Mechanically Jointed Rodless Cylinder Series MY1

MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

58

40 133 296 325 110 15 30.5 27 1/2 75 98 40 32 M30 x 1.5 1/ 5 stroke 306 338 283 315 75 40 133 110 17 34.5 34 3/4 80 106 45 36 M36 x 1.5 1/ 5 stroke 306 342 75 40 141 327 363 120 The minimum stroke with rod boot is 30 mm or more.

Free Mount Cylinder Series CU

A + A' A' A A' A' R H R H Piston seal 524 Free mounting 3 types of mounting orientations can be accommodated depending on the installation conditions.

MVGQ

port (with plug) Rc 1/8 P port C + Stroke B + Stroke A + Stroke M5 x 0.8 R port MVGQM, MVGQL Common Dimensions Applicable solenoid valve B C DA G GA Bore size (mm) Standard stroke (mm) H J K L MM ML NN PW Q R S T V W X YY YL Z TA TB U Over 20 st 20 st 20, 30, 40, 50, 75, 100, 25 M6 x 1.0 15 9 47.5 37.5 12 30 35 88 21 21 32 14 2 42 M6 x 1.0 15.5 26 70 38 86 2 62 76 M6 x 1.0 56 10 125, 150,

Air Slide Table

75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10 20 20 20 20 20 20

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

Base Mounted Metal Seal/Rubber Seal Series VQ

(Except L kit) Indicate R for the valve with external pilot.

CLA

DIHerMI 15 90 ,00 11 0 With 2 surface D-85 sWitches Same 75 90 '00 surface 110 D-B6 DiHerem jS+5~ go+l ~ D-GS l DO+'~r" 110... 10~ D-KS With n surface .1'1::1 .2,3,4 ... nz4.8.12. n= ...,e.l :t: n=o4,a .I 2..18. swifches Same 75..SO(~) 90+50/11-2) HlOo..so;.21 110+50 (n-2) I surface n",2,3,4, .. ~, "' .S.8 1"O:2.4,6.L n--2,4 ,6.8 ...

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Prevents Micro-Bubbles

LVA LVH A R P 3 port N.C. PA LVD N.C.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2 @7 t y o u @8 r #2 @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 No. !8 !

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Electric Actuators

6N q w e r t y u i o !

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

Vacuum Unit

pages 11 and 12, and r on page 13.)

Table of Contents

Male thread type Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Part no.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

from both sides of R port.

Modular Type Filter Regulator Series AW

r r u u u Drain Drain Drain Parts list Material No.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

CKZ2N

Bore size A002 C A A001 50 63 80 Equivalent to 50 mm Equivalent to 63 mm Equivalent to 80 mm L arm L side position R arm R side position Cylinder port Nil TF NPT G Arm mounting position (A, B, C, D) Note 1) See below Arm Mounting Position. Arm Mounting Position: A, B, C, D A B C D Arm opening angle 30 45 60 75 90 105 120 135 30 45 60 75 90 105 120 135 denotes tool attachment surface.