4-channel Flow Monitor ( compatible)

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

70pvpump

(A) 2 N.O.

•

"t l: '-~ ~ o li , >-1 '" 2-95.5 .

LVQ

T) View Z Dimensions (N.O valve, double acting valve) (mm) A B C D M N T U V Model LVQ2 -S-2 LVQ3 -S-2 LVQ4 -S-2 LVQ5 -S-2 LVQ6 -S-2 2 1 25.5 46 31.5 58 7 15 35.3 10.6 7 2 1 23.5 47 29.5 59 7 15 36.9 16.5 10 2 1 23.5 47 29.5 59 7 20 37.9 22 2 1 17 35 70 41 82 7 20 64 25 2 1 35 70 41 82 7 20 66 32 17-5-72 11 Space Saving/Space Saving Connection Series LVQ How to Order VC LVQ 2 0 S 07 S VDW

Digital Flow Switches Series PF2A

(In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.)

Process Pump

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A S LQ3 LQ3 fittings Caution 1.

Rotary Cylinder Series MRQ Size: 32, 40 1

/2 63.5 ( 20 Stroke)/2 61 ( 25 Stroke)/2 63.5 ( 30 Stroke)/2 63.5 ( 40 Stroke)/2 66 ( 50 Stroke)/2 66 ( 65 Stroke)/2 71 ( 75 Stroke)/2 68.5 ( 90 Stroke)/2 73.5 ( 100 Stroke)/2 68 ( 5 Stroke)/2 68 ( 10 Stroke)/2 70.5 ( 15 Stroke)/2 68 ( 20 Stroke)/2 70.5 ( 25 Stroke)/2 68 ( 30 Stroke)/2 70.5 ( 40 Stroke)/2 75.5 ( 50 Stroke)/2 75.5 ( 65 Stroke)/2 80.5 (

Direct Solenoid

NEW ZEALAND SMC Pneumatics (N.2.) Ltd.

Process Valve

(mm) Symbol 1 2 3 Note 2) Port size Rc 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note) 4 Note 2) A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 5 6 Note 2) 7 Valve size 1 to 4 7 Note 2) 11 15 11 10A 3 8 B: Slotted locking

MRQ

(mm) Stroke Size Y Q E Mounting screw 58.5 ( 5 stroke) /2 61 ( 10 stroke) /2 61 ( 15 stroke) /2 63.5 ( 20 stroke) /2 61 ( 25 stroke) /2 63.5 ( 30 stroke) /2 63.5 ( 40 stroke) /2 66 ( 50 stroke) /2 66 ( 65 stroke) /2 71 ( 75 stroke) /2 68.5 ( 90 stroke) /2 73.5 (100 stroke) /2 68 ( 5 stroke) /2 68 ( 10 stroke) /2 70.5 ( 15 stroke) /2 68 ( 20 stroke) /2 70.5 ( 25 stroke) /2 68 ( 30 stroke)

PSxx-OMU0005CN

K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

2) Isopropyl alcohol Hydrochloric acid Ozone (dry) Hydrogen peroxide Concentration 5% or less, 50C or less Note 1, 2) Ethyl acetate Note 1, 2) Butyl acetate Note 2) Nitric acid (except fuming nitric acid) Concentration 10% or less DI water Sodium hydroxide Concentration 50% or less Nitrogen gas Super pure water Note 1, 2) Toluene Hydrofluoric acid Note 2) Sulfuric acid (except fuming sulfuric

Safety Instructions

Timer circuit 2 (, +) 2 SOL. SOL. SOL. SOL.

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer



8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 2 M5 M5 AMR 1 4 2 1 (5) (5) Weight (kg) 0.15 0.18 0.2 0.3 0.5 1.4 2 4 ITV Note 1) No condensation.

Process Valve

2) 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Orifice dia.

ZSE30/ISE30

Straight type Elbow type 16-2-1 2 2-color digital display allows you to choose the setting according to your application requirements. 4 different display settings are available.

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

Electric Slide Table / High Precision Type 《 AC servo motor 》

If it is combined with a different set of parameters, failure can result. 2.