1

OB PA PB S WA WB X YY YL Z R T Bore size (mm) Bore size (mm) Bore size (mm) 110 110 60 60 WA WB Q PW RA U VA VB WA WB Over 200 st to 300 st Over 300 st Over 25 st to 100 st 25 st Over 100 st to 200 st Over 200 st to 300 st Over 300 st Over 25 st to 100 st Over 100 st to 200 st 25 st Over 300 st Over 25 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 25 st or less Over 300 st Over

Metal Seal/Rubber Seal Series VQ Body Ported

(One label for each) D side U side SUP/EXH block bush assembly SUP Block bush assembly 5(R1) 1(P) 3(R2) D side U side R1 P R2 VVQ1000-87A-B-50 Shut off label 7.8 ~ =6.5 2(B) 4(A) 2(B) 4(A) When ordering a block bush incorporated with the manifold, a block indication label is attached to the manifold. 2.8 10.5 R P R R P R R P R SUP passage blocked EXH passage blocked SUP/EXH passage

CRB2/CRBU2/CRB1

Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1

Electric Slide Tables

Weight Step Motor (Servo/24 VDC), Servo Motor (24 VDC) Common Basic type/R type, Symmetrical type/L type In-line motor type/D type Model LESH8 (A) LESH16 (A) LESH25 (A) R L R L R L LESH8D(A) LESH16D(A) LESH25D Stroke [mm] Product weight [kg] 50 0.55 75 0.70 0.76 50 1.15 100 1.60 1.71 50 2.50 2.84 100 3.30 3.64 150 4.26 4.60 50 0.57 0.63 75 0.70 0.76 50 1.25 1.36 100 1.70 1.81 50 2.52 2.86

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

LTF6 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% Load 50% 1000 10 Amount of deflection (m) Amount of deflection (m) 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 Load point distance (mm) 100 1000 Load point distance (mm) LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% Load 50% 1000 10 Amount of deflection (m) Amount of deflection (m) 100 1000 10 100 1 No load

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

Flange B O R E S I Z E 10 16 P O R T L O C AT I O N O N H E A D C O V E R S T D S T R O K E/H U N D R E D T H S O F A N I N C H R In-Line Perpendicular 10 (3/8) 050. 100. 150, 200 16 (5/8) 050, 100, 150, 200, 300, 400, 500 A C T I O N S Spring Return T Spring Extend T E C H N I C A L SPECIFICATIONS Fluid Air Proof Pressure 1MPa / 145 PSI MaxImum Operating Pressure 0.7MPa / 100 PSI Minimum

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Aluminum High Vacuum Angle Valve

, 160 XLG q t y w e r u e Pilot port direction w Flange type q Flange size Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear flange surface Right flange surface Size 16 25 40 50 63 80 100 160 Symbol Applicable flange 16, 25, 40, 50 63, 80, 100, 160 63, 80, 100, 160 Type Rear flange surface Nil KF (NW) Right flange surface Left flange surface D K (DN) E H V I G L H

5-Port Solenoid Valve

0 Manual override q w r e t y u i o !0 !

LJ1H

Direct Acting Ground Ball Screw 100 W 12 mm/12 mm lead Guide Series LJ1H10 How to Order 300 LJ1H10 F R 2 A1 PB S2 Auto switch Nil Without switch 1 2 3 4 5 6 NPN, A contact 1pc.

AS

(UL standard V-0) 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control 8 1000 1000 100 100 0 0 LEC-MR-J3BAT MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A + Stroke 7-6-17 18 Series CQ2/CDQ2 Dimensions: 63 to 100 Both Ends Tapped Style Basic style (Through-hole) Both ends tapped style: CQ2A/CDQ2A R R O1 thread Bore size (mm) R O1 63 80 100 M10 x 1.5 18 22 22 M12 x 1.75 M12 x 1.75 H thread effective depth C Q F 2-P 4-N Through-hole 8-O counterbore U (Port size) I D 22 11 M E Z Minimum lead wire bending radius 10 Auto switch D-A7, A8 With Boss

LEC-OM02704CN

5000.0 PB33 VRF1B 100.0 Hz 0.1 PB022 PB261 100.0 PB34 VRF2B 100.0 Hz 0.1 PB022 PB261 100.0 PB35 0.00 PB36 0.00 PB37 100 PB38 0 PB39 0 PB40 0 PB41 1125 PB42 1125 PB43 0004h PB44 0h PB45 0h 15 86 15 15.11.3 (PC) (1) PC01 0h PC02 *ZTY 0h PC03 *ZDIR 0001h PC04 ZRF 500 r/min PC05 CRF 10 r/min PC06 ZST 0 m PC07 0 PC08 1000 PC09 100 PC10 15.0 PC11 CRP 0 pulse PC12 JOG JOG 100 r

Magnetically Coupled Rodless Cylinder

Centralized piping on right R R L L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

SYJ300/500/700

R port.

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control LEC-MR-J3BAT 8 1000 1000 100 100 0 0 MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

-r---r r-' !I -,zr n r y'~[ ~ ~I~@ ~ u Ll L4JE ItAII co ... ,,!