Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 1 SOL.B 2 SOL.A 1021-VV5Q21 3 Station 2 SOL.B 15 14 3 2 1 4 SOL.A 17 16 5 25 24 Station 3 13 SOL.B 6 23 18 12 4 SOL.A 7 26 22 19 Station 4 SOL.B 11 5 21 20 8 SOL.A 10 9 8 7 6 The total number of stations is tabulated starting from station one on the D-side. 9 Station 5 SOL.B 10 SOL.A 11 Station 6 SOL.B 12 SOL.A 13 Station 7 SOL.B 14 SOL.A 15 Air Preparation Equipment Pressure Control

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 1 SOL.B 2 SOL.A 1021-VV5Q21 3 Station 2 SOL.B 15 14 3 2 1 4 SOL.A 17 16 5 25 24 Station 3 13 SOL.B 6 23 18 12 4 SOL.A 7 26 22 19 Station 4 SOL.B 11 5 21 20 8 SOL.A 10 9 8 7 6 The total number of stations is tabulated starting from station one on the D-side. 9 Station 5 SOL.B 10 SOL.A 11 Station 6 SOL.B 12 SOL.A 13 Station 7 SOL.B 14 SOL.A 15 Air Preparation Equipment Pressure Control

Stainless Steel 316 Fittings

" L2 M1 1/4" 5/32" O 1/4" 5/16" L1 N 3/8" 5/16" M2 1/2" 3/8" Note 1) D is maximum diameter.

KQ2

13.5 10.5 13.5 11 17.5 14.5 11.5 7 1 8 15.5 2.5 1 4 1 8 10 6 5 32 16 3 1 4 10 Applicable tubing 1 8 1 4 7 3 16 16 3.5 9 1 8 14.29 12.7 9 1 4 3 8 1 4 17 4.6 11 17.46 16 1 8 15.5 20.5 12 14.29 1 4 3 8 5 16 18.5 6 9 13.5 17.46 16 Connection thread 1 4 19 17.46 22 28 3 8 1 2 3 8 21 7 16 14 22 22.23 30 22.5 24 28.5 30 1 4 33 9 3 8 1 2 22.23 22 9.6 30 1 2 17 25 28 Reference dimensions after Uni

HRX-OM-Q026

Sets SERIAL mode.2 (Operation and setting are performed by serial communication.) 1: When the contact input signal 1 is external switch signal, it is not possible to set to DIO mode. 2: When the serial protocol is simple communication protocol 2 and the contact input 1 is external switch signal or contact input 2 is remote signal, it is not possible to set to SERIAL mode.

Compact Cylinder Series CQS

9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 D-X Note 1) For basic style 20 and 25 with 5 stroke, through-hole is threaded over the entire length.

VFR

Cable Color List of Each Terminal No. 3 5 7 Red 9 Blue 11 13 2 4 6 8 Red Yes 10 Blue Yes 12 1 Terminal no. Lead wire color Dot marking 1 9 Gray 10 11 12 2 3 Red 4 5 6 Pink 7 Blue 8 Terminal no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1, !2, and !9 are set. Note) When ordering spare parts, write 1 piece for 1 set of the parts for one actuator.

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Stopper Cylinder

#3 $4 $3 $5 #0 $1 $2 @5 @3 @4 @6 #1 $6 #7 #5 #6 #8 @7 #2 #4 Only one roller is provided for 32. $0 #9 RSQ RSQ Component Parts No.

Electric Grippers

Power supply cable (LEC-CK1-1) is an accessory.

7.5

SOL.a 20 Station 1 SOL.b 18 20 19 SOL.a 16 Station 2 SOL.b 14 18 17 SOL.a 12 Station 3 SOL.b 16 15 10 SOL.a 8 Station 4 14 13 SOL.b 6 SOL.a 19 12 11 Station 5 SOL.b 17 SOL.a 15 10 9 Station 6 SOL.b 13 8 7 SOL.a 11 Station 7 SOL.b 9 6 5 SOL.a 7 Station 8 SOL.b 5 4 3 3, 4 2 1 24 VDC Triangle mark + 1, 2 Note 1) This circuits are for the specifications with up to 8 stations of 2 position double

XL

Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14) (actuation port [1]-(7) is released).

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

EX120/121/122

SW2 SW1 DIA When the extended diagnostic information is available. When the extended diagnostic informatiion is not available. Light is turned on. Light is turned off. OFF OFF 6 5 4 3 2 1 ON 10 9 8 7 6 5 4 3 2 1 ON ON ON BF When PROFIBUS DP communication is working improperly. When PROFIBUS DP communication is working properly. Light is turned on. Light is turned off.

OMU0023

If the least significant bit was "1", exclusive OR the content with A001h after the 1-bit shift. bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 A001h 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 1 High byte "CRC16(H)" Low byte "CRC16(L)" ExOR Step Hex Arithmetic content flag 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 Preload Fh 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Load 1st byte "01h" 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1

JXCx-OMX0009

E.g.) 1 byte Hexadecimal Binary Decimal (OCT) (HEX) (BIN) 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 0 0 0 0 0 0 1 0 2 2 0 0 0 0 0 0 1 1 3 3 0 0 0 0 0 1 0 0 4 4 0 0 0 0 0 1 0 1 5 5 0 0 0 0 0 1 1 0 6 6 0 0 0 0 0 1 1 1 7 7 0 0 0 0 1 0 0 0 8 8 0 0 0 0 1 0 0 1 9 9 0 0 0 0 1 0 1 0 10 A 0 0 0 0 1 0 1 1 11 B 0 0 0 0 1 1 0 0 12 C 0 0 0 0 1 1 0 1 13 D 0 0 0 0 1 1 1 0 14 E 0 0 0 0 1 1 1 1 15 F 0 0 0 1

A_HEC-OM-I009

-9-1 Fig. 9-2 Alarm indication in the event ERR14 arises during PB width setting input -9-1 Fig. 9-3 Alarm indication in the event temp. upper and lower limit arises -9-1 Fig. 10-1 Moisture air diagram -10-2 HEC002-A/HEC006-A v Contents Table List Page No.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

1) 02 2 stations W Note 1) Combination of [C ] and [S ] is not possible.