5 Port Solenoid Valve

When ordering this option incorporated with a manifold, suffix -N to the end of the manifold part number. ...n: Station 5 8 7 6 5 4 3 2 1 31 n = 6 to 24 n = 1 to 5 72 Series S0700 Plug-in Manifold Stacking Base Manifold Optional Parts Double check block (Separated) VQ1000-FPG-ll It is used on the outlet side piping to keep the cylinder in the intermediate position

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

F Nil Rc G N T NPT NPTF Brackets are not installed.

Clean Room Rodless Cylinder Series CYP ø15, ø32

of the items below, where the total (n) does not exceed 1.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

of the items below, where the total (n) does not exceed 1.

REA/REB

Bore size (mm) Model Elbow type Straight type In-line type 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214

REA/REB

MQQ M Table (1) Recommended Speed Controller Bore size (mm) Model Elbow type RHC Straight type In-line type MK(2) AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

REA/REB

-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

Sine Rodless Cylinder Series REA/REB

n 1 = W/Wmax Item Note Review W.

VP300/500/700

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

VQZ1000/2000/3000

Cylinder side pressure (P2) I N I N O UT O UT Specifications 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m Maximum operating pressure Minimum operating pressure Ambient and fluid temp.

Rotary One-touch Fittings Manifold Series KM

N H (Hex.) Applicable tube O.D.

Table of Contents

How to Order Manifold VV5Q1 3 06 D 1 N L Option None DIN rail mounting style With name plate Built-in silencer, direct exhaust Nil Cable (Length) Series VQ1000 D 0 1 2 With cable (0.6 m) With cable (1.5 m) With cable (3 m) N S Manifold Note) When two or more symbols are specified, indicate them alphabetically.

Check Valve Series AK

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

Series VQ Metal Seal/Rubber Seal Body Ported

How to Order Manifold 1 4 08 N VV5Q C Option Series None 0 1 2 VQ0 VQ1000 VQ2000 D N S DIN rail mounting With name plate Built-in silencer (Direct exhaust) Manifold Note 1) When specifying more than one option, please list alphabetically.

Compact and Lightweight

DIN rail mounting bracket (Brackets on both sides) L x n pcs.+ J x 2 L ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 The above shown products cannot be mounted closely together, as width across flats of the screw-in connection will interfere with each other.

With Factory Installed

Example) 1NR 20 1/8 25 1/4 Port size 30 3/8 01 1/8 1/2 40 Accessory (optional) 1/4 02 03 3/8 Symbol Description Applicable model 04 1/2 B With bracket AR2001-AR4001 Optional Specifications Combination Table Optional specifications Applicable regulator model Optional specifications Symbol AR3001 1 N R AR 2001 AR2501 AR4001 O.02 ~ O.2MPa [O.2 ~ 2.0kgflcm 21 -1 Non relieving -N IN-OUT reversal

AN

Specify N after ANm03-. (Ex.: AN103-N01) Note) NPT thread is also available. Specify N after 25mm-.

2/3 Port Valve for Various

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.