IDG

IDG100M IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 25 50 100 200 300 500 600 750 1000 25 50 100 200 300 500 600 750 1000 IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 75 110 170 240 300 IDG60SM IDG75SM IDG100SM 50 100 150 Type V A regulator combined with the type M IDG3V IDG5V IDG10V IDG20V IDG30V IDG50V IDG60V IDG75V IDG100V IDG3HV IDG5HV IDG10HV IDG20HV IDG30HV IDG50HV

10

0 r !1 u w e t y i o !2 No.

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Integrated Controller

Motor mounting position: Parallel Symbol Direction Size Nil Top side 16/25/32/40 R Right side L Left side Mounting2 Stroke [mm] 30 30 to to 500 500 Motor mounting position Parallel In-line 16 25 32 16 25 32 Symbol Type Nil Ends tapped3 Body bottom tapped For details, refer to the applicable stroke table below.

MGC

MXQ MXF MXW MXP MG MGP MGQ MGG MGCLl50-R Stroke MGC MGF CY1 MY1 3.20-7 Series MGC Allowable Tip Load and Deflection Slide bearing MGCMl20-R Stroke MGCMl25-R Stroke MGCMl32-R Stroke MGCMl40-R Stroke MGCMl50-R Stroke 3.20-8 Compact Guide Cylinder Series MGC Allowable Tip Load and Deflection Ball bushing bearing MGCLl20-R Stroke MGCLl25-R Stroke MGCLl32-R Stroke CL MLGC CNA CB CV/MVG CXW CXS

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

of 500 mm/s, use graph (2).

NCA1

Zinc chromated Tie rod Carbon steel 4 19 Rod seal NBR 1 20 Stroke (In inches and hundredths) Bore 500 600 800 Gland seal NBR 1 21 22 Cushion seal Urethane 2 Cylinder tube gasket NBR 2 23 NCA 500 RG Bore 500 600 800 Special options Nil XB5 XC35 XB5C35 Standard Oversized rod Coil scraper Oversized W/ Coil scraper NC A 500 26A 0400 D NCA 500 11 0400 B Special options Nil XB5 XB6 XB7 XB5B6 XB5B7

Vacuum Unit

pages 11 and 12, and r on page 13.)

Industrial Filters

ORIENTATION 2 x R DRAIN A B C FQ1 OUT IN OUT R3/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

SX

S 5 VDC R 3 VDC 1-6-55 56 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x

Compressed Air Preparation Filter

Activated carbon filter Bracket B Bracket A Mounting screws Bracket mounting view Accessories Sold Separately/ International Standard Specific Product Precautions 22 AMK Series Dimensions AMK20 AMK30 AMK40 S N T J D M S N T U D J M U 2 x P 2 x P Q R Q R (Port size) (Port size) G B V C V C B IN OUT IN OUT Maintenance space A Maintenance space A E G AMK50 AMK60 D M J N T S U 2 x P R (Port size

Series AK1000

Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MX MTS MY Centralized piping on right CY MG CX R R L DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

MX MTS MY Centralized piping on right CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX L R R DL -X R L Slide table actuation direction 20Centralized piping on left Data R L L R R L Slide table actuation direction 4.

VQZ1000/2000/3000

(A) AC circuit DC circuit 1 2 1 2 (B) NL: Neon light R: Resister LED: Emitting diode R: Resister Valve Mounting NL R R LED After confirming the gasket is correctly placed under the valve, securely tighten the bolts with the proper torque shown in the table below.

VZ100/300/500

M plug connector (M) 1 8 24 VAC 50/60 Hz 48 VAC 50/60 Hz VFN 110 VAC 50/60 Hz Non-locking push type 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC Locking type (Slotted) VZ300 DIN terminal (D) Locking type (Manual) 1.2 2 3 (A R) 1 8 VZ500 2.7 2 3 (A R) 1 8, 1 4 4-6-1 2 Series VZ100/300/500 Manifold Variations A port size One-touch fitting P/R port size Applicable tubing O.D.

MLGC

0.03 CL Calculation example: MLGCLB32-500-R-D MLGC 4.17 (Basic style) 0.35 (Ball bushing bearing) 0.49 0.34/50 stroke 500 stroke 0.02 Basic weight Bearing weight Additional weight with rear plate Additional weight of stroke Stroke Additional weight of long stroke 4.17 + 0.35 + 0.49 + 0.34 X 500 / 50 + 0.02 = 8.43kg CNA CB CV/MVG CXW CXS Precautions CXT Be sure to read before handling