Air Cylinder Series CA2

Auto Switch Mounting Height (Except low friction, air-hydro cylinders) (mm) D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F Auto switch model D-A9 D-M9 D-M9W D-M9AL D-F5 D-J59 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-Z7 D-Z80 D-Y59 D-Y7P D-Y7BAL D-Y7W D-Y69 D-Y7PV D-Y7WV D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A3C D-G39C D-K39C D-A44C D-A9V D-M9V D-M9WV D-M9AVL D-P4DWL Bore

Fieldbus System

D side U side Stations 7 6 5 4 3 2 1 n [Communication connector D-sub] (DIN rail clamping screw) BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 20.5 (7.5) One-touch fitting [1(P), 3(R) port] 13.4 56.9 Applicable tube O.D.

MLGP

DB st 50 50 < st 200 200 < st 350 30 36 236 254.5 st 50 50 < st 200 200 < st 350 96.5 87 st 25 25 < st 50 50 < st 200 200 < st 350 25 30 203 231.5 236 254.5 st 25 25 < st 50 50 < st 200 200 < st 350 63.5 64 96.5 87 80 100 80 100 18.5 21 45.5 46 13 33.5 31 9-11-27 27 Series MLGP Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height For D-P5DWL

MLGP

DB st 50 50 < st 200 200 < st 350 30 36 236 254.5 st 50 50 < st 200 200 < st 350 96.5 87 st 25 25 < st 50 50 < st 200 200 < st 350 25 30 203 231.5 236 254.5 st 25 25 < st 50 50 < st 200 200 < st 350 63.5 64 96.5 87 80 100 80 100 18.5 21 45.5 46 13 33.5 31 9-11-27 27 Series MLGP Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height For D-P5DWL

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Compact Manifold Regulator Series ARM5

X 5.5 L3=50+R+V L4=50+T+X 50 SMC H H L L S S O O U U C C P P K K R 8 S U 57 (at handle locked) DIN rail part no.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

VZ5000

Note Manifold block assembly C6: A, B port with One-touch fitting for 6 C8: A, B port with One-touch fitting for 8 C6 C8 VQ7 VZ5000-50A-1q (a) Bolt (Both sides) For D side, With D-sub connector and P/R port with One-touch fitting for 10 For U side, With D-sub connector and P/R port with One-touch fitting for 10 SUP/EXH block assembly VZ5000-51A-1D w EVS D side SUP/EXH block assembly End block

LEC-OM07605CN

PA20]Tough Drive(_ 0 _ _) 200 30 [ms] 200 PF31 FRIC 0 0 0 [r/min] [Pr. PF31] 0 r/min 5 44 5. 5.2.7 4 ([Pr.

New

type VXF21A<<D C S D C J Qp2 K I J R Tp2 K I S R Q z 280 (32) U L H L G1/2 G1/2 E E U 1/4 Exhaust port H 1/4 Exhaust port F F G Port size 2 x P G Port size 2 x P Faston terminal A B D C J K I 11 Q R S L E U 1/4 Exhaust port H F G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF21A< VXF22A< VXF23A< 3/4 1 1 1/2

Modular F.R.L. Unit

E G P 2 1 6 8 C J R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

H T E (Note)L d W D T Max.

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

(2") 075 (3/4") 088 (7/8") 106 (1 1/16") 125 (1 1/4") 150 (1 1/2") 200 (2") Mounting Height (NCDM) (in) D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7F D-B5 D-B6 D-B59W D-H7C D-G59 D-K59 C-C73C D-C80C Auto switch model HS 0.96 1.02 1.12 1.22 1.34 1.59 HS 0.87 0.93 0.98 1.08 1.20 1.46 HS 0.98 1.04 1.14 1.24 1.36 1.61 Bore 075 (3/4") 088 (7/8") 106 (1 1/16") 125 (1 1/4") 150 (1 1/2") 200 (2") 6-14-

Thermo-chiller/Rack Mount Type

Circulating fluid: Tap water, t Power supply: 200 VAC, y Piping length: Shortest For models with an inverter pump mounted (Option T1), the cooling capacity will decrease by 300 W. 4 q Ambient temperature: 25C, w Circulating fluid temperature: 20C, e Circulating fluid at the rated flow, r Circulating fluid: Tap water, t Power supply: 200 VAC, y Piping length: Shortest 5 Temperature at the

VZ1000

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

10

Auto Switch Proper Mounting Height (Standard type) [mm] Auto switch model D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-F5NT D-Y59l D-Y7P D-Y7lW D-Y7BA D-Z7l D-Z80 D-M9l D-M9lW D-M9lA D-A9l D-A9lV D-M9lV D-M9lWV D-M9lAV D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-G39 D-K39 D-A3l D-A44 Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23