Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 17", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 6", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 1", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 2", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 3", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 4", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 5", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 8", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 10", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 12", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Cylinder (Tube) Inner Diameter(φ): 1 1/2", Stroke(mm): 21", Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Custom-made Specifications: None

Cylinder (Tube) Inner Diameter(φ): 1 1/2", Stroke(mm): 21", Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Custom-made Specifications: None

Digital Flow Monitor

Display with zero cut-off setting Press the or button to select the display zero-cut setting. : The display above is an example when 3000 L/min flow range is selected. : When the actual flow is smaller than the displayed value in the upper line, zero will be displayed. Example: Flow range 3000 L/min Press the button to set. Return to function selection mode.

HRX-OM-X071

Ambient temp. 7000 6000 25 25 6000 32 32 Cooling capacity[W] Cooling capacity[W] 5000 5000 40 40 4000 4000 3000 3000 2000 2000 1000 1000 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz Fig 9-7 Cooling capacity (HRR050-A-20-) 9.4.2 HRR050-W-207000 7000 Facility water temp. 6000 6000 25 Cooling capacity[W] Cooling capacity[W] 5000 32

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA06 1 262144 (Position control mode) 2000 1200 600 2400 1600 800 3000 2000 1000 Electronic gear denominator *3.

Fieldbus system (PROFIBUS DP compliant)

SY 3000, 5000, 7000, 9000 SYJ 3000, 5000, 7000 S0700 0700 VQZ 1000, 2000, 3000 Plug-in type Valve series Model No.

VZS

VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 3-7-5 6 Series VZS2000/3000 Caution 7. Part number for Screws and Gasket Assembly Precautions on ordering The interface gasket configuration between valve manifolds has been changed in line with the configuration changes of the valve interface.

Electric Actuators

T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] 40 0.5 200 (0.067 + 0.067) 200 T2 = = = 0.133 [s] L 0.5 V (T1 + T3) V T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.

ZSE2/ISE2

ZSE2-0R Grommet type: ZSE2-0R-15 Connector type: ZSE2-0R-15C Pressure setting trimmer Indicator light (Red) Pressure setting trimmer Indicator light (Red) H SET L H SET L 15 15 9 9 2-M2.5 x 41L Mounting thread 25 2-M2.5 x 41L Mounting thread 25 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6-12

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 784 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Connector type: ISE2-15C Grommet type: ISE2-15 01 T1 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 Indicator light (Red) Indicator light (Red) 20 20 600 (3000) 600 (3000) ZSE ISE ZSP