Symbol: 155R (3 Port, Universal), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1U (1/4-28UNF, PVDF), Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 155R (3 Port, Universal), Function: Y (Standard w/Power Saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 155R (3 Port, Universal), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1U (1/4-28UNF, PVDF), Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 155R (3 Port, Universal), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 155R (3 Port, Universal), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1 (M6, PVDF), Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 155R (3 Port, Universal), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1U (1/4-28UNF, PVDF), Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 3 Port, Universal, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Standard w/Power Saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1/4-28UNF, PVDF, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Standard w/Power Saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1/4-28UNF, PVDF, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: M6, PVDF, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 3 Port, Universal, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1/4-28UNF, PVDF, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Table of Contents

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Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Note Description SY940 M2: 0.15Nm M3: 0.6Nm M4: 1.4Nm SY5000-27-1*-Q Rc 1/4: SY7000-27-1*-Q Rc 3/8: SY7000-27-2*-Q SY3000-27-1*-Q Rc 3/8: SY9000-27-1*-Q Rc 1/2: SY9000-27-2*-Q 6 Die-cast aluminum Sub-plate *Thread Pilot valve assembly Refer to "How to Order Pilot Valve Assemblies" on page 1.2-32.

ZP

-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H Model A B C D 2 E F G H J K Vacuum inlet direction q Pad dia.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.

CATALOG

37 42 15 21 24 7 10 17 14.5 5 28 5 14 6 12 6h9 -0.03-0 3 Part No P Q R SA SB SC TB UA UB VA VB WA MHS3-16D M3x0.5 6 25 3.4 6.5 8 5 M3x0.5 4.5 2H9 0~0.025 2 17H9 0~0.043 MHS3-20D M5x0.8 7 29 3.4 6.5 9.5 6 M3x0.5 6 2H9 0~0.025 2 21H9 0~0.052 MHS3-25D M5x0.8 8 34 4.5 8 10 6 M4x0.7 6 3H9 0~0.025 3 26H9 0~0.052 Part No XA XB MHS3-16D 2H9 0~0.025 2 MHS3-20D 2H9 0~0.025 2 MHS3-25D 3H9 0~0.025 3

Table of Contents

Pressure 0.7 MPa PM: Raised up to 0.43 MPa 6 x 6 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 10 pcs. Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs.