IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Component Parts Material No.
Back up spring Poppet spring Note Platinum silver De-energized De-energized q w e Stainless steel r Replacement Parts Part no. No.
Floating Joint Center of sphere M M U U D H G B F P C E R A (mm) Max. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Weight (kg) B C D E F G H Nominal size Pitch Compression Tension JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 29 35.5 47.5 59 71.5 1.25
Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !
Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H J
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use
Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.
Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 /LEKFS25(L,R)T6 /LEKFS32(L,R)T7 /LEKFS40(L,R)T8 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para.
5 CL1 e !8 r ^2 t #6 #7 #8#5#9 $7 %5 ^0 MLGC CNG $2 ^3 ^9 ^0 &0 180, 200, 250 Steel tube Component Parts Component Parts MNB No. Description Material Note No.
Set screw (Unused) r i y d Auto switch mounting bracket u e c Auto switch mounting screw M2.5 x 0.45 x 6 l Switch spacer (For BQ-2) e b Square nut (For BQ-2) w Cylinder q BQ-2 is a set of a, b and c shown above. BQ2-012 is a set of d and e shown above. Cylinder series Applicable bore size (mm) Auto Switch Mounting Bracket Part No.
Bar + High voltage power supply module + Controller IZT 40 34 D 1 6H R 3 F U IZT 41 34 D 1 6H R 3 F U Transistor InputOutput IZT 41 34 D 1 6H R L T R F U IO-Link Model Symbol Model Emitter cartridge type / Materials Bar length Symbol Type Type Symbol Length (mm) Symbol Length (mm) 40 Standard type D High speed static Tungsten 16 22 160 220 82 820 neutralization cartridge L E Silicon
Caution Mounting Screw Tightening Torques M2.5: 0.32 Nm (For stacking type manifold) 3-3-41 Series VZ3000 Exploded View/DIN Rail Manifold Type 45 Manifold r w U side r q e w (b) Lever (a) Bolt (Both sides) e (a) Bolt (Both sides) Replacement Parts No. Part no.
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.
9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !
, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160
R K05 Omron D2VW-5, 3 A 250 V AC, 0.4 A 125 V DC, 5 A 30 V DC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4". Omron D2VW-01, gold plated contacts, 100 mA 30 V DC / 125 V AC. Temperature range: -40 to +85 C / -40 to +185 F. Not applicable to 6. sign "X", "X7", "Z", "U" and "E4".