Table of Contents

Series ISG General Purpose Pressure Switch . 88 88 89 90 90 90 91 92 95 95 96 96 96 97 98 98 99 101 103 105 108 108 109 110 111 114 116 116 117 117 118 118 119 120 122 123 123 124 125 127 130 131 131 131 133 134 135 137 137 138 139 140 144 146 152 155 155 156 157 157 158 159 159 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

SQ1000/2000

SSQ1000-52AP. 93 P. 95 P. 96 P. 97 C8 N9 P R D side U side Port plug VVQZ100-CP Individual SUP spacer SSQ1000-P-4Silencer (for EXH port) EXH block plate SSQ1000-B-R P. 93 P. 95 P. 96 P. 97 C6 L6 P R D side SMC AN200 U side Special wiring specification (-K) Built-in silencer (-S) Individual EXH spacer SSQ1000-R-4Back pressure check valve (-B) SSQ1000-BP P. 94 P. 95 P. 96 P. 103 C6 L6 Terminal

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations L1 L2 3 78 66 6 135 123 8 173 161 10 211 199 2 59 47 4 97 85 5 116 104 7 154 142 9 192 180 11 230 218 12 249 237 13 268 256 14 287 275 15 306 294 1.2-66 Series SYJ7000 21 Type Manifold: Top Ported/SS5YJ7-21Station Grommet(G), (H) Manual override 4-4.5 (Mounting holes) Depress and turn to operate and lock override.

ZP

M6 x 1 I: M8 x 1 Y U C U C U C U C U C ZPR20 20 ZPR40 40 3.3 1.7 43 18.5 32 42.8 60.6 25 86.5 15 76.5 6.5 23 14 28 25 15 39.8 57.6 83.5 73.5 4 29 ZPR50 ZPR25 53 19.5 33 43.8 61.6 87.5 77.5 7.5 3.8 1.8 25 50 ZPR32 29.5 32 40.3 58.1 84 74 4.5 2.3 35 14.5 Deep Deep Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F Y G H G H I: M6 x 1 I: M8 x 1 ZPR40D 40 43 29 42.5 53.3 71.1 97

NGIP seies

D-97.D-93A (|& @D D-93A il ! @ D-90 : lnch D-97 Caution. 1) The abovo dimensions may vary in areas whre magnetic Inlerlerence is present. 2) Fo. 14 stroke cylinder, only one aulo switch may be mounted eithgr on the rod end or the cap end. 3) There are two ways to mounl lhe auto swilches as shown in the above ligure.

Vacuum

:nUK.r rype Auto Switch Soecifications Auto switch modeli type Reedswitch Solid slaie auto switch D-97 D-FgN (3-nre NPNTID-F9P l3-wire PNp) }F9B lC circuit, Relay, Sequenc controller Relay, Sequence controller Relay, Sequence Controller 24VDC Relay, Sequence controller Load voltaoe24VDC ot less 24VDC 28VDC or less 24VDC 110-?

REA/REB

CV MVGQ CC RB J D-X 20Data 10-2-59 59 Series REAH Dimensions: 15, 20, 25 Single axis type: REAH PA L LL 4-M thread depth MM Guide central axis ZZ PB XB 2-P S + Stroke LW EA EB HC HP HA H HB NT HT NL HG PP W A N 8 Z + Stroke Square nut for body mounting J TW (mm) HP MM HT J LW LL L M HG HC HB HA H EB EA Model A REAH15 REAH20 REAH25 42 19 M5 x 0.8 8 71.5 106 44 M5 x 0.8 17 33.5 33.5 45 46 97

MXQ

A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97

Vacuum

:nUK.r rype Auto Switch Soecifications Auto switch modeli type Reedswitch Solid slaie auto switch D-97 D-FgN (3-nre NPNTID-F9P l3-wire PNp) }F9B lC circuit, Relay, Sequenc controller Relay, Sequence controller Relay, Sequence Controller 24VDC Relay, Sequence controller Load voltaoe24VDC ot less 24VDC 28VDC or less 24VDC 110-?

