When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

High Vacuum Angle Valve

Model XLm-100(-1)-X152 XLm-160(-1)-X152 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 2 3 100 V 800/220 1200/350 H4 100C Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 3200/220 4800/350 Heater assembly quantity 3 4 100 V 1200/300 1600/400 H5 120C 200 V 4800/300 6400/400 The inrush current of

Hydraulic

) 10 100 Load weight (kg) 10 80 m 63 50 1000 40 32 10 100 100 1000 Speed (mm/s) Series CH2G, CH2H: Load weight for horizontal motion Speed chart (C-rod retraction, pressure 14MPa) 10 100 Load weight (kg) 10 80 63 50 m 1000 40 10 100 100 1000 Speed (mm/s) Series CH2G, CH2H: Load weight for horizontal motion Speed chart (extension, pressure 14MPa) 10 Load weight (kg) 100 10 80 63 m 50 1000

LEC-OM02704CN

1000 80 80 0 0 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 1000 2000 80 80 0 0 6 2000 1000 80 80 0 0 7 1000 1000 80 80 0 0 8 1000 1000 100 100 0 0 LEC-MR-J3BAT 1000 1000 100 100 0 0 C N 4 ( 3 ) 255 2000 2000 80 80 0 0 RS-422 USB CN 6 CN 1 CN3 CN5 DI/O ON USB CC-Link RS-422 1.

MY2

/s Piston speed mm/s 4 Series MY2 Maximum Allowable Moment/Maximum Load Weight Moment/MY2H (Single axis) MY2H/M3 MY2H/M1 MY2H/M2 50 60 50 60 50 60 30 30 30 20 20 20 Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 10 10 10 MY2H40 MY2H25 MY2H25 MY2H25 5 5 5 4 4 4 3 3 3 2 2 2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston

Uniaxial Electric Actuator Series LJ1

W: Work load (N) L1, L2, L3: Amount of overhang to work piece center of gravity (mm) a: Table acceleration (mm/s) Mounting position Direction of load movement Model LJ1H10 LJ1H20 LJ1H30 Horizontal/Lateral Horizontal/Lateral Vertical Lateral Horizontal a M1 2000 a=1000 a=1000 2000 2000 a=1000 L1 mm L1 mm L1 mm Pitching W a=2000 a=2000 a=3000 a=3000 a=2000 1000 1000 1000 L1 a=3000 0 2 4 6 8

Table of Contents

Piston B Switching Pressure (Open Closed) 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 Type Y DIN terminal 0.1 0 0.6 0.1 0.2 0.3 0.4 0.5 0.7 0.8 0.9 1.0 Inlet pressure (MPa) Needle Valve Flow Characteristics Inlet pressure 0.5 MPa JIS Symbol 2000 1800 AV5000 1600 Air flow rate (/min (ANR)) 1400 2 1(P) 2(A) AV4000 1200 1 1000 800 AV3000 3(R) 600 AV2000 400 Accessory/Pressure Gauge 200 0 Pressure

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Cylinder with Lock

1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 Double Acting, Single Rod Double Acting, Double Rod Lock Unit Made to Order Auto Switch Load mass m [kg] Load mass m [kg] 63 63 50 50 40 40 50 50 32 32 32 32 10 10 1 100 500 400 300 200 1000 1 100 500 1000 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph n Graph c 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

LEC-OM07605CN

PC_ _ ]) [] PC01 ERZ rev03rev200rev200rev 0 0 [rev] () 1000 . [Pr.

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 LEFS25 V V V V V V V V V V V V V V V V LEFS32 V V V V V V V V V V V V V V V V V V V V LEFS40 V V V V V V V V V V V V V V V V V V V V * Please consult with SMC for non-standard strokes as they are produced as special orders.

JXCx-OMT0061CN

1000 0 0 0 100 0 0 0.1 2 INC 50 10.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1 DRIVE (1) No.

LEC-OM02904

470(423517) 1.0 100 400V TND20V-102K 625 825 7500/1 6500/2 400 1650 560 1000(9001100) [mm] D H T E ()L d W D T Max.

3

0 0 0 0 400 800 1200 1600 2000 0 100 200 300 400 500 0 200 400 600 800 1000 Flow [L/min] Flow [L/min] Flow [L/min] IN Side Straight Piping Length and Accuracy (Reference Value) The piping on the IN side must have a straight section of piping with a length of 8 cm or more.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

For 4 Axes Step Axis Movement mode Speed Position Acceleration Deceleration Positioning/ Pushing Area 1 Area 2 In position Comments mm/s mm mm/s2 mm/s2 mm mm mm Axis 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 Axis 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 Axis 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 1 INC 500 250.00 1000 1000 1 0 0 20.0

Transfer

1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) 30 40 20 20 5 4 3 10 10 5 4 3 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 2 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B40 2 1 ML2B25