Electric Actuator

600 Mey m 400 400 L2 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Precautions LECS; Work load [kg] Work load [kg] 1,000 1,000 800 800 600 600 L3 m Mer 400 400 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Work load [kg] Work load [kg] 1,000 1,000 800 800 600 600 400 400 200 200 m Mep 0 0 0 5 10 15 20 0 2 4 6 8 10 L4 Work load [kg] Work load [kg] 1,000 1,000 800 800 600

MG

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com : Common stroke for MGQ and MGP : For MGP CX DSeries MGG Bore size (mm) Standard stroke (mm) Basic cylinder with integrated guide rods Long stroke is available.

Compact

800 800 800 m 11LEJS L3 [mm] L3 [mm] L3 [mm] L3 [mm] 600 600 600 600 L3 Z 25A400 400 400 400 200 200 200 200 LEC 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 0 5 10 15 20 0 2 4 6 8 10 LEC S Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 500 1000 1000 LEC SS-T 800 400 800 800 L4 LEC Y L4 [mm] L4 [mm] L4 [mm] L4 [mm] 600 300 600 600 X 400 200 400 400 m Motorless 200 100 200 200 0 0

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1/4 1/4 1/4 3/8 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 37 44 50 56 66 8-25-11 11 Series MGZ With Mounting Bracket Transaxial foot style: (L) 4-LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ LD Y X LH LT LX LY LZ Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32 40 50

Slider Type Ball Screw Drive/11-LEFS Series

300 400 500 600 700 800 900 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] Servo Motor (24 VDC) The following graph shows the values when moving force is 250%.

70astamb1

Up to 800 19.5 27 32 32 37 37 12.2 14.2 19 19 23 27 4 4 5 9 12 14 15 10.5 11.5 17 6-7-20

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

L2 = Q2 = M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L1 = 5. Q2 = M 6.

C95

Thus the allowable load is 800 kg.

VQ4000

00-A-5 0 0 200 400 600 800 1000 1200 1400 VQ45 (Plug lead type) B ARBQ4000-00-B-5 Flow rate (l/min(ANR)) P ARBQ4000-00-P-5 ARBQ4000-00-P (P B) 0.7 Outlet pressure (MPa) 0.6 SMC 0.5 0.4 0.3 0.2 50 147 0.1 0 0 200 400 600 800 1000 1200 1400 B 2 SMC Flow rate (l/min(ANR)) 12 1 P 5 3 R2 R1 Pressure Characteristics 59 PE 4 A Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate

ZR

Supply port location Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Individual Spacer Part no.

MXQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Repeatability Dimensions CX Model Height Width Parallelism Overall length Height tolerance MXQ12-30 MXS12-30 30 46 0.035 0.08 86 DSymmetric type is also standardized.

CXWM/CXWL

MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DRB0805 RB1006 RB1411 Shock absorber model -X CXWM32-25, 50 Applicable slide unit CXWM -25 10 16 CXWM -25 20 25 CXWL32-25 20Thread O.D.

VZ100/300/500

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Non-locking push type M5 x 0.8 VT For N.O.

Vacuum System Peripherals:

ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com r Stations ZL Indicate X for the position of ejector/valve, etc.

Electric Actuator

Cable type Note 1) Stroke [mm] 100 Nil Without cable 100 S R to Standard cable to 800 Robotic cable (Flexible cable) 800 Note 1) The motor and encoder cables are included. (The lock cable is included when the motor with lock option is selected.)

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

800 1500 1500 LEL L1 L1 [mm] L1 [mm] L1 [mm] L1 [mm] 600 600 1000 1000 X m Me LEM 400 400 500 500 200 200 LEY 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH

CQS

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 15 Note) 25 Note) 10 10 5 2 10 Note) 25 Note) RQ 5 1 15 Note) Note) Please consult with SMC for shorter stroke length than indicated in the table.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

A

Outside Local Area: (800) 258-9200 !

KJ

Note) D1: Max. diameter D2 Connection thread Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Female Elbow: KQ2LF Applicable tubing O.D.