MRHQ

Solid state switch Relay PLC M9P Yes 24 V 3-wire (PNP) M9B 12 V 2-wire Action Lead wire length symbols: 0.5 m .

MXF

12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V Relay, PLC 2-wire 24 V Grommet F9NWV F9NW 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PWV F9PW 3-wire (PNP) 2-wire F9BWV F9BW 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

ZCUK

5 5 1 pc. 10 5 10 2 pcs.

CEx-OMB0075

Noise countermeasures 8 Chapter 5: Structure and Measuring Principle 5-1. Structure 9 5-2. Measuring Principle 10 5-3. Relationship Between Pulse and Count10 Chapter 6: Troubleshooting 6-1. Troubleshooting for Measuring Function11 6-2.

XL-OMY0002

) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0002 /H0 H4 H5 () 510% O 0.1mm0.2mm O 9 P15 3 3P7P8 5 P11 O 10 P16

CE

*(CEU5**-D)EMC CEU5) 5. 5-1 () CE1 14.5mT CE1 15000 18cm 5-2 0.1mm 0.0 0.2 0.1 A B (1)0.8mm (2) sin cos 2 0.8mm (3)1/8 90,0.1mm/ (4)0.1mm 5-3 CE1 A /B 90 A B 3 2 2 1 1 0 A ON90B ON B ON90A ON A B 6. 6-1 11 11 DC12V DC24V DC12V24V CEU5 CEU5 MODE 2 90 CEU5 4 10,11 SMC 13 CEU5 13 23m 23m () CEU5 11 AC 10 70500mm/s 12 6-2 5,6, 12 5 5,12 10 ?

MONOSASHI-KUN

Noise countermeasures 12 5. Structure and Measuring Principle 5-1. Structure 13 5-2. Measuring Principle 14 5-3. Relationship Between Pulse and Count 14 6. Troubleshooting 6-1. Troubleshooting for Measuring Function 1516 6-2.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 5 V, 12 V IC circuit Solid state switch Reed switch 12 V 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indication) 24 V Yes Grommet 12 V 5 V, 12 V IC circuit Water resistant (2-color indication) 12 V 5 V 12 V Magnetic field resistant (2-color indication) 2-wire (Non-polar) 3-wire (NPN equivalent) 100 V Grommet

Cylinder with Turntable ø63, ø80, ø100 Series MGT

: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ MGZ 12 V 2-wire M9B M9BV Relay, PLC 24V Grommet Yes 3-wire (NPN) 3-wire (PNP) M9NW M9NWV Diagnostic indication (2-color indication) 5 V, 12 V IC circuit MGT M9PW M9PWV Refer to page 457 for applicable auto switches other than listed above.

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

state auto switch 2-wire 12 V M9BV M9B M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V,12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Yes 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire

Parallel Style Air Gripper/2-Finger Type Series MHS2 ø16, ø20, ø25, ø32, ø40, ø50, ø63 How to Order Bore size 20 MHS2 D M9BW ø16 to ø25 Number of fingers Number of auto switches 2 Nil 2 pcs. 2 fingers Auto switch Bore size S 1 pc. Nil Without auto switch

AC Lead wire length (m) Load voltage DC Auto switch model Special function Electrical entry Indicator light Wiring (Output) Pre-wired connector Applicable load Type In-line Perpendicular 0.5 (Nil) 1 (M) 3 (L) 5 (Z) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA 5 V, 12 V 3-wire (NPN) 3-wire (PNP) IC circuit Solid state switch 12 V 2-wire 3-wire

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9B D-M9N, D-M9P D-A93 Load voltage Load current range Indicator light Application 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905 Rotary Actuator 11-CRA1-Z Rotation

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

state auto switch 2-wire 12 V M9BV M9B M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V, 12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Yes 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 M9NAV*1 M9NA*1 v v V v v IC circuit 3-

MRHQ

-746 Yes 24V 3-wire (PNP) Grommet D-M9B-746 12V 2-wire MHZ Lead wire length symbols: 0.5 m .

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

to 60C Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type *

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9B D-M9N, D-M9P D-A93 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905

MHC2-6/MHCA2-6

Lead wire length (m) Indicator light Load voltage Auto switch model Wiring (Output) 0.5 (Nil) 1 (M) 3 (L) Applicable load Pre-wired connector Type Special function Electrical entry 5 (Z) DC AC In-line Perpendicular M9NV M9PV M9BV M9N M9P M9B 3-wire (NPN) 3-wire (PNP) 2-wire 5 V, 12 V Solid state switch IC circuit Relay, PLC 24 V 12 V Grommet Yes Lead wire length symbols: Auto switches

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

to 60C 5 to 150C Symbol Nil M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.