With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

With Bracket, Gauge, 1/8" NPT Fitting $152.00 VMW-140-B-G-N02 With Bracket, Gauge, 1/4" NPT Fitting $154.00 VMW-140-B-G-N07 With Bracket, Gauge, 1/4" Push to Connect Fitting $71.00 VMW-140-B-G-N09 With Bracket, Gauge, 5/16" Push to Connect Fitting $71.00 VMW-140-G-N01 With Gauge, 1/8" NPT Fitting $151.00

1

3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT 8 7 1 2 3 4 5 Valve stations For N, sizes are in inches.

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Precision Regulator

(Option) 30 2 ARJ 2.3 48 Pressure gauge (Option) AR425 to 935 Pressure gauge (Option) ARX 5.5 9.5 M5 depth 7 AMR 9 M5 depth 7 2 x Rc 1/8 15.5 IN 119 Pressure gauge port 83 75 Bleed Bleed IN ARM Exhaust IN OUT(2) Bleed Bleed SUP(1) IN G 2 OUT 144 43 G ARP 76 22 2 x Rc 1/8 Pressure gauge port 50 50 (17.7) 2 x Rc 1/4 Port size IR-A EXH(3) OUT 2 OUT(2) SUP(1) 60 Rc 1/2 Exhaust port 66 2 x Rc

Digital Pressure Switch

Lead wire with connector ZS-38-3L 3 cores for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit

Process Pump

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A S LQ3 LQ3 fittings Caution 1.

Precision Regulator Series IR1000/2000/3000

2 !3 !1 ARM Diaphragm (B) e w r y Exhaust Bleed w ARP Diaphragm (C) SUP(1) OUT(2) SUP(1) OUT(2) OUT(2) SUP(1) Exhaust Valve IR u !0 !0 !2 t r !

IR1000/2000/3000

. 144 IN 2-Rc(PT) 1/4 to 1/2 Port size 2-Rc(PT) 1/8 Pressure gauge port Bleed 43 EXH(3) SUP(1) OUT(2) OUT Rc(PT) 1/2 Exhaust port Approx. 68 66 66 2-Rc(PT) 1/4 to 1/2 Port size 2-Rc(PT) 1/8 Pressure gauge port 4 Series IR1000/2000/3000 Series IR1000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.

Digital Flow Switch (Integrated display type)

to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x

ZL3-OM00601

No.ZL3-OM00601-B 2.

ZL3-OM00801

3) 1 (2/V) 1 (G) 40 ) (3/E) 40 ) [Nm] G Rc1/8,G1/8,NPT1/8 35 Rc1/2,G1/2,NPT1/2 2830 (2/V) Rc3/4,G3/4,NPT3/4 2830 (3/E) Rc1,G1,NPT1 3638 10 No.ZL3-OM00801-A 3.4.3 1/P 0.20.6MPa 2/V 1 3/E G 3.4.4 1/P 1) 2) 3) 4) 1) 2) 3) 1) 0.1 2) 0.1 3) +0.15 -0.2 3.4.5 1) 2), 3) 4) 5) URL http://www.smcworld.com& 11 No.ZL3-OM00801-A 3.5 3.5.1 1) . 30N 35N 20N 2) 6 33

S Couplers

(See Fig. 2.)

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

2 std. 2 3 5 6 8 9 B With bracket 1 Male thread D Drain piping (Except AMC220) (1) (2) 2 Female thread Note 1) Female thread: Available only AMC220, 320, 520.