Electric Slide Tables

200 400 L4 [mm] L4 [mm] L4 [mm] 150 300 100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L5 200 400 L5 [mm] L5 [mm] L5 [mm] 150 300 Mer m 100 200 50 100 0 0 0 1 2 3 4 5 0 0.2 0.4 0.6 0.8 1 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600

Compact Cylinder

FV FT L1 2 x FD FX FZ L2 + Stroke B + Stroke A + 2 (Stroke) Rod end male thread Rod End Male Thread (mm) Switch Bore size (mm) A1 L3 L4 12 16 20 25 63.2 67 73 84 24 25.5 28.5 32.5 14 15.5 18.5 22.5 L3 L4 + Stroke A1 + 2 (Stroke) Flange Bore size (mm) Stroke range (mm) (mm) A FD FT FV FX FZ L1 L2 B 12 16 20 25 5 to 30 42.2 25.2 4.5 5.5 25 45 55 13.5 3.5 5 to 30 43 26 4.5 5.5 30 45 55 13.5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

M1 D3 L4 Max. Min. Max. Min.

VZ1000

387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

Manifold Specifications

387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

5 Port Solenoid Valve Series SQ1000/2000

L6 (for 6) C4 (for 4) C10 (for 10) L6 (for 6) Side SQ2000 C8 (for 8) 35 J kit: Flat cable 1 to 8 stations SQ230 SQ231 Option SS5Q23 580 Note 2) L4 (for 4) Built-in Silencer Direct exhaust C6 (for 6) Top C8 (for 8) Note 1) One-touch fittings for inch sizes are also available.

Slider Type Ball Screw Drive/11-LEFS Series

[mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

With auto switch Bore size (mm) 50 st or less 55 to 75 A1 50 st or less 55 to 75 80 to 100 80 to 100 97.5 + Stroke 107 + Stroke 117.5 + Stroke 107.5 + Stroke 117 + Stroke 127.5 + Stroke 32 40 50 38.5 38.5 43.5 28.5 28.5 33.5 182.5 207.5 182.5 207.5 202.5 217 192 217 204 227.5 202.5 227.5 A1 + Stroke L4 + Stroke L3 Flange Style 50 st or less 55 to 75 80 to 100 50 st or less 55 to 75 80 to

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

With auto switch Bore size (mm) 50 st or less 55 to 75 A1 50 st or less 55 to 75 80 to 100 80 to 100 97.5 + Stroke 107 + Stroke 117.5 + Stroke 107.5 + Stroke 117 + Stroke 127.5 + Stroke 32 40 50 38.5 38.5 43.5 28.5 28.5 33.5 182.5 207.5 182.5 207.5 202.5 217 192 217 204 227.5 202.5 227.5 A1 + Stroke L4 + Stroke L3 Flange Style 50 st or less 55 to 75 80 to 100 50 st or less 55 to 75 80 to

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

D1 L3 D2 M Connecting thread T L1 L2 Model Applicable tubing O.D.d T Uni thread H D1 D2 L1 L2 L3 L4 A Max.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VS7 VVQZ2000-10A-5 C6: One-touch fitting for 6 1.12-47 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ1000 VV5QZ15 C Station Port size 36 (11) (35) Grommet (G) 44.5 Mounting holes (7.5) 28.5 (5.5) 14 6.5 2n-C3, C4, C6 (4.5) DIN rail clamp screw C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 U side n A 4 B 2 Manual override 5 P=10.5 16.1 4 P=10.5 (L4)

VZ3000

152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 10 248 237.5 216 16

VZ5000

L4 2 148 137.5 116 16 3 160.5 150 135 13 4 185.5 175 154 16 5 198 187.5 173 12.5 6 223 212.5 192 15.5 7 235.5 225 211 12.5 8 260.5 250 230 15.5 9 273 262.5 249 12 10 298 287.5 268 15 (mm) Stations L1 L2 L3 L4 11 310.5 300 287 12 12 335.5 325 306 15 13 348 337.5 325 11.5 14 373 362.5 344 14.5 15 385.5 375 363 11.5 16 410.5 400 382 14.5 17 423 412.5 401 11 18 448 437.5 420 14 19 473 462.5

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

C4 C6 M5 L4 L6 B4 B6 4 One-touch fitting 6 One-touch fitting The "" symbol indicates mounting. Put the "" symbol at the beginning of part numbers for solenoid valves, etc., which are to be mounted. M5 x 0.5 4 elbow fitting assembly (upward) Valve stations are numbered from station 1 on the D side.

Speed Controller with Uni One-touch Fitting AS Series

D1 L3 M D2 L1 Connecting thread T L2 H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 D1 T H D2 D3 L1 L2 Max. Min.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Weight (g) d L4 Model L3 D1 T H D2 D3 L1 L2 Max. Min.

Manifold Specifications

152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 10 248 237.5 216 16

Manifold Specifications

L4 2 148 137.5 116 16 3 160.5 150 135 13 4 185.5 175 154 16 5 198 187.5 173 12.5 6 223 212.5 192 15.5 7 235.5 225 211 12.5 8 260.5 250 230 15.5 9 273 262.5 249 12 10 298 287.5 268 15 (mm) Stations L1 L2 L3 L4 11 310.5 300 287 12 12 335.5 325 306 15 13 348 337.5 325 11.5 14 373 362.5 344 14.5 15 385.5 375 363 11.5 16 410.5 400 382 14.5 17 423 412.5 401 11 18 448 437.5 420 14 19 473 462.5

Digital Flow Switch ( compatible)

output) + Analogue output type PF2MC7###-##-L3/L4#-### -28No.PF-OMZ0002-A Outline of Settings [Measurement mode] Power is supplied The output will not operate for 3 seconds after supplying power.