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Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MQQ M RHC MK(2) No load No load Load ratio Load ratio RS Q G RS H A Bore size (mm) Bore size (mm) Bore size (mm) RZQ CCVL20/21/22/23 CCVL02 CCVS30/31/32/33 Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MI W S CEP1 CE1 CE2 No load No load Load ratio Load

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Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MI W S CEP1 CE1 CE2 No load No load Load ratio Load ratio ML2B C J G5-S Bore size (mm) Bore size (mm) Bore size (mm) CCVL10/11/12/13 4.

AC Servo Motor Driver (Network card type ）

Prepare a network card (LEC-S-N). Network Network card EtherCAT LEC-S-NE EtherNet/IP LEC-S-N9 PROFINET LEC-S-NP 1 2 1.

VQ4000

OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) Mitsubishi Electric Corp.: CC-LINK System Note 2) BB Note) Add 2 stations for serial unit mounting.

MY1

Piston speed (mm/s) Piston speed (mm/s) 1.

HRX-OM-T002

If it is a shorter operating time, there is a possibility of accidental breaker trip due to the internal motors inrush currents of this product. 4h 2h 1h 10min 14min 20min 30min 4min 6min 2min 1min 30 s Operating time 20 s 10 s 5 s Max. 2 s 1 s Min. 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 600 5000 7000 Current (% for breaker capacity

Air Cylinder Series MB

500, 600, 700, 800 Oversized rod cylinder XB5 125 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (150C) XB6 Intermediate strokes are available.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

upward mounting with a speed of 500 mm/s, use graph (2).

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92 125 139 11/4 3/4 7 20 2 46 185 0 29 93 60 183 180 144 185 202.5 L dimension 600 700 800 Effective oil level stroke (mm) 50 100 200 300 400 500 CCT63-l 228.5 278.5 378.5 503.5 603.5 728.5 s s s CCT100-l 286 386 511 611 736 836 s s s CCT160-l 399 524 624 749 849 949 1049 s s * Hexagon socket head cap screw is used for mounting.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

of 500 mm/s, use graph (2).

HRX-OM-R026

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRSH Series 3.3Installation 3-25 HRX-OM-R026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

CXS

30 to 800 mm/s 30 to 600 mm/s MX Rubber bumper on both ends 0 to 5 mm compared to the standard stroke M3 0.5 M5 0.8 Rc (NPT, PF) 1/8 MTS The maximum piston speed shown in the table above is for extension.

CXS

30 to 800 mm/s 30 to 600 mm/s MX Rubber bumper on both ends 0 to 5 mm compared to the standard stroke M3 0.5 M5 0.8 Rc (NPT, PF) 1/8 MTS The maximum piston speed shown in the table above is for extension.

SV

0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable related components Applicable related components

Valve Single Unit

A: Orange B: Green (Light/Surge voltage suppressor) Manual override G: 300 H: 600 (Lead wire length) (Press and turn for the locking type.)

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Slider Type/Ball Bushing Bearing

Horizontal Operation (Wall mounting) CY1L40 Model 10 (2.48 1.3 x 103 x ST) = 50 Note) Calculate with = 1 for all applications up to 10 300 mmST, 15 500 mmST, 20 500 mmST, 25 500 mmST, 32 600 mmST and 40 600 mmST.

0.55

300 mm H: Lead wire length 600 mm DC Without light/ surge voltage suppressor Note) There is no S option for AC mode, since a rectifier prevents surge voltage generation.

Cylinder with Lock Series MNB

B2 H S + Stroke ??