Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

L4 With auto switch Bore size (mm) 50 st or less 55 to 75 A1 50 st or less 55 to 75 80 to 100 80 to 100 97.5 + Stroke 107 + Stroke 117.5 + Stroke 107.5 + Stroke 117 + Stroke 127.5 + Stroke 32 40 50 38.5 38.5 43.5 28.5 28.5 33.5 182.5 207.5 182.5 207.5 202.5 217 192 217 204 227.5 202.5 227.5 A1 + Stroke L4 + Stroke L3 Flange Style 50 st or less 55 to 75 80 to 100 50 st or less 55 to 75 80

Rotary Actuator/Vane Style Series CRB2

(mm) E1= LL LL Size L1 L3 max X DE3= 10 9(14-X) to (X-3) X-3 5 to 14 15 10(18-X) to (X-4) (mm) X-4 8 to 18 LL Keyway dimensions Size 20 10(20-X) to (X-4.5) X-4.5 10 to 20 Keyway dimensions L1= L3= X= 40 4 x 4 x 20 2 30 12(22-X) to (X-5) X-5 10 to 22 73 Series CRB2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA31 to -XA58: Shaft Pattern Sequencing Shaft shape pattern is dealt with simple

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) Y L2 L2 max Size (mm) E3 = E1 = Y = 10 3 to 8 5 ( 8 Y) to (Y 1) Y-1 L1 L3 max X Size L2 = L4 = 10 9 (14 X) to (X 1) 15 3 to 9 6 ( 9 Y) to (Y 1.5) Y-1.5 3 to 14 X 1 L1 = 15 10 (18 X) to (X 1.5) 20 3 to 10 7 (10 Y) to (Y 1.5) Y-1.5 3 to 18 X 1.5 L3 = X = 20 10 (20 Xs) to (X 1.5) 30 5 to 13 8 (13 Y) to (Y 2) Y-2 3 to 20 X 1.5 30 12 (22 X) to (X 2) 40 7 to 15 9 (

Possible to transfer a workpiece at low-speed.

Size 20, 30, 40 Size 10, 15 L3 = (mm) L1 = X = Applicable shaft type: W Equal dimensions are indicated by the same marker.

42

= 25n + 282 (260.5) n: Stations n L 2 3 4 5 6 7 8 9 10 11 12 L1 113 138 163 188 213 238 263 288 313 338 363 L2 126 151 176 201 226 251 276 301 326 351 376 L3 332 357 382 407 432 457 482 507 532 557 582 (310.5) (335.5) (360.5) (385.5) (410.5) (435.5) (460.5) (485.5) (510.5) (535.5) (560.5) * L3 ( ): Type MP 484 Manifold with Control Unit VQ4000 Series Plug lead type 1/4", 3/8" C6, C8, C10

Manifold Specifications

152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 10 248 237.5 216 16

Manifold Specifications

L2 L3 L4 2 148 137.5 116 16 3 160.5 150 135 13 4 185.5 175 154 16 5 198 187.5 173 12.5 6 223 212.5 192 15.5 7 235.5 225 211 12.5 8 260.5 250 230 15.5 9 273 262.5 249 12 10 298 287.5 268 15 (mm) Stations L1 L2 L3 L4 11 310.5 300 287 12 12 335.5 325 306 15 13 348 337.5 325 11.5 14 373 362.5 344 14.5 15 385.5 375 363 11.5 16 410.5 400 382 14.5 17 423 412.5 401 11 18 448 437.5 420 14 19 473 462.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

L4 With auto switch Bore size (mm) 50 st or less 55 to 75 A1 50 st or less 55 to 75 80 to 100 80 to 100 97.5 + Stroke 107 + Stroke 117.5 + Stroke 107.5 + Stroke 117 + Stroke 127.5 + Stroke 32 40 50 38.5 38.5 43.5 28.5 28.5 33.5 182.5 207.5 182.5 207.5 202.5 217 192 217 204 227.5 202.5 227.5 A1 + Stroke L4 + Stroke L3 Flange Style 50 st or less 55 to 75 80 to 100 50 st or less 55 to 75 80

Digital Flow Switch ( compatible)

PNP (1 output) + Analogue output type PF2MC7###-##-L3/L4#-### -28No.PF-OMZ0002-A Outline of Settings [Measurement mode] Power is supplied The output will not operate for 3 seconds after supplying power.

