Model Selection 1

Reducing insert bushing Reducing type 17-5-92 21 Series LQ 1 2, LVN, TL/TIL High Purity Fluoropolymer Fittings/Needle Valve/Tubing Series LQ1 Variations P. 17-5-97 Port size Tubing O.D.

VXD21/22/23

97 62 64 64 160 170 180 135 140 155 67.5 70 77.5 168 (185) 182 (197) 194 (209) 51.5 54.5 59 100 105 120 36 42 53 23 25.5 25.5 35 40 40 12 14 14 41.5 44.5 44.5 ( ): N.O. 17-3-41

Series VQ Metal Seal/Rubber Seal Body Ported

Ambient and fluid temperature Effective area (Cv) Max. operating frequency (1) Note 1) As per JISB83751981 (Supply pressure: 0.5MPa) Dimensions Single unit Manifold Dimensions Equation L1=11n+20 n: Station (Max. 24 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 86 112.5 123 108 125 135.5 119 137.5 148 141 162.5 173 97 125 135.5 130 150 160.5 152 175 185.5 53 75 85.5

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 4.41 LPM , 4.41 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 7.4 in HgV / -250 mbar , 7.4 in HgV / -250 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 3.07 in / 78 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 3.07

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 3.5 LPM , 3.5 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 9.2 in HgV / -310 mbar , 9.2 in HgV / -310 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 2.17 in / 55 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.17

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 3.6 LPM , 3.6 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 5.6 in HgV / -190 mbar , 5.6 in HgV / -190 mbar, Voltage (DC): 24, DC Motor Type: Standard, Item Dimensions: Length: 2.17 in / 55 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.17

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 1.4 LPM , 1.4 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 8.6 in HgV / -290 mbar , 8.6 in HgV / -290 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 2.17 in / 55 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.17

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 1.4 LPM , 1.4 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 2.17 in / 55 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.17

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 2.6 LPM , 2.6 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 9.2 in HgV / -310 mbar , 9.2 in HgV / -310 mbar, Voltage (DC): 6, DC Motor Type: Standard, Item Dimensions: Length: 2.17 in / 55 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.17

Safety Speed Control Valve (SSC Valve) Series ASS 1

1 Safety Speed Control Valve (SSC Valve) Series ASS Model Meter-out control type: A control valve with cylinder speed control function, fixed throttle, and rapid air supply function Port size Effective area (mm2) Weight (g) Free flow Controlled flow Style Model ASS100 2.4 1/8 9.5 97 ASS300 14.5 1/4, 3/8 22.0 220 Meter-in control type: A control valve with cylinder speed control function and

SMC Pneumatic Clean Series

Applicable models D-A73, A73H, A73C, C73, C73C, E73A, Z73, R73 D-97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) However, when using a 2 color indication auto switch (DA79W, A59W, B59W), be aware that the switch will constantly remain ON if the connections are reversed.

Sine Cylinder Series REC

Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95

Basic Type/Direct Mount Type

17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 B 6.5 8 9.5 9.5 11 11 14 14 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5 81.5 93.5 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 H 19 26 32 39 44 55 67 85 97

Air Cylinder

21 97 (109) 20 25 157 (169) 115 (127) 80 32 40 3 3 28 25.5 116 (130) 32 190 (204) 138 (152) 100 37 50 3 3 29 26.5 117 (131) 33 191 (205) 142 (156) Refer to page 1125 for details.

SMC Pneumatic Clean Series

Applicable models D-A73, A73H, A73C, C73, C73C, E73A, Z73, R73 D-97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) However, when using a 2 color indication auto switch (DA79W, A59W, B59W), be aware that the switch will constantly remain ON if the connections are reversed.

SMC Pneumatic Clean Series

Applicable models D-A73, A73H, A73C, C73, C73C, E73A, Z73, R73 D-97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) However, when using a 2 color indication auto switch (DA79W, A59W, B59W), be aware that the switch will constantly remain ON if the connections are reversed.

SMC

Applicable models D-A73, A73H, A73C, C73, C73C, E73A, Z73, R73 D-97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) However, when using a 2 color indication auto switch (DA79W, A59W, B59W), be aware that the switch will constantly remain ON if the connections are reversed.

Sine Cylinder Series REC

Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95

Possible to transfer a workpiece at low-speed.

170 to 190 Rotating angle K Double round shaft Port size Rc 1/8, G 1/8, NPT 1/8, NPTF 1/8 M5 x 0.8 CRJ Mountable Auto switch CRA1 Dimensions CRQ2 J K T Shaft type Size 20, 30, 40 MSQ MSZ CRQ2X MSQX CRQ2X MSQX MRQ Form Size 10, 15 D (g6) G W H M N UT UJ UK Size 10 15 20 30 40 5 4.5 18 9 6 35 44 53 6 5.5 20 10 7 40 50 60 8 0 0.1 10 0 0.1 11 0 0.1 10 30 15 11 59 74 89 12 32 18 13 65 83 97

Compact Cylinder with Solenoid Valve/

CQM CVQM C B Tap mounting A Through-hole mounting (mm) C B A Bore size 32 9.5 59 49.5 40 10 57 67 12 71 83 50 13 97 84 63 Features 1 Compact Cylinder with Solenoid Valve/ Guide Rod Type 32, 40, 50, 63 Series CVQM How to Order CVQM 32 30 M9BW 5 M Port thread type 32 40 Bore size 32 40 50 63 M5 x 0.8 Nil 32 mm 40 mm 50 mm 63 mm Rc G NPT 50 63 F N Piping Nil P Standard Axial Cylinder stroke