ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Table of Contents

4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

IDU/IDF

E Q P N M L K J I H G F D C B A Port size Model 71 50 90 700 700 600 356 328 398 219 642 63 445 70 1235 1155 750 300 R 1 IDU22C1/22C 112 50 90 780 776 680 416 388 463 269 722 68 550 136 1350 1260 830 360 R 1 1/2 IDU37C1/37C 87 50 95 800 800 700 461 433 508 267 722 68 530 155 1440 1340 850 405 R 2 IDU55C 87 50 95 800 800 700 481 453 528 317 722 68 530 220 1575 1475 850 425 R 2 IDU75C : Power

Dual Rod Cylinder Series CXSJ/CXS

CXSL6-R CXSM10-R CXSL10-R CXSM15-R CXSL15-R CXSM20-R CXSL20-R CXSM25-R CXSL25-R CXSM32-R CXSL32-R D-X Individual -X 579 Series CXS Construction: Slide Bearing CXSM6 q e r u !

3 Port Solenoid Valve Metal Seal Series VZ200 1

wire length) With light/surge voltage suppressor Max.10 80 82.5 74.9 300 300 (Lead wire length) S070 L side 18 15.4 Manual override (Non-locking) VQ 300 7 4 2-4.3 mounting hole With light surge voltage suppressor (Lead wire length) 17.3 31.4 VKF 2-M5x0.8 4-Rc 1/8 26 VQZ R side 49.5 VZ VS Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 33 2 43 65 3 59 81 4 75 97 5 91 113 6 107 129

5 Port Solenoid Valve SY Series

SY7000 3 8" N11 N9 N11 5 16" SY9000 3 8" Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC M plug connector DIN terminal Manual override Nil: Non-locking push type D: Push-turn locking slotted type E: Push-turn locking lever type G:Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm

17

D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 12 to 100 B A D-P3DW 80, 100 25 to 63 B Ht A Hs Hs Auto Switch Proper Mounting Position Applicable Cylinder Series: MGP (mm) Auto Switch Mounting Height (mm) D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model Auto switch model D-A9 D-M9 D-M9W D-M9A D-A9V D-M9V D-M9WV D-M9AV D-P3DW D-A9 D-A9V D-P3DW Bore size (mm) Bore size (mm) A 7.5 10.5

Mechanically Jointed Rodless Cylinder Series MY2

Applicable cylinder Port variation MY2C16/25/40 MY2H16/25/40 MY2HT16/25/40 R R L L L L L L L L R R R R R R L R Slide table operating direction 1118

15

Auto Switch Proper Mounting Position (mm) A B C D Auto switch model D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 36.5 41.5 56.5 67 67 83.5 92.5 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 17.5 17.5 17.5 18 18 19.5 18.5 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 24.5 29.5 44.5 55 55 71.5 80.5 D-A9 D-A9V K dimension (Switch rail height) Bore

asilltr

Switches D-A73.D-A73H D-A76H D-A72, D-A72H comact pror6ctiv6 iifrffi I co.'rua i Lishl 'ni'ng dr.d iFolec''v r-o'" . --{%!fi; ,Ek---r iE I ll zenrdDd i i-:--:-:]"ffi -l*L r-Choks i n"a El6ctric (-) o-A73c it\ihr ;ifie ;rod; i :t r**G}ri 'p D-479W / rwo @tor6 Solid. Sta,te Suitches D-J79. D-J79C, D-F7BV D-F79.D-F7NV l--;;;-;-l .."

MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Air Cylinder NCQ7 Series Compact Cylinder

D-J79C, D-F7BV D-F79.D-F7NV l--;;;-;-l .."e D-F7P. D-F7PV .r_ i Frod i i l r E . l I I 19* i --r ,-t o'rp'r _T_ 5*"" I whhe !t, I L l i o -J Alack D-J79W. D-F7BWV D-F7PW D-F79W. D-F7NWV l-ffis". l 1 1 I l R d t l a / f l lEljJl l,." i w,,te I I i. +-| I T f I i L t > . O L4J==L=!

10

Auto Switch Proper Mounting Height (Standard type) [mm] Auto switch model D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-F5NT D-Y59l D-Y7P D-Y7lW D-Y7BA D-Z7l D-Z80 D-M9l D-M9lW D-M9lA D-A9l D-A9lV D-M9lV D-M9lWV D-M9lAV D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-G39 D-K39 D-A3l D-A44 Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23

VZ1000

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

/

Q F D D Approx. 300 Q F G1/2 Width across flats H Width across flats H C E C E R R B A 2 x P Port size 2 x P Port size B A M M 2 x J thread depth K 2 x J thread depth K DIN terminal: D Conduit terminal: T S Q F 34 D Cable 6 to 12 (Q) F G1/2 D 25 Width across flats H Width across flats H T C M C R R E E (S) A 2 x P Port size A 2 x P Port size B B M 2 x J thread depth K G1/2 2 x J thread depth

AC Servo Motor Driver

SC3 Internal speed command 3 1000 r/min Internal speed limit 3 PC08 SC4 Internal speed command 4 200 r/min Internal speed limit 4 PC09 SC5 Internal speed command 5 300 r/min Internal speed limit 5 PC10 SC6 Internal speed command 6 500 r/min Internal speed limit 6 PC11 SC7 Internal speed command 7 800 r/min Internal speed limit 7 PC12 VCM Analog speed command maximum speed 0 r/min Analog

Fieldbus System

EXH port] (Double sided type: C12) Input connector Digital Output Unit C10: 10 One-touch fitting (C12: 12 One-touch fitting) Output connector Digital Input Unit 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 11.5 R R 8 76.5 3 3 X X 56.6 (12) 49.5 B B B B B B B B 12 P12 P 30 25 1 1 A A A A A A A A 13.5

AS

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard Universal type 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 01 02 03 04 Applicable tubing O.D.