ZX

1(PV)(PS PD) PD PE PS Table (2) PV Part no.

4-channel Flow Monitor ( compatible)

0.00 to 3.70 PD 0 to 1000 0 to 1050 Flow L/min 0 to 200 0 to 210 200 L Flow gal/min 0.0 to 7.1 0. to 7.4 PD 0 to 1000 0 to 1050 Flow L/min 0 to 500 0 to 525 500 L Flow gal/min 0.0 to 17.6 0. to 18.6 PD 0 to 1000 0 to 1050 Flow L/min 0.40 to 4.00 0.25 to 4.50 4 L Flow gal/min 0.11 to 1.06 0.07 to 1.19 PD 100 to 1000 63 to 1125 Flow L/min 1.8 to 20.0 1.3 to 21.0 PF2D5 20L Flow gal/min 0.45

Digital Flow Switch (Integrated display type) ( compatible)

Relationship between flow rate and PD Relationship between temperature and PD -72No.PF-OMW0010-D Conversion formula of the process data and flow/temperature measurement value (1) Conversion formula from the process data to the flow/temperature measurement value: Pr = a (PD) + b (2) Conversion formula from the flow/temperature gauge measurement value to the process data: (PD) = (Pr b) /

Digital Flow Switch (Integrated display type) ( compatible)

Relationship between flow rate and PD Relationship between temperature and PD -74No.PF-OMV0006-B Conversion formula of the process data and flow/temperature measurement value (1) Conversion formula from the process data to the flow/temperature measurement value: Pr = a (PD) + b (2) Conversion formula from the flow/temperature gauge measurement value to the process data: (PD) = (Pr b) /

Multi-channel Digital Sensor Monitor ( compatible)

measurement value (PD) 0 to 4000 -400 to 4200 MPa 0 to 1.000 -0.105 to 1.050 kPa 0 to 1000 -105 to 1050 kgf/cm2 0 to 10.197 -1.07 to 10.71 1 MPa bar 0 to 10.00 -1.05 to 10.50 (1.0) psi 0 to 145.04 -15.2 to 152.3 Pressure gauge measurement value (PD) 0 to 4000 -420 to 4200 : The figure below describes the relationship between the measurement value (PD) and pressure value at Range: -101 kPa

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

PD port specification PV port location when the V port is viewed in front Right side Left side 5 Without PD port With PD port Ejector body gasket for manifold ZQ-3-005-10AS Note 2) Note 1) Refer to pages 15 and 16 for detailed description of How to Order. Note 2) 10 pcs. are included in one set.

ZQ-OM01401

(PE) (2 ) (P) (2 ) (4 ) (PV) PS 1 PD PD 2 EXH 2 10 - No.ZQ-OM01401-B 3. 3.1 3.1.1 () 1) (2x3.2) 2) (0.54~0.66Nm) 2 3.1.2 () 1) (ZQ1-BK1-A) (2x 3.2) (4x3.2) 2)0.54~0.66Nm 4 3.1.3 1) () PD M3 / PD M4 2 (PD 0.28~0.34Nm / PD :0.68~0.83Nm (4 ) (4 ) 11 - No.ZQ-OM01401-B 3.1.4 1 2 3 3.2 1) 2) () 3) ZFC 4)( ) 5) 6)CE / UKCA CE / UKCA 7) 8) 9) 10) 11) 12) 12 - No.ZQ-OM01401

LEC-OM02704CN

) (PA) () 1 (PB) (PC) LECSC(PD) (LSPLSN) 15 35 15 15.5.5 (DWELL) 15.5.6 15 36 15 15.6 (37) CC-Link (1) ON ( 3 ) CC-Link ( 1 ) CC-Link ON CC-Link ( 3 ) *2 ON ( 3 ) 2 2 OFF 1. 2.

Digital Flow Switch ( compatible)

Relationship between flow rate and PD -78No.PF-OMZ0002-A Conversion formula of the process data and flow measurement value (1) Conversion formula from the process data to the flow measurement value: Pr = a (PD) + b (2) Conversion formula from the flow measurement value to the process data: (PD) = (Pr b) / a Pr: Flow measurement value and pressure set value PD: Flow measurement value (process

Digital Flow Switch ( compatible)

Relationship between flow rate and PD -74No.PF-OMY0002 Conversion formula of the process data and flow measurement value (1) Conversion formula from the process data to the flow measurement value: Pr = a (PD) + b (2) Conversion formula from the flow measurement value to the process data: (PD) = (Pr b) / a Pr: Flow measurement value and pressure set value PD: Flow measurement value (process

