SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 86 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

Proposals for Energy Saving

S + Stroke ZZ + Stroke Bore size (mm) E F (E1) WA GA S TA ZZ (F1) 17 21 26 26 32 37 18 25 30 32 40 50 2 2 2 2 3 3 20 21 23 23 30 31 18 19 21 21 28 29 77 (85) 84 (93) 97 (109) 97 (109) 116 (130) 117 (131) 17 18 20 20 119 (127) 136 (145) 157 (169) 157 (169) 190 (204) 191 (205) 2 2 2 2 3 3 32 40 50 63 80 100 Note 1) Dimensions other than the above are the same as the standard double acting

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 34 49 57 57 59 60 61 62 62 71 85 90 91 92 92 94 95 97 101 104 106 108 116 122 122 124 125 126 127 127 127 128 132 138 138 140 141 141 Vacuum Pressure Switch/Solid State Switch \(ZSE\), Diaphragm Switch \(ZSM\) .

Series VQ Base Mounted Metal Seal/Rubber Seal

. < >: AC type and TV approved type Dimensions (mm) L n Equation L1=10.5n+44.5, L2=10.5n+62.5 n: Station (Max. 24) 2 65.5 83.5 112.5 123 3 76 94 125 135.5 4 86.5 104.5 125 135.5 5 97 115 137.5 148 6 107.5 125.5 150 160.5 7 118 136 162.5 173 8 128.5 146.5 175 185.5 9 139 157 187.5 198 10 149.5 167.5 187.5 198 11 160 178 200 210.5 12 170.5 188.5 212.5 223 13 181 199 225 235.5 14 191.5 209.5

XL

97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S

VZ5000

VV5Z5-20Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) 4-4.5 (Mounting hole) VK VZ VF VFR 6-Rc 1/8 (1(P), 3/5(R) port) PE port (Pilot EXH) VP4 VZS Manual override (Non-locking) G: 300 mm H: 600 mm VFS (Lead wire length) VS4 VQ7 EVS VFN (mm) Stations L1 L2 15 306 294 14 287 275 13 268 256 12 249 237 11 230 218 10 211 199 9 192 180 8 173 161 7 154 142 6 135 123 5 116 104 4 97

KQ2

Applicable thread KQG-U01 Uni 1/8 KQG-U02 Uni 1/4 Gasket KQG-U03 Uni 3/8 KQG-U04 Uni 1/2 97

Mechanically Jointed Rodless Cylinder Series MY1

MY3M MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BAL D-M9V D-M9WV D-M9AVL D-M9 D-M9W D-M9AL D-A9 D-A9V D-Y69/Y7PV D-Y7WV Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 90 74 86 70 86 74 106 90 110 94 94 106 97 123 123 97 118 102 118 102 153 127 127 153 148 132 148 132 182.5 157.5 182.5

Air Slide Table Series MXQ

MXQ25-30 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-100 MXQ25-125 MXQ25-150 MXQ25-100 MXQ25-125 MXQ25-150 MXQ25-150 MXQ25-100 MXQ25-125 0.06 0.08 MXQ25-30 MXQ25-50 MXQ25-50 MXQ25-30 MXQ25-50 MXQ25-125 0.08 0.06 MXQ25-20 MXQ25-20 0.04 MXQ25-20 0.04 MXQ25-10 MXQ25-10 0.04 0.02 0.02 0 0 0 100 200 300 400 500 100 200 300 400 500 800 200 400 600 Load (N) Load (N) Load (N) D-X Individual -X 97

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 212 160 Z section detail 63.5 63 Stroke + 204 (table movement range) 194.5 Z section 31.5 110 3.3 69 113 105 A section 5.8 1.7 4.8 Stroke + 430 170 8-9 A section detail (Switch groove) 20 110 (T-slot pitch) 80 11.5 76 4-8H10 depth 5 45 Stroke + 97

Single Axis Electric Actuator Series LJ1H

120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 212 160 Z section detail 63.5 63 Stroke + 204 (table movement range) 31.5 194.5 Z section 110 3.3 69 113 105 A section 5.8 1.7 Stroke + 430 170 4.8 A section detail (Switch groove) 8-9 20 110 (T-slot pitch) 80 11.5 76 4-8H10 depth 5 45 Stroke + 97

High Vacuum Angle Valve, XL Series

97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S

Compact Rotary Actuator Series CRQ2

Applicable model: D-A73, A73H, A73C, C73, C73C, E73A, Z73 D-R73, R73C, 97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed.

LG1H

Operating temperature range (C) Work load (kg) Maximum speed (mm/s) Positioning repeatability (mm) Motor Encoder Lead screw Guide Motor/Screw connection Model 5.3 6.1 6.9 7.7 5 to 40 (No condensation) Performance 30 500 0.02 AC servo motor (100 W) Incremental system/Absolute type Main parts Ground ball screw 15 mm, 10 mm lead High rigidity direct acting guide With coupling LECS(Refer to page 97

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 10-SYJ714M 140 (80) 1/8 Base mounted (with sub-plate) 10-SYJ724M 135 (75) 136 (76) 157 (97) 10-SYJ714M 1/4 10-SYJ724M Note) Value for DC. Add 3 g for AC. ( ): Without sub-plate. 627 3 Port Pilot Solenoid Valve 10-SYJ700 Note) AC-type models that are CE-compliant have DIN terminals only.

0.4

A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 65.5 76 86.5 97

Manifold Specifications

VV5Z5-20Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) 4-4.5 (Mounting hole) VK VZ VF VFR 6-Rc 1/8 (1(P), 3/5(R) port) PE port (Pilot EXH) VP4 VZS Manual override (Non-locking) G: 300 mm H: 600 mm VFS (Lead wire length) VS4 VQ7 EVS VFN (mm) Stations L1 L2 15 306 294 14 287 275 13 268 256 12 249 237 11 230 218 10 211 199 9 192 180 8 173 161 7 154 142 6 135 123 5 116 104 4 97

CQ2

across flats K 11 Lead wire minimum bending radius 10 D D 22 Z M E Auto switch K M L B L+ stroke D-A7, A8 E J S A+stroke Rod end male thread Rod end male thread (mm) A Without auto switch A With auto switch Rod end nut Rod end nut 2-H1 Bore (mm) 50st. or less 55 to 75 80 to 100 50st. or less 55 to 75 80 to 100 87.5+ stroke 97.5+ stroke 32 172.5 197.5 172.5 197.5 C1 C1 Auto switch D-A9, F9 97

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For details about the rod end nut and accessory brackets, refer to page 7-6-20. 31.5 35 41 47.5 57.5 67.5 55.5 62 77 90 114 134.5 9 depth 7 9 depth 7 11 depth 8 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 16 16 20 20 25 30 60 69 86 103 132 156 14 14 17 17 22 27 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 7-6-97 98 Compact Cylinder:

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

depth 4.4 2-M5 x 0.8 4-M4 x 0.7 2-M4 x 0.7 thread depth 6 M5 x 0.8 x 10l CXS15 9 10 58 20 56 18 2-M5 x 0.8 45 25 5 30 8 48 10 10 M6 x 1.0 x 5l 38.5 thread depth 8 thread depth 5 Dimensions by Stroke (mm) Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97