Modular Design with Uniform Body Style

N A F S M J R C B V1 V2 Q2 Q1 Q1 K OUT IN 2 x P1 (Port size) EXH U P3 (Port size) P2 G Clearance for maintenance (Pressure gauge port size) Drain Drain AC30C-V-D A N N F S J M R C B V1 V2 Q1 Q1 K IN OUT 2 x P1 (Port size) U EXH E P3 (Port size) P2 G Clearance for maintenance (Pressure gauge port size) Drain Drain AC40C-V-D to AC40C-06-V-D N N F A M J S R B C V1 V2 Q2 Q1 Q1 IN OUT 2 x P1 (

Valve Single Unit

Series SX3000/5000/7000 Base Mounted Valve Single Unit How to Order 5 L N SX 5 2 40 Series Thread type 3 SX3000 5 SX5000 Nil Rc 7 SX7000 G F N NPT Type of actuation NPTF T 2 position single Port size 1 Manual override Applicable series Symbol Nil Port size Without sub-plate Nil: Non-locking push type 1 8 SX3000 01 With sub-plate 2 position double 1 4 SX5000 SX7000 02 2 With sub-plate 3 8

SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

CG5-S

10 -04 R 1/2 R 3/8 -03 KGU12-02 R 1/4 R 1/2 -04 12 -03 R 3/8 R 1/4 KGT12-02 -04 R 1/2 12 R 3/8 -03 Male Delta KGD R 1/2 -04 R 3/8 KGT16-03 16 Applicable tubing O.D.

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

Prevents Micro-Bubbles

Double acting LLA2A-03-02-C 1 set 1 set Manifold base part no. With flow rate adjustment LVA20A-02-C1 2 sets 2 sets Valve part no. (stations 1 & 2) LVA20A-02-C 1 set 1 set Valve part no. (station 3) P P N.C.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

layout Note 2) (Up to 21 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable connector (20 pins) PH: Flat ribbon cable connector (10 pins) Connector entry direction Note Symbol Note Symbol Stations Stations 1: Perpendicular connector 2: Lateral connector 02 02 2 stations 2 stations Double wiring Double wiring LOCK FREE FREE 08 04 8 stations 4 stations LOCK 02 02 2 stations

0.4

) 22 20.5 7 Stations 1 2 3 n VFR D side U side ( 9.5) 45 65.5 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) VQ7 C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 B 2 (1.5) 37.5 A L n Dimensions Formula L1 = 22n + 24 n:

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

FG + + 0V 24V SMC S E R I A L U N I T MODEL SC 120 80 10.6 4 46.2 1 ERR T/R RUN MODEL SB RD SD 0 EX123: 2 x G1/2 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assy (AXT100-B04A) on the unused conduit port (G1/2). L8 = 16n + 118.5 100 Drawing shows a SC case.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

FG + + 0V 24V SMC S E R I A L U N I T MODEL SC 120 80 10.6 4 46.2 1 ERR T/R RUN MODEL SB RD SD 0 EX123: 2 x G1/2 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assy (AXT100-B04A) on the unused conduit port (G1/2). L8 = 16n + 118.5 100 Drawing shows a SC case.

Modular Type Regulators Series AR

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Option Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30 AR 25

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

5 Port Air Operated Valve

A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port

7.5

Flat ribbon cable (10 pins) Symbol Stations 02 09 Symbol Stations 02 04 2 stations 9 stations 2 stations 4 stations Non-polar type, with plug (24 VDC) SJ3A6-5CU-DP (4 sets) SUP/EXH block (D side mounting) J: Flat ribbon cable (PC wiring) S6B: EX510 serial transmission Symbol Stations 02 08 Symbol Stations 02 08 2 stations 8 stations 2 stations 8 stations 1 3 2 D side U side Stations G: Flat

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

L1 = 46 x n + 89 L2 = 46 x n + 59 2 181 151 3 227 197 4 273 243 5 319 289 6 365 335 7 411 381 8 457 427 9 503 473 10 549 519 L L1 L2 1445 VT317 Series Dimensions: Individual Exhaust Without mounting bracket/VV317-02-3-02 2 x 7 mounting hole Manual override (Non-locking) (Station 1) (Station n) Conduit (C) DIN terminal facing upward (136.6) Conduit terminal (T) Grommet (G) DIN terminal (D

A

0.551 3/8 1/2 1/2 3/4 3/4 1/2 D I M E N S I O N S N O N-R O TAT I N G R O D C E N T E R T R U N N I O N M O U N T I N G T Y P E NC A1KT 0 0.001 Y D TL TM R BORE (INCH) KK A AA B E EA EE G UV UM TT TD ZB LF P WF J XI BA C DD 1 2.5 1.43 7/16-20 150 (1.5) 3/4 2.02 1 1/8 2 0.3 1.26 2 4.5 1.18 1 4.75 1.71 3 5/8 2.36 1 1.1 2.89 1 1/8 3/8 1/4-28 0.551 3/8 1 3 1.84 7/16-20 1 1/8 200 (2) 3/4 2.60

3 Port Air Operated Valve Series SYJA300 1

Model Manifold base model R port model Common Individual Port size Applicable valve model Series VV3PA3-411-02 n VV3PA3-423-02 n VV3PA5-411-03 n VV3PA5-423-03 n VV3PA7-411-04 n VV3PA7-423-04 n Rc Rc Rc Rc Rc Rc 1 4 1 4 3 8 3 8 1 2 1 2 VPA300 VPA344 VPA500 Common Individual VPA544 VPA700 Common Individual VPA744 Option Description Part no.

60

-02 VXK2122-02 VXK2-02 VXK2322-02 VXK2132-02 VXK2232-02 VXK2332-02 VXK2242-02 VXK2342-02 VXK2-03 VXK2322-03 VXK2232-03 VXK2332-03 VXK2242-03 VXK2342-03 2 3 4.5 2 2 3 4.5 2 4.1 7.9 15.0 4.1 0.17 0.33 0.61 0.17 0.33 0.9 0.45 0.2 0.9 0.45 0.8 1.2 0.2 0.3 0.6 0.15 0.35 0.8 1.2 0.3 0.6 0.15 0.35 1/8 (6A) 1/8 (6A) 500 480 0.33 3 7.9 640 790 480 640 790 640 790 640 790 640 790 640 790 640 790 640

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Intrinsically Safe Valve

2009)(Refer to page 40 for details) How to Order SY 53 20 01 5 1 LL 3 Bracket UL/CSA compliant 5 7 9 Series Nil: Without bracket F1: With foot bracket 53-SY5000 Thread type 53-SY7000 Nil F N T Rc Thread piping A, B port size 2-position single only 53-SY9000 G NPT Symbol Port size Applicable series Type of actuation NPTF 01 02 02 03 53-SY5000 1/8 2-position single (A) 4 2 (B) 53-SY7000 1/