AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

C S S Motor Type S AC Servo motor AC Cable Content Cable Length (L) [] SSCNET Cable S 0.15m L 0.3m K 0.5m J 1m 1 3m 3 c I/O Connector -CS Driver Type LECSS S *LE-CSNS is 10120-3000PE (Connector)/ 10320-52F0-008Shell kitof Sumitomo 3M Limited or equivalent goods.

SFOD-OMT0005CN

Movement Speed Position Acceleration Deceleration Area 1 Area 2 In pos force Force speed force 2 2 mode mm/s mm mm/s mm/s mm mm mm Value mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () (1)No.

JXCx-OMT0062

Move mm/s mm mm/s2 mm/s2 mm/s mm mm mm 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped 59 - Details of step data Setting name Range Description No. 0 to 63 Number of the step data.

LECA6_C

M INPOFF BUSYON DRIVEOFF 100mm 60mm 50mm 0mm 5 INPON No.2 ON (OUT1ON) BUSYOFF 10mm 37 - 9.2 )100mm/s 100mm (No.1 ) 100mm ,10mm/s 50% (5mm) (INPON )50mm/s 50mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () No.1(IN0ON) DRIVEON No.1 DRIVE No.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

Dual Rod Cylinder Series CXSJ/CXS

l (mm) Graph (8) V = Up to 800 mm/s; Up to 30 st Graph (9) V = Up to 1000 mm/s; Up to 30 st 2 CXSM CXSL CXSM CXSL 1 1 Mass m (kg) Mass m (kg) 32 32 25 25 0.1 0.1 20 20 0 0.04 0 0.04 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (10) V = Up to 1000 mm/s; Up to 50 st Graph (11) V = Up to 1000 mm/s; Up to 75 st 2 2 CXSM CXSL CXSM CXSL 1 1 Mass m (kg) Mass m (kg) 32 32

IZx-OMP0064

0.2MPa 0.3MPa 0.1MPa 0.1MPa 0.3MPa 0.4MPa 8 8 Discharge time [s] 0.4MPa 0.5MPa 0.5MPa 0.2MPa Discharge time [s] s s 6 6 4 4 2 2 0 0 0 500 1000 1500 2000 0 300 600 900 1200 1500 mm mm Installation distance [mm] Installation distance [mm] 6-2.

JXCx-OMY0004

Movement Speed Position Acceleration Deceleration Force Value Area 1 Area 2 In pos force speed force mode mm/s (mm) mm/s2 mm/s2 (mm) (mm) (mm) mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0, 1 (E.g.) Flow chart Controller (1) Select/input Step No.1.

LECP6_C

mm mm/s mm/s mm mm mm mm/s 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 28 - TB No.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Move Speed Position Accel Decel PushingF TriggerLV PushingSp Moving F Area1 Area2 In posn mm/s mm mm/s2 mm/s2 mm/s mm mm mm 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped. 39 - Details of step data

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

A

www.stevenengineering.com I 5.15 AIR PREPARATION MODULAR TYPE ACCESSORIES SPACER H O W T O O R D E R S PA C E R D I M E N S I O N S S PA C E R Y10 (1000 S E R I E S) Y20 (2000 S E R I E S) Y30 (3000 S E R I E S) Y40 (4000 S E R I E S) Y50 (4000-06 S E R I E S) Y60 (5/6000 S E R I E S) Model A Applicable Model Y10 8 NAC100~NAC1040 Y20 10 NAC2000~NAC2040 Y30 11 NAC2500~NAC2540 NAC3000~NAC3040

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

JXCx-OMY0008

Movement Speed Position Acceleration Deceleration Force Value Area 1 Area 2 In pos force speed force mode mm/s (mm) mm/s2 mm/s2 (mm) (mm) (mm) mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0, 1 (E.g.) Flow chart Controller (1) Select Step No.1.

Compressed Air Cleaning Filter Series

P Q S R Drain cock Gray: N.C.

JXCx-OMY0006

Movement Speed Position Acceleration Deceleration Force Value Area 1 Area 2 In pos force speed force mode mm/s mm mm/s2 mm/s2 mm mm mm mm/s 0 1 Absolute 100 50.00 1000 1000 0 0 0 100 0 0 0.1 2 Relative 50 10.00 1000 1000 0 0 0 100 0 0 0.1 (E.g.) Flow chart Controller (1) Select/input Step No.1.

AZ1000

Vespel is a registered trademark of DuPont. 37 Single Stage Regulator for Ultra High Purity High flow Series AZ1300 For UHP gas delivery Flow capacity to 1000 slpm Body material: 316L SS Inlet pressure: Max. 300 psig (2.1 MPa) How to Order Port Number q w e r AZ13 S FV8 FV8 02 2PW Delivery pressure Code Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to

Servo Motor Controller (24 VDC)

MOD mm/s mm mm mm mm/s 2 mm/s 2 % % mm/s % mm 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 (1) Select/input Step No.1 (Turn on IN0) Controller (2) Turn on DRIVE input Parallel I/O signal Start moving to the position of Step No. 1 Signal Category Step No. output (OUT0 to 5) turns off (2)(5)(10)(13) DRIVE (3) INP output turns off (

EX120/121/122

EX500 AP Cable length (l) Connector specification 010 050 S A 1000 [mm] 5000 [mm] Straight Angle EX500 AC000 S M12 8 2 1 Straight connector type 3 7 16 M12 6 4 6 5 Plug connector pin arrangement 18 14.9 44.7 34 30 5 50 48 l 1 2 5 t Waterproof cap: M12 connector (for plug) 4 3 Use this on ports that are not being used for an M12 connector (plug).

Smooth Cylinder/Low Speed Cylinder

(1 mm/s for 16 or smaller) is achieved.