Digital Flow Switch [HYS] Hysteresis mode [2ot] Switch operation of OUT2 2 [2_P] Normal output [F 2] [oU2] page 39 [P_2] Set value of OUT2 2 [100] 100 L/min [H_2] Hysteresis of OUT2 2 [ 10] 10 L/min [F 3] [rES] [rES] Response time [1.00] 1 second page 44 [F10] [FLo] [FLo] Display mode [inS] Display instantaneous flow page 45 [F13] [rEv] [rEv] Reversed display mode [oFF] Not reversed page 46 [F20] [inP]
OUT2 2 [ 2_P] Normal output [ 250] 250 L/min (PFMC7501) [ P_2] Set value of OUT2 2 [ 500] 500 L/min (PFMC7102) [F 2] page 37 [ 1000] 1000 L/min (PFMC7202) [ 25] 25 L/min (PFMC7501) [ H_2] Hysteresis of OUT2 2 [ 50] 50 L/min (PFMC7102) [ 100] 100 L/min (PFMC7202) [F 3] [ r ES] Response time [ 1.0] 1 second page 42 [F10] [ SUb] Sub display [ oUt] Set value page 43 [F20] [ inP] External input
Series KP (with resin thread) 1) Wrapping of pipe tape Wrap the pipe tape 2 to 3 times around the threads, leaving 1.5 to 2 thread ridges exposed at the end of the threads. 2) Tightening After tightening by hand, tighten an additional 2 to 3 turns using a tightening tool. 15-5-17 Series KP/KPQ/KPG Specific Product Precautions 2 Be sure to read before handling.
With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO<n2) aO+3D(flo2) 9O+30(n-2) With n surface "= 1.2.3,4 , n=2,4,6,8 ... n=2.4.5.e .. 1'1 =2 .4 ,6 ,8 ... switches Same 5.S+~1'l2) 7S+,5O(n-2) ao. 5O(1l-2} 90+50(n-2) ""F ttl surface
IDU 24 40 50 IN IDF FS 2 x 4.5 66 IDFA IDFB Model Connection Rc 1/4 NPT 1/4 M5 SFB100-02, 200-02 SFB101-02, 201-02 SFB104-M5 IDH ID IDG SFB102-02, SFB202-02: TSJ 1/4 (Tube Swage Joint) IDK 2 x 4.5 Bracket AMG 2 x TSJ 1/4 Width across flats AFF 24 40 50 AM IN AMD 87 AMH AME SFB103-02, SFB203-02: UOJ 1/4 (Union O-ring Joint) AMF 2 x 4.5 Bracket ZFC 2 x UOJ 1/4 Width across flats 7 6.5 SF SF
M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB F Q Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4
2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !
Individual -X 1177 Series MQQ Dimensions Lateral load resisting type (Through hole & Double end tapped): MQQLB 10, 16, 20 2 x M5 x 0.8 H effective thread depth C 2 x 4 x OB 2 x 4 x OA effective depth RA Y Q F Depth of counterbore RB I 4 x N through 4 x N through M0.2 D E K B + Stroke L M0.2 A + Stroke E 25, 30, 40 H effective thread depth C 2 x 4 x OA effective depth RA 2 x P 2 x 4 x OB Y
2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !
Nominal thread size Required torque Piping port size Width across flats of attachment Rc1/2, NPT1/2, Rc3/4, NPT3/4 28 to 30 Nm 1/2 30 mm 3/4 35 mm Piping for the One-touch fitting For the one-touch fitting, use tubing with a tube inside diameter of 9 mm or more.
VK300-82-2-01 VK300-82-2-03 110 VAC 110V 200 VAC 200V VK300-82-2-02 VK300-82-2-04 220 VAC 220V VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD 3-2-11
TI/ TIL 5 PA PAX Material Model PB %# & 1 & VXA212 0 2 2 0 2 . 2 0 2 . 2 . 0 2 . 0 2 . 0 2 . 0 2 ) .!* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 2 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.
EPDM Stud Polypropylene Clean blowing system Clean room KP Clean tubing TPH/TPS Clean fitting Clean blow Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow N2 gas Features 1 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely
ZS-36-A2 2 station: 2 L-type brackets With mounting screws (M3 x 25 L) 2 pcs. ZS-36-A3 3 station: 2 L-type brackets With mounting screws (M3 x 35 L) 2 pcs. ZS-36-A4 4 station: 2 L-type brackets With mounting screws (M3 x 45 L) 2 pcs. ZS-36-A5 5 station: 2 L-type brackets With mounting screws (M3 x 55 L) 2 pcs. -11No.
Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight. 2.
NoIe 1) I Hys:&fe51S mode AdlUS lable (2 digits or more) Adjustable (3 digits or more) --Hysleresis I:"~ato , me oo Fixed (2 digits) Fixed (3 digils) OFF~ ::,t1:1 -ON : Output ON ON : Output ON ONI ~ Indicator lights Output I Green Output 2 Red Output 1: Green OJtpLrt 2 R ed 200Hz Response frequency 200Hz P2 Pl n2 nl Max.operating pressure , .5MPa { ' 5.3kgf/cm2} 200kPa {2.04kgf/cm2} ONh
Ball bushing O-ring NBR Snap ring Nickel plated Carbon tool steel Rod end nut Nickel plated Steel Mounting nut Steel 12 Series MQM Dimensions Basic type: MQMLB 6 Mounting nut M12 x 1 Rod end nut 2-M5 x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore
Valve/Body 5 Common/For manifold VX VX3 VXA VN LVC LVA How to Order Manifold Base LVH Table (1) Orifice Size Model Orifice size (No) 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LVD VVXA32 VVXA31 LVQ Number of stations 02 LQ 2 stations LVN Manifold base 10 10 stations Symbol VVXA31 VVXA32 VXA31 5-00 Applicable valve TI/ TIL Port size (Individual port) 1 2 Rc Rc VXA32 5-00 1 8 1 4
Press the SET button for 2 to 5 seconds.
~ Fluid Fluid that will not corrode SUS304 and SUS630 PI P2 Wti:ldow cOfTl)aratoc rnode (standard) nl n2 Wifldow corTlJ3rator mode (reversed) Temp. characteristics 3%F.S.max.