Rubber seal 5 Port Solenoid Valve Series SYJ5000

(with connector and 2 of sockets only) Rated voltage Lead wire length 5 24 VDC Nil 300 mm 6 12 VDC 6 600 mm Electrical entry V 6 VDC 10 1000 mm Grommet, 300 mm lead wire G S 5 VDC 15 1500 mm Grommet, 600 mm lead wire H R 3 VDC 20 2000 mm L With lead wire 1 100 VAC 50/60 Hz L plug 25 2500 mm LN Without lead wire 2 200 VAC 50/60 Hz connector 30 3000 mm LO Without connector 110 VAC 50/60 Hz

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

Refrigerated Air Dryers

Wall *1 For air-cooled type, leave a space of at least 600 mm between the heat exhausting surface and the wall. For water-cooled type, leave a space at least 600 mm between the facility water piping side and the wall. Leave at least 600 mm on the sides indicated with .

3 Port Solenoid Valve Rubber Seal Series SY100 1

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

3

500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Slotted locking type, Knob locking type SY5000 Manual override Response time ms (at 0.5MPa) Main valve/pilot valve common exhaust type Pilot exhaust Type of actuation Without surge voltage suppressor With surge voltage suppressor Not required Lubrication Types R, U Types S, Z Unrestricted Mounting orientation 2 position single 19 or less 26 or less 19 or less Impact/Vibration resistance m/s2

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.

Rotary Table/

Do not drop, bump or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.

V

Ambient & Fluid Temperature -10 ~ 50C A Clean Room version is available to specified Lubrication Not Required order Manual Override Non-Locking Push Type Shock Resistance/Vibration Resistance 150 / 30m/s2 Mounting Orientation Free The VQD1000 is used either on a Single SubEnclosure Dust Proof base or Manifold Mounted.

Compact 5-Port Solenoid Valve

Made to Order Manifold Exploded View 16 20 25 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 32 40 50 63 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 ZK2 Combination Manifold 100 Fittings, Replacement Parts, Tools 0 100 200 300 400 500 600 700 800 Average speed [mm/s] Manifold Options Specific Product Precautions * Values at extension of a directly coupled

Aluminum High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1.

Modular F.R.L. Units

Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-A AFD40-A P1=0.5 MPa P1=0.3 MPa 0.04 0.04 P1=0.7 MPa P1=0.3 MPa P1=0.7 MPa P1=0.5 MPa 0.03 0.03 Pressure drop [MPa] Pressure drop [MPa] 0.02 0.02 P1=0.5 MPa P1=0.5 MPa P1=0.3 MPa P1=0.3 MPa P1=0.7 MPa 0.01 0.01 P1=0.7 MPa 0 0 0 0 100 200 300 500 400 600 200 800 1000 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 57 Mist Separator

V100

Lead wire length 2000 mm -+ Socket Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lead wire Connector Hook For DC V114-5LO SY100-30-4A-20 For AC V114A-1LO SY100-30-1A-20 2.

Vacuum Unit

.: 1.4 mm Vibration resistance1 30 m/s2 Without pressure sensor/switch With pressure sensor 20 m/s2 With pressure switch Impact2, 3 resistance 150 m/s2 Without pressure sensor/switch With pressure sensor 100 m/s2 With pressure switch Standards CE marking, RoHS 4 Refer to the Valve assembly on page 32 for the valve model number. 5 ZK2-VAmR: After instantaneous energization of the supply valve

Rotary Table

Warning Do not drop, bump or apply excessive impacts (300m/s2 or more for reed auto switches and 1000m/s2 or more for solid state auto switches) while handling. Although the body of the auto switch may not be damaged, the inside of the auto switch could be damaged and cause malfunction. Observe the proper tightening torque for mounting an auto switch.

ZR

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

0.4

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

MVGQ

Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications