Filter Regulator

Structural Drawing and Replacement Parts 11-12 7. Bowl Assembly Specifications 13-20 8. Assembly of Optional Parts 21-22 9. Operation and Adjustment 23-25 10. Trouble Shooting 26-27 11. How to Replace the Components 28-40 11-1. Diaphragm Assembly Replacement 28 11-2. Bowl Assembly Replacement 29-31 11-3. Element Replacement 32 11-4. Valve Assembly Replacement 33-35 11-5.

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 1 1 1 0 Y 5 L (Example) Series Manual override Connector kit VV5Q1208C6C-D1 setManifold base No. VQ1110-54 setsValve No. (Stations 1 to 3) VQ1210-54 setsValve No. (Stations 4 to 7) VVQ1000-10A-11 setBlank plate No.

Speed Controller with Indicator

Note 1) Metric size 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Inch size Note 3) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Indicator window direction Elbow Universal Nil 0 Indicator window Note 1) For selecting applicable tubing O.D., refer to the Model on page 4. Note 2) Use 1/8" tubing.

MU

x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17

MU

x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17

0.4

P Note 1) U S U S U S w U S U S AXT100-1-J 20 Note 1) AXT100-1-F Note 1) e Note 1) Top entry connector for FU, PU, JU while side entry connector for FS, JS, PS.

Air Slide Table Series MXQ

-50 1.5 13.5 6.5 14 6.5 13 I J 2.5 13 2 x M6 x 1 thread depth 7 5H9 depth 5 +0.030 0 12 36 48 Max. 14 (Retraction end adjuster) Operating port 2 x Rc 1/8 (NPT 1/8, G 1/8) 5H9 depth 5 +0.030 0 HA GA NN x M6 x 1 thread depth 12 6 B A 29 11 11 5.1 5.1 9.5 9.5 B H A 26 10.5 26 10.5 G (NN 1) x H Section AA Section BB (mm) ZZ 108 108 108 118 136 169 226 254 282 M 94 94 94 104 122 155 212 240 268

Plate Cylinder

K H ZZ + Stroke (mm) A 22 26 30 35 35 AL 19.5 23.5 27 32 32 B 24 28 32 39 50 BS 37 45 44 54 53 BT M5 x 0.8 depth 7.5 M6 x 1 depth 12 M8 x 1.25 depth 13 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 BX 9 6.5 8 10 11 BY 7 8 9 9 12 C 54 68 86 104 124 D 12 14 16 20 20 ET M5 x 0.8 depth 11 M6 x 1 depth 11 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M12 x 1.75 depth 15 EY 26 42 54 64 72 GX 10 8.5 9 11.5 11.5

4/5 Port Air Operated Valve Series SYJA3000

For mounting) A B 1 11 1 5 A B 1 24 A B 1 2-2.6 10 R P (For manifold mounting) 19 4 2 37.5 47 42 15 54 54 Manual override 24.5 23 20 11.5 3 2-2.6 (For mounting) 11 Manual override 2-1.8 (Bleed port) 46.5 1/8 33.5 M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust

MLGP

6 Slide bearing Ball bushing Spacer Pivot Chromated Heat treated/Electroless nickel plated Chromium molybdenum steel Nickel plated Chromium molybdenum steel 9-11-23 23 Series MLGP Construction: 40 to 100 Series MLGPM Series MLGPL !2!1#4 u @1 $0w #6 #1 #2y $0 #7 @2 q !0!4 r@4 #8 $1 e @1 @3t #3 !5 @8 B' @9 @0 A' A A' A B !6 !3 #0 40 to 63: Over 100 stroke !

MLGP

100 200 RLQ Eccentric distance l1 (mm) Eccentric distance l1 (mm) MLU MLGPL32 to 100 ML1C (12) Over 50 Stroke V = 400 mm/s (11) 50 Stroke or Less V = 400 mm/s D100 50 100 -X 100 2080 80 Data 10 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 40 40 1 32 32 0.1 10 50 100 200 1 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) 9-11-11 11 Series MLGP Operating pressure

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS40S-200523.5 563.5 206 260 6 1 200 80 11-LEJS40S-300623.5 663.5 306 360 6 1 200 180 11-LEJS40S-400723.5 763.5 406 460 8 2 400 80 11-LEJS40S-500823.5 863.5 506 560 8 2 400 180 11-LEJS40S-600923.5 963.5 606 660 10 3 600 80 11-LEJS40S-7001023.5 1063.5 706 760 10 3 600 180 11-LEJS40S-8001123.5 1163.5 806 860 12 4 800 80 11-LEJS40S-9001223.5

OMU0023

1 1 1 1 1 1 0 1 10 7th shift 0 1 0 0 0 0 0 0 1 1 1 1 1 1 1 1 0 11 8th shift, ExOR A001h 1 0 0 0 0 0 0 0 0 1 1 1 1 1 1 0 1 12 Load 2nd byte "08h" 0 0 0 0 0 0 0 0 0 0 0 0 1 0 0 0 13 ExOR step 11 with step 12 1 0 0 0 0 0 0 0 0 1 1 1 0 1 1 0 14 1st shift 0 1 0 0 0 0 0 0 0 0 1 1 1 0 1 1 0 15 2nd shift, ExOR A001h 1 0 0 0 0 0 0 0 0 0 0 1 1 1 0 0 1 Value 16 3rd shift 0 1 0 0 0 0 0 0 0 0 0 0 1 1

Best Pneumatics Vol. 14

AC20, AC20A AC25, AC25A AC30, AC30A AC40, AC40A Note) 40 40 28 11 11 1/8, 1/4 AKM2000 1/8, 1/4 53 48 34 14 13 AKM3000 AKM4000 70 54 42 18 15 1/4, 3/8 Note) Not applicable to AC40-06. Refer to the attachment table on page 14-2-12 or 14-2-16 for standard bypass port sizes applicable to AC.

Stability of suction position,

1 o !1 i Component Parts r r No.

SFOD-OMT0009CN

11 () 12 () LE 1 800 1 1

SFOD-OMT0010

Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, and Alarm check 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Alarm check. 13 3.6 Parameters and Step data . 14 (1) Select the actuator. 14 (2) Setting parameters . 17 (3) Step data settings

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124

Rotary Cylinder Series MRQ Size: 32, 40 1

Refer to pages 11-11-1 when using auto switches. 11-10-17 18 Series MRQ Made to Order Specifications: -X1 to -X5 Please consult with SMC for further information on specifications, dimensions and delivery.

IDX-OM-W034

for Option T 11 1 Safety instructions . 11 -1 11 2 Specifications . 11 -1 11 3 Remote operation . 11 -2 11 4 How to connect the power supply and signal cable . 11 -2 11 5 How to re-start the operation . 11 -3 11 6 Electric wiring diagram . 11 -4 Chapter 12 Specification for Option V 12 1 Safety instructions . 12 -1 12 2 Specifications . 12 -1 12 3 How to perform maintenance. 12 -2 12 4 Electric