PFxx-OMX0002

Relationship between flow rate and PD -72No.PF-OMX0002-B Conversion formula of the process data and flow measurement value (1) Conversion formula from the process data to the flow measurement value: Pr = a (PD) + b (2) Conversion formula from the flow gauge measurement value to the process data: (PD) = (Pr b) / a Pr: Flow measurement value and pressure set value PD: Flow measurement value

ZQ-OM01301

ZQ-OM01301-A Maximum vacuum release flow rate Vacuum release flow rates in product specifications and according to the V port size [L/min (ANR) ] Supply pressure error V Port [MPa] ZQ05A ZQ07A ZQ10A ZQ000A Size Common Individual Common Individual Common Individual Common Individual PD PD PD PD PD PD PD PD 3.2 0.1 16 14 11 23 0.2 26 23 19 38 0.3 39 31 35 28 29 22 52 43 45 39 47 41 38 35 66

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PD (Hexagon socket head plug) YH QQ PP QQ RR SS RR SS H NH NE NC PP TT TT GA GA UU UU Cushion needle M5 x 0.8 (Port) 2-M5 x 0.8 G G 2-M5 x 0.8 (Hexagon socket head plug) (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A Z + Stroke

PSxx-OMV0008CN

0 1450.4 -73 1523 (PD) 1000 5000 800 5200 MPa 0 16.000 -0.80 16.80 kgf/cm 2 0 163.15 -8.2 171.3 bar 0 160.00 -8.0 168.0 ISE78G psi 0 2320.6 -116 2437 (PD) 1000 5000 800 5200 ISE70G MPa (PD) PD [MPa] (PD)(ISE70G MPa) -65No.PS-OMV0008CN-E Pr = a (PD) + b (PD) = (Pr b) / a Pr PD a b [] a b MPa 0.00025 -0.25 kPa 0.25 -250 kgf/cm 2 0.00254925 -2.54925 ISE70G bar 0.0025 -2.5

Compact Vacuum Unit Ejector/ Vacuum Pump System

Port specifications Note 2) Common for PV and PD 1 Single unit (PV = PD) Separate for PV and PD 2 Single unit PV PD 3 Manifold No distinction Note 2) Names of the ports and functions are as follows. PV: Air pressure supply port (Ejector), Vacuum pressure supply port (Vacuum pump system) PD: Burst pressure supply port (Select the model with a release valve for (4).) 10 - Doc. no.

High-precision Digital Pressure Switch

PD measurement value The upper and lower limit values of the rated pressure value can be output compulsively as PD measurement value (process data). Press the UP or DOWN button to select the lower or upper limit value. : IO-Link mode can provide the communication function. : Refer to page 65 for details of the PD measurement value.

Digital Pressure Switch ( compatible)

PD measurement value (using the IO-Link communication only) The upper and lower limit values of the rated pressure value can be output compulsively as PD measurement value (process data). Press the or button to select the lower or upper limit value. : IO-Link mode can provide the communication function. : Refer to page 65 for details of the PD measurement value.

PSxx-OMV0003CN

0 1.6000 -0.105 1.680 kPa 0 1,600.0 -105 1680 Kgf/cm 2 0 16.315 -1.07 17.13 ISE71 Bar 0 16.000 -1.05 16.80 Psi 0 232.06 -15.2 243.7 (PD) 1000 5000 738 5200 ISE70 MPa (PD) PD [MPa] (PD)(ISE70 MPa) -62No.PS-OMV0003CN-G Pr = a (PD) + b (PD) = (Pr b) / a Pr PD a b [] a b MPa 0.00025 -0.25 kPa 0.25 -250 kgf/cm 2 0.002549 -2.549 ISE70 bar 0.0025 -2.5 psi 0.03626 -36.26 MPa 0.0004

Digital Pressure Switch ( compatible)

PD measurement value (using the IO-Link communication only) The upper and lower limit values of the rated pressure value can be output compulsively as PD measurement value (process data). Press the or button to select the lower or upper limit value. : IO-Link mode can provide the communication function. : Refer to page 63 for details of the PD measurement value.

High-precision Digital Pressure Switch ( compatible)

PD measurement value The upper and lower limit values of the rated pressure value can be output compulsively as PD measurement value (process data). Press the UP or DOWN button to select the lower or upper limit value. : IO-Link mode can provide the communication function. : Refer to page 62 for details of the PD measurement value.