Standard (mm) Bore size (mm) Stroke range (mm) A B C D E F G H I J K1 K2 L M N Q W Z Th9 P 12 16 20 25 0 0.043 37.2 30.2 6 6 25 10 1.5 M3 x 0.5 32 5.2 5 3.5 15.5 3.5 15 15 M5 x 0.8 5 to 30 0 0.052 38 31 20 8 8 29 10 1.5 M4 x 0.7 38 6 6 3.5 3.5 15 20 M5 x 0.8 5 to 30 0 0.043 25.5 17.5 43 34 7 10 36 9.5 2 M5 x 0.8 47 8 8 4.5 5.5 13 M5 x 0.8 5 to 50 0 28 19 47 37 12 12 40 11 2 M6 x
IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.
Valve + Interface regulator (ARBQ5000-00 A B C -1 5) q AXT632-25-6 (M4 x 114) 4 w AXT632-66-1 (M4 x 64) 2 Not necessary when mounting the sub-plate. q AXT632-25-4 (M4 x 50) 4 q w Blanking plate Blanking plate (Top) + SUP stop valve (Bottom) For manifold Spacer w AXT632-25-10 (M4 x 34) 2 + Individual EXH (Bottom) (Top) Valve + Individual SUP (Top) (Bottom) q AXT632-25-6 (M4 x 114) 4 For manifold
P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.
6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !
8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
Refer to table q for configuration. Table w Voltage-Electrical Entry-Options Table q Port/Orifice Size Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) Class B Class H G C Orifice size (No.)
0 For output 0 V For output +24 V PNP output q w Functions 1 0 4 1 2 3 8 5 6 7 9 Description CN3 No.
to 29 6 to 29 6 to 49 6 to 49 6 to 99 6 to 99 11 to 99 11 to 99 (mm) ( ): Denotes the dimensions of auto switch type.
7 @9 @6 !8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 q w !2 !1 !
AD48 AD48N(6) AD47 AD47N(6) AD48 AD48N(6) AD38 AD38N(6) (5) N.O.
q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.
Refer to manifolds ordering. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 @1 @6 @5 Cable 0.3mm2 x 25C O.D. 1.4 !
P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.
A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.
6 CK1 !1 u t !5 CLK2 !0 o q i @2 @9 #1 @4 @5 #1 @6 #0 @1 @8 !3 @3 @7 !9 @0 !2 !7 !8 t !7 !6 y Enlarged drawing of shim part !
5 4 3 2 1 8 7 6 5 4 3 2 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Station 1 Station 1 Station 1 Station 2 Station 2 Station 2 Station 3 Station 3 Station 3 Station 4 Station 4 Station 4 COM. (+) 9 () () Station 5 Station 5 COM. (+) 10 (+) (+) (+) (+) (+) (+) (+) (+) Positive common Negative common Station 6 Station 6 Station 7 Station 7 Station 8 Station 8 * When using a valve with no polarity
Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.