VCA

Manifold body e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com No. q w e r Part no.

Vacuum Equipment

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com For the vacuum release valve, select a 2-3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate.

IZx-OMT0049

fr om ioniz er to workpiec e [ mm] mm mm 250 200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50

Integrated Controller

450 500 550 600 650 700 750 800 850 900 950 1000 Product weight [kg] 3.09 3.29 3.49 3.69 3.89 4.09 4.29 4.49 4.69 4.89 5.09 5.29 5.49 5.69 5.89 6.09 6.29 6.49 6.69 6.89 Additional weight with lock [kg] 0.58 Series EQFS40R L Stroke [mm] 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Product weight [kg] 5.15 5.43 5.71 5.99 6.27 6.55 6.93 7.11 7.39 7.67 7.95

CQM

4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

Guide Table Series MGF ø40, ø63, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DMounting height -X Reduction by 15 to 20% (Compared to SMC Series MGQ) 20Data Guide table Series MGF 40, 63, 100 Built-in non-rotating mechanism Internal guide pin prevents rotation.

PA300/500/700

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil F N T Rc G NPT NPTF VR Body type Body ported Base mounted 2 4 Port size VH Valve option VPA342 VPA344 VPA542 VPA544 VPA742 VPA744 Port size Rc Without sub-plate 1/8 1/4 3/8 1/2 Symbol Nil V Standard Vacuum VPA544 VHS Nil JIS Symbol Option Option

Multistage Ejector Series ZL112/212 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating Environment Caution 1. Avoid use exposed to direct sunlight. Solenoid Valves (Series ZL112/ZL212) Caution 1.

IDUS/IDFS

Corrected air flow = (Air flow) (Data A x Data C) Corrected air flow = (Air flow) (Data B x Data C) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Select a model having an air flow capacity that is higher than the corrected air flow.

CXT

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX A shock absorber can be installed (option). D-X Can be mounted on two sides. 20Mounting from the bottom side Mounting from the upper side Data Guide of high rigidity Adjusting bolt with bumper is standard.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size 15 32 15 mm 32 mm CX Auto switch Nil Without auto switch DFor the applicable auto switch model, refer to the table below.

ZP

M6 x 1 A6 Mounting M8 x 1 A8 U C Flat Flat with ribs M4 x 0.7 B4 M5 x 0.8 B5 D Deep M6 x 1 B6 B Bellows UT Thin flat CT Thin flat with ribs M8 x 1.25 B8 Material N S NBR Silicon rubber Table (1) Pad Diameter/Pad Type Dia.

E-ITV-STD-RF-A

P_1P_2 P_1P_2 W i ndow com parat or m ode H yst eresi s m ode O ut put pressure of E/P regul at or P_2 P_1 P_1 P_2 O N O FF O N O FF Sw i t ch out put P_1P_20 O ut of range m ode The sw i t ch out put t urns on w hen set pressure i s achi eved.

LC6D/LC6C

Limit switch abnormality 4 314 11 Series LC6D/LC6C Options Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Caution Do not repeatedly apply bending stress or tension to the cables.

MXU

D-A9V D-M9V D-F9WV Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ( ): Denotes the values of D-M9V, D-F9WV.

V100

[Standard] Press in the direction of the arrow Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector Socket Lead wire Caution Hook When operating with a screwdriver, turn it gently using a watchmakers screwdriver.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T VMG Pressure loss is less than 1%.

PF2D

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Three types of flow range 0.4 to 4 l/min (PF2D504) 1.8 to 20 l/min (PF2D520) 4.0 to 40 l/min (PF2D540) ISA2 IS ZSM Swept flow characteristics Tapered side seal minimizes dead volume to reduce accumulation of liquid pool.

VCW

N.O. q q w w e e r r t y u t y u Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IN IN Component Parts Component parts Description Material Description Material No. No.

ZMA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc.