Electric Actuator

54 300, 400, 500, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 25 AC servo motor 54 300, 400, 500, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000, 2500 32 54 300, 400, 500, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000, 2500, 3000

Mechanically Jointed Rodless Cylinders

1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Refer to page 27 for the MY3M.

Ionizer

1000 500 0 500 1000 1500 2000 0 Electrostatic potential (V) Sensor head 641 A RoHS Ionizer Series IZS31 How to Order 780 Ionizer IZS31 Made to Order Refer to the below table.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC Y 10 5 5 Motorless 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 2500 3000 LAT Speed [mm/s] Speed [mm/s] When the stroke of the LEJB40 series exceeds 1000 mm, the work load is 10 kg.

Electric Actuators

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Max. impact speed (mm/s) 1500 1500 1500 1500 1500 Note 2) Use at a piston speed within the absorption capacity range. Refer to features page 8.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

Support Guide/11-LEFG Series

[kg] 2000 2000 2000 2000 1500 1500 1500 1500 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0

MY1

0.05 0.5100 200 300 400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 31 Series MY1W Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Table of Contents

Positioning distance (mm) 1500 750 100 10 1 10 151.1 76.1 11.1 2.1 1.2 100 16.1 8.6 2.1 1.2 1.1 Speed (mm/s) 250 7.2 4.2 1.6 1.2 1.1 500 4.3 2.8 1.5 1.2 1.1 Values will vary slightly depending on the operating conditions.

LJ1H

Positioning distance (mm) 1500 750 100 10 1 10 151.1 76.1 11.1 2.1 1.2 100 16.1 8.6 2.1 1.2 1.1 Speed (mm/s) 250 7.2 4.2 1.6 1.2 1.1 500 4.3 2.8 1.5 1.2 1.1 Values will vary slightly depending on the operating conditions.

e

200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load Mass: E-MY2C E-MY2C/m1 E-MY2C/m2 E-MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2C25 E-MY2C25 10 10 10 E-MY2C25 E-MY2C16 5 5 5 E-MY2C16 E-MY2C16 4 4 4 3 3 3 2 2 2 1 1 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400

HRX-OM-W002

Cooling capacity[W] Cooling capacity[W] 2000 2000 2500 Cooling capacity[W] Cooling capacity[W] Cooling capacity[W] 2500 Cooling capacity[W] [W] 25 25 25 25 [W] 25 25 1500 1500 1500 1500 25 25 2000 25 1500 1500 2000 1500 1500 32 32 32 32 32 32 32 32 32 1500 40 40 40 40 1000 1500 1000 1000 40 1000 40 40 1000 1000 40 1000 1000 40 1000 1000 500 500 500 500 500 500 500 500 500 500 0 0 0 0 0 0

RHC

250 Up to 700 80 7 RS Q G 25 25 1500 250 Up to 700 80 12 32 32 1500 250 Up to 1000 80 21 RS H A 40 40 1500 250 Up to 1000 80 33 50 50 1500 250 Up to 1200 RZQ 80 47 63 63 1500 250 Up to 1200 80 84 MI W S 80 80 1500 250 Up to 1400 80 127 100 100 1500 250 Up to 1500 80 196 CEP1 Note 1)The cylinder performance may not be as expected when stroke is shorter than recommended stroke (1 to 249 stroke

Electric Actuator

Belt Drive/Series LEJB Work load: Horizontal (kg) 2 Equivalent lead Speed (mm/s) (mm) Stroke (mm) 1 Page Size 10 5 15 20 25 30 500 1000 1500 2000 2500 3000 (200), 300, (400), 500, (600), (700), 800 40 27 (900), 1000, (1200), (1500), (2000) Page 14 (300), (400), 500, (600), (700), 800 63 42 (900), 1000, 1200, (1500), (2000), (3000) 1 Strokes shown in ( ) are produced upon receipt of order.

NCG/CG1

301 to 800 50, 63 301 to 1200 80 301 to 1400 100 301 to 1500 Note1)Intermediate strokes other than the above are produced upon receipt of order.

IZx-OMP0064

500 1000 1500 2000 0 500 1000 1500 2000 mm mm Installation distance [mm] Installation distance [mm] 6-3.

Compressed Air Preparation Filter

1000 500 2000 2500 1500 1000 500 3000 3500 Air flow rate [L/min (ANR)] Air flow rate [L/min (ANR)] Specific Product Precautions 20 AMK Series Construction Size 20 to 40 q w OUT IN t Component Parts e No.