B1 FD MM B F K AL B2 C2

5 Port Solenoid Valve

61 107.8 9 A A A A A R1 5 R2 3 179 29.5 29.5 1 P 106 PE 9 B B B B B 12 19 SI Unit 21 3 x 3/4" 1(SUP), 5(R1), 3(R2) port 47.5 1/8" (Pilot EXH. port) n D side U side 5 4 3 2 1 6 Station 1/2" <3(R) port> M5 Ground screw Communication connector C1 (M12 Female thread) 117 B 2 B 2 B 2 B 2 B 2 B 2 15.5 3 1 69 55.5 53.7 60 12 X 51 22 19 17 4 A 4 A 4 A 4 A 4 A 4 A 24 34.5 Communication connector C2

VS 8-2/VS 8-4

463 508 15 490 535 16 517 562 6 5 4 3 2 247 292 220 265 193 238 139 184 L1 L2 VV802 (Size 18 mm) S kit (Serial transmission kit: EX500) Rc, G (According to ISO1179-1), NPTF 1/8" Pilot port M4 x 7 earth thread 2 x Rc, G (According to ISO1179-1), NPTF 3/8" 3(R) port Rc, G (According to ISO1179-1), NPTF 1/8" Pilot exhaust port C1 (M12) 0 0 57.5 82 60 30 1 1 35.5 31.3 22 28.5 34.5 11.3 13.5 C2

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

BM Bellows type with groove UM Flat type with groove KJH C2 06 Pad diameter Applicable tubing O.D. 63 63 80 80 04 4 06 6 03 5/32" 07 1/4" When changing the pad diameter, replace also the plate together. !

Table of Contents

M26 x 1.5 M10 x 1.25 30 55 15 137 25 8 20 64 M26 x 1.5 M10 x 1.25 34.5 55 15 171 27 10 23 88 M32 x 2 42.5 75 21.5 M14 x 1.5 Rod Side Flange Style (F) Bore size Stroke CVM5F Manual override Width across flats B2 Width across flats B1 Mounting hole Width across flats NA In the case of 40 Mounting hole S + Stroke ZZ + Stroke In the case of 20 to 32 Eh8 H1 H FZ FY FX B1 FT B FD AL F A B2 C2

MY1

Model B3 C1 14 20 22 C2 39 44 54 E1 1 1 1 E2 1 1 1 B1 28 40 44 78 88 108 96 111 131 MY-J25 MY-J32 MY-J40 8-11-29 29 Series MY1B Floating Bracket Facilitates connection to other guide systems. Applicable bore size Floating Bracket Operating Precautions Caution Make sure that the amount of divergence from the external guide is within the adjustable range.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

x 0.7 M6 x1 M8 x1.25 M10 x1.5 1 1 1 1 1 1 1 1 38 55 72 100 20 22 32 40 4.5 5.5 6.5 9.0 10 12 16 19 6.0 9.5 11.0 14.0 Applicable cylinder Model Mounting direction q C1 D1 F1 K1 10 11 16 20 Q1 B1 A1 MYAJ16 MYAJ25 MYAJ40 MYAJ63 MY316 MY325 MY340 MY363 29.0 38.5 56.0 86 68 90 130 186 34 45 65 93 18 24 32 50 88 112 162 226 5.5 6.5 9.5 10.0 Applicable cylinder Model Mounting direction w B2 A2 C2

Note) Production of the “-C1” type was terminated in October 2019; it has since converged with the “-C2” type.
G□ pressure gauge catalogs can be found here.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

F02 C01 A2 B2 2 49.6 (N02: 50.1) M5 x 0.8 thread depth 5 30 26.2 20 8.45 20 30 Width across flats 17 10 2 x M3 x 0.5 thread depth 4 Piping port 02: R1/4 N02: NPT1/4 3.5 8.8 Atmospheric vent port 2.6 14.7 25.1 46.2 2 12.4 26.2 10.1 8.45 22 14.5 Piping port Rc1/8 Piping port G1/4 -F02: G1/4 -C01: Rc1/8 27.7 21.7 8.45 8.45 Piping port TSJ1/4 Piping port URJ1/4 -B2: TSJ1/4 -A2: URJ1/4 736 Series

Body Ported Type Vacuum Ejector ZH Series

11 One-touch Screw-in One-touch N01 N02 N02 Screw-in Screw-in Screw-in ZH15DA08 10 10 One-touch One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch 09 N03 11 One-touch Screw-in One-touch N02 N03 N03 Screw-in Screw-in Screw-in ZH18DA10 12 12 One-touch One-touch One-touch 10 03 12 One-touch

High-Precision Digital Pressure Switch

: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or dust. *

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or dust. *

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Model L5 T2 17 18.7 17 18.7 18.7 20.8 20.8 21.8 25.6 28.2 25.6 28.2 28.2 32.6 32.6 34.7 42.2 44.7 43.9 46.4 51.3 54.1 64.2 66.3 13.2 15.2 13.2 15.2 15.2 18.5 18.5 21.7 1/4" 5/16" 1/4" 5/16" 5/16" 3/8" 3/8" 1/2" ASP330F-N01-07S ASP330F-N01-09S ASP430F-N02-07S ASP430F-N02-09S ASP530F-N03-09S ASP530F-N03-11S ASP630F-N04-11S ASP630F-N04-13S 10.5 35.1 39.5 33.9 11.8 1/2" 10-32 UNF NPT 1/8 8 14.2

Booster Regulator/Air Tank

VBA10A-N02 VBA10A-T02 : when -Z VBA43A-N04 VBA43A-T04 : when -Z G27-20-01 G27-P20-01-X30 AN20-N02 VBA20A-N03 VBA20A-T03 : when -Z VBA40A-N04 VBA40A-T04 : when -Z VBA22A-N03 VBA22A-T03 : when -Z VBA42A-N04 VBA42A-T04 : when -Z VBA11A-N02 VBA11A-T02 : when -Z Model ITVH Description ITVX Pressure gauge : when Nil Pressure gauge : when -Z Note 4) G36-10-N01 G36-P10-N01-X30 AN30-N03 ANA1-N03