Electric Actuators

[mm] Overhang: L3 [mm] Overhang: L3 [mm] Overhang: L3 [mm] L3 160 160 160 160 120 120 120 120 80 80 80 80 40 40 40 40 0 0 0 0 0.0 0.88 1.76 2.64 3.53 4.4 0.0 0.88 1.76 2.64 3.53 4.4 0 0.44 0.88 0.32 1.76 2.2 0 0.44 0.88 0.32 1.76 2.2 Work load [lb] Work load [lb] Work load [lb] Work load [lb] 200 200 200 200 Overhang: L4 [mm] Overhang: L4 [mm] Overhang: L4 [mm] Overhang: L4 [mm] 160 160

Shuttle Valve/AND Valve with One-Touch Fittings

Output Output 3 B Output 1 Output 2 A B C A B A Dimensions (mm) 1in = 25.4mm 1g = 0.0353 oz D3 Metric sizes: Light gray Inch sizes: Orange D2 L5 M2 IN Blue L3 L2 L4 OUT IN D1 M1 Applicable tubing O.D. d M1 L1 Metric sizes: Light gray Inch sizes: Orange Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1210F-23 3.2 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 VR1210F-04 4 12.8

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

V or less L3: Analog output: 1 to 5 V or 0 to 10 V can be selected.

Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 L4 max Size (mm) E3 = E1 = Y = 10 X L1 L3 max Size 3 to 8 Y-1 5-( 8-Y) to (Y-1 ) L2 = 10 15 L4 = 9-(14-X) to (X-3) 5 to 14 X-3 3 to 9 Y-1.5 6-( 2-Y) to (Y-1.5) L1 = L3 = 15 20 10-(18-X) to (X-4) 8 to 18 X-4 3 to 10 Y-1.5 7-(10-Y) to (Y-1.5) 20 30 10-(20-X) to (X-4.5) 10 to 20 X-4.5 5 to 13 Y-2 8-(13-Y) to (Y-2 ) X = 30 40 10 to

Digital Flow Switch (Integrated display type)

/L4#-### (NPN) PF2M7##-#-L3/L4#-### (PNP) L3: NPN + Analogue voltage output type L3: PNP + Analogue voltage output type L4: NPN + Analogue current output type L4: PNP + Analogue current output type Maximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1.5 V or less Maximum load current: 80 mA Internal voltage drop: 1.5 V or less L3: Analogue output: 1 to 5 V, 0

IDX-OM-U022

B V IDFA100F V IDFA125F V IDFA150F B IDFA100F150F 1 4 1.3 IDX-OM-U022 1. 3.7 5.2 (IDFA100F, 125F) R OFF 5.2 L1 L2 L3 1,2 3,4 5,6 M5 9.5mm 3.5mm 2 1 3 2 4 5 6 M3 6.5mm 1.25mm 2 L1,L2,L3 PE: L2 L3 PE L1 M4 9.5mm 5.5mm 2 IDFA100F150F 1 5 1.3 IDX-OM-U022 1. 5.2 3.7 5.2 (IDFA150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 L1,L2,L3 PE: L2 L3 PE L1 1,2 3,4 5,6 1 3 2 4 5 6

EX500-GPR1A.eng

L2 ( Rail mounting pitch: 12.5 ) 87.5 100 112.5 125 137.5 150 162.5 175 12 12 12.5 12.5 13 13 13.5 13.5 74 86 98 110 122 134 146 158 98 110.5 123 135.5 148 160.5 173 185.5 135.5 185.5 L1 L3 (L4) 12.5 13.5 110 158 125 175 DIN Rail (7.5) 5 49 32.2 39.7 1 2 3 L4 [mm] L3 [mm]: Manifold length L2 [mm]: Mounting pitch L1 [mm]: Rail length Installation When only input blocks for M12 connector are

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L4 L1 L2 L3 M d O.D.

5 Port Solenoid Valve Series SQ1000/2000

Cylinder port size Seal type Piping specifications Symbol Cylinder port size SQ1000 SQ2000 0 1 Metal seal Rubber seal With One-touch fitting for 3.2 With One-touch fitting for 4 With One-touch fitting for 6 With One-touch fitting for 8 With One-touch fitting for 3.2 With One-touch fitting for 4 With One-touch fitting for 6 With One-touch fitting for 8 C3 C4 C6 C8 L3 L4 L6 L8 Side ported Function

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Output 1 Output 2 A B C Dimensions L5 D2 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tubing O.D. d L1 D3 Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9 26.4 VR1211F-23 14.8 4 12.8 10.4 56 26.6 38.5 21.9 15.7 15.8 30.4 VR1211F-04 6.8 6 12.8 12.8 53.2 28.8 41.9 25.2 16.8 16.8 25.0 VR1211F-06 Inch sizes Weight g Model d D1 D2 L3 L2 D3 L1

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

: Nut material PVDF dimensions H1 H3 (E3,E3) (E1,E1) L3,L3 L1,L1 G D Metric Size MS Model B B side (Center) A side (Left) C side (Right) E1 E1 E2 E2 E3 E3 F G H1 H2 H3 L1 L1 L2 L2 L3 L3 M1 M2 M3 Applicable tubing O.D.