High Vacuum Angle Valve How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !
1 V7 LEFS 32 200 R H B B 3 M2 S q Accuracy w Size e Motor mounting position r Motor type Nil Basic type H High precision type 25 32 40 Nil In-line R Right side parallel L Left side parallel Symbol Type Output [W] Size Compatible driver V6 AC servo motor (Absolute encoder) 100 25 LECYM2-V5/LECYU2-V5 V7 200 32 LECYM2-V7/LECYU2-V7 V8 400 40 LECYM2-V8/LECYU2-V8 t Lead [mm] y Stroke [mm] u Motor
How to Order ZFA 100 01 Bracket Air suction filter Nil L None With bracket (1 pc. on the left) R With bracket (1 pc. on the right) Type (Recommended flow rate) L or R shows the left or right of the filter IN when viewed from front. 50 l /min (ANR) 200 l /min (ANR) 100 200 Port size ZFA100 B (ZFA200) B (ZFA100) 1 8 1 4 02 01 Thread type Nil T Rc How to Order Manifold NPTF F G Indicate both
Contents No. q w e r t y u i o !0 !1 !2 !3 !
F S TAT I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200
F R L T B 1 R Axial entry Right entry 200/230VAC (50/60Hz) 2 Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 5.1 200 5.9 300 6.7 400 7.4 500 8.2 5 to 40 (with no condensation) 10 225 400 mm kg C kg N mm/s mm Standard stroke Strokes other than the standard strokes on the left are available by special order. Consult P/A.
IP65 R C US TYPE1 TYPE1 US C R R R R R R R TYPE1 US C TYPE1 US C TYPE1 US C TYPE1 US C TYPE1 US C TYPE1 US C MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN (mm) 8 7 6 5 4 3 2 1 Stations 248 223 210.5 185.5 173 148 123 110.5 Rail length L1 237.5 212.5 200 175 162.5 137.5 112.5 100 Mounting pitch L2 222 202 182 162
R P R port P Base mounted P port Type 32P Individual EXH spacer assembly R port A, B port R2 R1 -+ -+ R port R P A, B port Mixed mounting of 3 port valves and 4, 5 port valves P port 3 port valve 4, 5 port valve Interface regulator -+ -+ A B R port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 1-5-17.
TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.
1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.
100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 ** Non-Standard Product, consult factory for lead time.
12 M10 x 1.5 22 M10 x 1.5 8.6 14 44 9 20 1/4 16 9 12 21.5 64 47 14 40 11 148 M8 32 32 46 77 16.5 M10 x 1.5 22 M10 x 1.5 8.6 14 49 9 20 1/4 16 14 12 28 78 55 16.5 50 13.5 162 M10 39 39 58 WA R S T U VA VB WB Bore size (mm) X XA XB XC XL YY YL Z Over 25 st to 100 st Over 300 st Over 100 st to 200 st 200 Over 200 st to 300 st 33 Over 25 st to 100 st 83 Over 100 st to 200 st 121 Over 200 st
st 1000 st 2 900 st 1.5 800 st 700 st 1 600 st 400 st 500 st st: Stroke (mm) 0.5 100 st 200 st 300 st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 Allowable end load F (N) MGGM100Stroke 4 (Slide bearing type) 3.5 3 1300 st Deflection Y (mm) 2.5 1200 st 1100 st 2 1000 st 1.5 900 st 800 st 1 600 st 700 st st: Stroke (mm) 400 st 500 st 0.5 100 st 200 st 300 st 0 0 100 50 150 200 250 300
150 150 2759 200 200 2760 250 200 2760 325 325 2761 400 325 2761 Stroke (In Inches and Hundredths of Inches) Bore 150 200 250 325 400 Note: Quantity is one piece.
NCA 0.001 0 EA MM BA TD UV E AA B D-X A C FA G TT J LF + Stroke ZB + Stroke R WF TL TM TL E 20Data TD0.001 0 ZB TL TM TT UM UV WF A Y AA LF B P BA XI C D DD E EA EE FA G MM J R KK Bore size (in) 200 (2") 1 5 1/8 1 3 1.18 5 2.56 1 3/8 1 1/8 2.09 2.6 3 5/8 1 1/2 2.40 1 1/8 3.29 1/2 7/8 5/16-24 2 1/2 0.3 3/8 3/8 1 1.26 1.06 1.84 3/4-16 250 (2.5") 1 5 1/4 1 3 1/2 1 1.18 5 1/2 3/4-16 3.39 1 1/
J G R CM2 WF E TL TL LF + Stroke ZB + Stroke A CG1 MB TD0.001 0 ZB P LF Y WF TL R J G Bore size (in) MM KK A AA B C D DD E EA EE 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 1 4 3/4 2.36 3 5/8 1.71 1 1 1.43 1.1 1.26 3/8 MB1 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 1 4 3/4 2.4 3 5/8 1.71 1 1 1.84 1.06 1.26 3/8 250 (2.5") 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16
Voltage Symbol Voltage Applicable size 22E 37E 55E 75E 20 Single-phase 200 VAC (50 Hz) 200/220 VAC (60 Hz) V V 30 Three-phase 200 VAC (50 Hz) 200/220 VAC (60 Hz) V V V V Options Symbol *1 Nil A C G K L M R T With Chinese labels and a Chinese operation manual With an earth leakage breaker Moderate pressure specification *2 With a heavy-duty auto drain (applicable to moderate pressure) With
150 9 9 105 175 M8 45 149 16 170 50 93 95 134 50 75 32 150, 200, 250 34 6.5 9 10 7 19 170 186 134 150 9 9 105 175 M8 45 182 19 194 55 103 115 152 56 90 40 300 38 7 11 12 7 21 190 210 140 160 11 12 115 200 50 M10 For long strokes Bore size (mm) Stroke range (mm) Bore size (mm) O Q R S T U V W X XA Z PG PL Y R Y 20 250 to 400 M6 x 1 depth 9 94 12 26 16 114 65 52 30 3 194 20 30.5 74 152 14