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

NCG/CG1

S + Stroke ZZ + Stroke (E1) E (F1) F GA 77(85) Bore size (mm) S TA WA ZZ 32 40 50 63 80 100 17 22 119(127) 17 18 2 2 18 84(93) 18 22 136(145) 21 25 2 2 19 97(109) 25 157(169) 20 26 30 2 2 21 97(109) 25 157(169) 20 26 32 2 2 21 116(130) 30 190(204) 32 40 3 3 28 117(131) 31 191(205) 37 50 3 3 29 These dimensions and other dimensions not indicated here are the same as standard. ( ): Denotes

5 Port Solenoid Valve

Perform an inspection to check that it is working properly because it can cause possible injuries. +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for input and for the control unit of the Gateway Power supply for input and for the control unit of the Gateway 24 V 24 V 97 Series S0700 Specific Product Precautions 7 Be sure to read before handling.

Refrigerated Air Dryers Series IDF/IDU

(A) (A) No-fuse breaker D 40 Circuit breaker 60 A C B Power connection E Power cable outlet (17) 35 Grommet with membrane (mm) Dimensions E D C B A Model 32 IDF4E, 6E, 8E, 11E IDF15E IDU3E, 4E, 6E IDU8E IDU11E IDU15E 97 230 34 15 102 258 82 43 With circuit breaker case 97 15 34 32 230 37 A Dimensions (mm) 42 100 75 Model 69 258 43 84 IDF120D IDF150D IDF190D IDF240D IDF370B 94 IDF22E to

Electric Actuator

Clean Room Specification) Page 76 Model Selection (Clean Room Specification) Page 78 How to OrderPage 92 SpecificationsPage 93 DimensionsPage 94 Electric Actuator/Belt Drive Series LEFB Model Selection Page 2 How to OrderPage 26 SpecificationsPage 28 Construction Page 30 DimensionsPage 31 Electric Actuator/Belt Drive Series LEFB Model Selection Page 80 How to OrderPage 96 SpecificationsPage 97

Guide Cylinder Series MGG

Bore size (mm) For lock type For non-lock type Bore size (mm) Rod end lock Head end lock Bore size (mm) 20 25 32 40 50 W X Z HN HR Q Y R Y R Q 20 25 32 40 50 20 25 32 40 50 40 39 157 38.5 12(14) 98(106) 12 37 25.3 11 95 46 46 175 39 12(14) 98(106) 12 40 28.3 11 95 52 46 201 40 12(14) 101(109) 12 43 31.3 11 97 62 56 238 41 12(15) 109(118) 13 52.5 38.3 11 111 75 67 285 47 14(16) 125(137) 14

Sine Rodless Cylinder Series REA/REB

30 75 M5 x 0.8 REAS20 40 70 90 90 38 73 16.5 25.5 87 115 Rc 1/8 NPT 1/8 G 1/8 CX REAS25 40 70 100 90 42 73 16.5 25.5 0.5 1 97 115 Rc 1/8 NPT 1/8 G 1/8 REAS32 75 110 50 91 18.5 28.5 0.5 1 119 138 40 122 Rc 1/8 NPT 1/8 G 1/8 MQ REAS40 105 120 64 99 20.5 35.5 1 1 142 155 65 145 Rc 1/4 NPT 1/4 G 1/4 PA dimensions are for split from center.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

N.O. 140 (80) 1/8 Base mounted (with sub-plate) 135 (75) 136 (76) 157 (97) 1/4 Note) Value for DC. Add 3 g for AC. ( ): Without sub-plate. External Pilot SYJ700R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port. It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

Compact Guide Cylinder End Lock Type SeriesMGP

140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)

Miniature Fittings M3, R(PT) 1/8, M5 Series M

Straight union Bulkhead connector P. 97 KFH Use to connect same size tubes in the same direction. P. 99 KFE Use for transit connection of a tube and a male screw for installation of panel. Male elbow Bulkhead union P. 97 KFL Use to pipe at right angle to female thread portion. Most general type. P. 99 KFE Use to junction connection of tubes for installation of panel.