Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

LEKF-OMZ0035

AC servo motor Motor typeV*) Model LEKFS25V6 LEKFS32V7 LEKFS40V8 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000 500 601 to 700 700 420 210 930 620 310

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Bore size Stroke H G (Shock absorber stroke) S T W SD TT E Shock absorber EA h EY Stroke adjusting unit EC FA MY2H16 W Applicable cylinder MY2H16 MY2H25 MY2H40 TT 5.6 (MAX. 12) 7.1 (MAX. 18.6) 10 (MAX. 6) SD 6.7 17.7 Shock absorber model RB1007 RB1412 RB2015 E 14.4 17.5 25 h 6 6 EA 7 8.5 13 EC 6 9 13 EY 27 36 57 FA 12.5 19.3 17 S 46.7 67.3 73.2 T 7 12 15 W 23.5 25.8 38 8-13-27 28 Series

RHC

15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500 24.5 = 0.7 3/8, 16 1/2, 16 3/4 3/4 3/4 3/8 1/2, 16 3/4 3/4 3/4 3/4 1000 1500 2000 2500 3000 500 1000 1500 2000 2500 3000 48.5 150 CEP1 80 72.5 96.5 0.5 120.5 100 0.1 0.3 CE1 106 38 50 CE2 75.5 113 100 110.5 ML2B 0 138

Support Guide/11-LEFG Series

L4 1000 1000 1000 1000 X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Air Cylinder

Not applicable for types: Double rod (W), Trunnion (T), XC8, XC9, XC10, XC11, Over sized rod (XB5) with front mounts.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Selection Example: Load Extended Horizontally 400 80 350 w Selection conditions Mounting: Horizontal extension Maximum speed: 500 mm/s Operating pressure: 0.6 MPa Load mass: 200 kg 300 Load mass m (kg) 250 63 200 Since the conditions are horizontal extension with a speed of 500 mm/s, use graph (5).

AC Servo Motor Driver (CC-Link Type ）

(b) Connection of driver and servo motor 1) The servo motor power supply terminals (U, V, W) of the driver match in phase with the power input terminals (U, V, W) of the servo motor. Servo amplifier Servo motor Driver U U V V M W W 2) The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

CP95

40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600

CP95

40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600

4-channel Flow Monitor ( compatible)

(page 72) Y S16 0x01F4 1 R/W (500) H_1 (Setting of OUT1 hysteresis) Setting of OUT1 hysteresis. (page 72) Y U16 0x0032 2 R/W (50) P1L (Lower limit of the OUT1 window comparator) Setting of OUT1 lower limit of window comparator. (page 72) Y S16 0x012C 3 R/W (300) P1H (Upper limit of the OUT1 window comparator) Setting of OUT1 upper limit of window comparator.

Electric Actuator / Low profile slider type

Note 3) 50 52 Standby power consumption when operating (W) Note 4) 44 44 Momentary max. power consumption (W) Note 5) 123 127 Type Note 6) No excitation operating type specification Holding force (N) 36 Lock Power consumption (W) Note 7) 5 Rated voltage (VDC) 24 10% Weight Stroke(mm) 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 (1100) 1200 (1300) (1400) 1500 (1600) (1700

Mechanically Jointed Rodless Cylinder Series MY2

. 18.6) 10 (Max. 26) T 6 7 12 S 40.8 46.7 67.3 h 4 5 6 FA 12.5 19.3 17 EY 27 36 57 EC 6 9 13 W 16.5 25.8 38 EA 7 8.5 13 E 14.4 17.5 25 Shock absorber model RB0806 RB1007 RB1412 MY2H MY3A MY3B MY3M Heavy-loaded shock absorber H Bore size Stroke MY2H G (Shock absorber stroke) S T W SD TT E Shock absorber EA h EY Stroke adjusting unit EC FA MY2H16 W Applicable cylinder MY2H16 MY2H25 MY2H40 TT

MY2

) 7.1(MAX 18.6) 10 (MAX 26) T 6 7 12 S 40.8 46.7 67.3 h 4 5 6 FA 38.5 56.4 67.8 EY 27 36 56.5 EC 6 9 13.5 E 14.4 17.5 25 EA 7 8.5 13 W 16.5 25.8 38 High load shock absorber MY2C Bore size Stroke H G T S (Shock absorber stroke) E SD TT EY EA EC Stroke adjusting unit h Shock absorber FA W Applicable cylinder MY2H25 MY2H40 SD 17.7 Shock absorber model RB1412 RB2015 FA 56.4 67.8 h 6 6 W 25.8

CLS

4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

Vacuum System Peripherals:

Nil DC: 1 W (With indicator light: 1.05 W) None With light/surge voltage suppressor (Possible only solenoid valve connector type.)

SYJ300/500/700

Applied voltage 24 V 0 V Standard With power saving circuit 0.4 W 0.1 W 0 W 62 ms 4-4-58 59 Series SYJ300/500/700 Specific Product Precautions 4 Be sure to read before handling. Surge Voltage Suppressor How to Use DIN Terminal Caution (There is no S type because the generation of surge voltage is prevented by a rectifier.)