MQQ

x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 28 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 With rod end male thread: MQQDM Rod end nut H1 Bore size

MQQ

x 1.0 7 18 10 5 M4 x 0.7 10 to 60 44 34 8 8 36 5.5 16 47 7 10 25.5 5.4 9 M6 x 1.0 7 19.5 10 6 M5 x 0.8 10 to 60 47.5 37.5 10 10 40 5.5 20 52 8 10 28 5.4 9 M6 x 1.0 7 23 10 49.5 7 M6 x 1.0 10 to 50, 75, 100 54 42 12 12 45 8.5 25 60 4.5 10 12 34 5.5 9 M6 x 1.0 7 26 10 57 10 M8 x 1.25 10 to 50, 75, 100 60.5 48.5 13 16 52 8.5 28 69 5 14 12 40 5.5 9 With rod end male thread/MQQ DM Rod end

Guide Cylinder Series MGG

Stroke Bracket Mounting Stroke Bracket mounting stroke Bore size (mm) 20 25 32 40 50 Bore size (mm) 20 25 32 40 50 Bore size (mm) 20 25 32 40 50 Stroke range (mm) Q O P R S T U V W X Y Z R Y 100 st or more M6 x 1 depth 9 1/8 12 12 26 12 82 48 40 39 71 157 14 79 250 to 400 125 st or more M6 x 1 depth 13 1/8 12 12 31 13 100 57 46 46 71 175 14 79 350 to 500 150 st or more M6 x 1 depth 13 1

Stability of suction position,

Core sheet XT661 D Seal Dimensions t d Material: Core sheet Rolled steel Seal NBR Part no. d B H Sales unit ZPNA-M6 M6 x 1 8 3 Dimensions 10 pcs. ZPNA-M12 M12 x 1.25 19 7 ZPNA-M14 M14 x 1 19 5 ZPNA-M16 M16 x 1.5 22 6 Part no. t D Applicable thread size ZP3EA-SW6 1.3 14 M6 x 1 ZP3EA-SW10 1.6 15.5 M10 x 1 ZP3EA-SW12 2 24.3 M12 x 1.25 ZP3EA-SW16 2 28 M16 x 1.5 H B 2 pcs.

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

MQQ

x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 28 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 With rod end male thread: MQQDM Rod end nut H1 Bore size

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

x 1 depth 9 45 25 95 80 82 M6 60 125 115 55 112 65 30 11 9 108 12 6.6 25 99 75,100,125,150,200 25 M6 x 1 depth 13 54 35 108 92 100 M8 70 150 134 135 65 75 35 13 16 9 130 9 30 109 75, 100 125, 150 200, 250 300 32 M6 x 1 depth 13 60 118 35 102 106 150 M8 80 134 140 73 16 85 40 16 9 135 129 9 35 40 M8 x 1.25 depth 16 75 50 150 134 134 M8 95 186 170 175 93 105 50 19 19 12 170 9 45 152 50 M10

CG1

Bore (mm) H TC TA ZZ CP95 35 11 147 20 M5 40 11 157 25 M6 X 0.75 C95 40 11 159 32 M8 X 1.0 50 12 187 40 M10 X 1.25 C92 58 13 218 50 M12 X 1.25 58 13 218 63 M14 X 1.5 CA1 Be sure to read before handling. Refer to p.0-39 to 0-46 for Safety Instruction and common precautions.

LG1H

x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 8H10 depth 10 LJ1 LG1 LC1 LX LC6D/LC6C Switches Encoder signal line Bending radius 80 Motor power line Bending radius 80 35 8H10 depth 8 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 300 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

adjuster at extension end) (Insert) Stroke adjuster at extension end KA 25 12 25 6.5 K NA x M6 x 1 thread depth 6.5 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 15 14 14 8 7.5 J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 15 Operating port 2 x Rc, G, NPT1/8 13 3 5H9 ( ) depth 5 +0.030 0 2 x M6 x 1 thread depth 6.5 5H9 ( ) depth 5 +0.030 0 HA GA NN x M6 x 1 thread depth 12 6

MHZ

MHZ 26 MHF 2-M6 x 1 thread depth 10 MHL (Mounting thread) 5H9 depth 5 +0.030 0 MHR 12 0.02 4-M6 x 1 thread depth13 (Mounting thread) MHK 12 0 0.1 Prepared hole dia. 5.1 through (Mounting hole) MHS MHC MHT 46 46 60 97 MHY 0.02 23 MHW MRHQ 34H9 depth 4 +0.062 0 0 0.5 +2.5 0 40 (49) 29 26 40 12 67 (76) Misc.

MHZ

MHZ 26 MHF 2-M6 x 1 thread depth 10 MHL (Mounting thread) 5H9 depth 5 +0.030 0 MHR 12 0.02 4-M6 x 1 thread depth13 (Mounting thread) MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 0 0.1 Prepared hole dia. 5.1 through (Mounting hole) MHS MHC MHT 46 46 60 97

MHF2

2.3 4 2-3H9 +0.025 0 depth 3 6 16 16 7.5 7.5 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 56 18 Series MHF2 Dimensions MHF2-20D1 Scale: 50% 66 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2-M6 x 1 thread depth 15 Mounting thread 6 99 6 Finger closing port M5 x 0.8 2-M6 x 1 thread depth 6 Mounting thread 114 62 84 33 E 13 25 25 30 41 E 0 -0.1 2-5.2 through (mounting

VQ7-6/7-8

AXT632-54-1 AXT632-54-2 AXT632-54-3 AXT632-54-5 AXT632-54-6 AXT632-54-7 AXT632-54-8 AXT632-54-9 AXT632-54-10 AXT632-54-11 Mounting bolt Size M6 x 45 with SW M6 x 18 with SW M6 x 55 with SW M6 x 85 with SW M6 x 100 with SW M6 x 105 with SW M6 x 125 with SW M6 x 140 with SW M6 x 145 with SW M6 x 160 with SW Option mounting diagram Interface regulator Interface regulator Double check spacer

Plate Cylinder

K H ZZ + Stroke (mm) A 22 26 30 35 35 AL 19.5 23.5 27 32 32 B 24 28 32 39 50 BS 37 45 44 54 53 BT M5 x 0.8 depth 7.5 M6 x 1 depth 12 M8 x 1.25 depth 13 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 BX 9 6.5 8 10 11 BY 7 8 9 9 12 C 54 68 86 104 124 D 12 14 16 20 20 ET M5 x 0.8 depth 11 M6 x 1 depth 11 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M12 x 1.75 depth 15 EY 26 42 54 64 72 GX 10 8.5 9 11.5 11.5

Low Profile Air Gripper Series MHF2

) MHS MHC Auto Switch Mounting Groove Dimensions MHT 52 24 MHY 2.3 MHW 4 2 x 3H9 +0.025 0 depth 3 6 -X 16 16 3 7.5 7.5 MRHQ 2 x M6 x 1 thread depth 6 MA (Mounting thread) Groove for auto switch mounting D25 56 465 Series MHF2 Dimensions MHF2-20D1 66 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2 x M6 x 1 thread depth 15 6 99 6 (Mounting thread) M5 x 0.8 Finger closing port 2 x M6 x 1 thread

VQ7-6/7-8

AXT632-54-1 AXT632-54-2 AXT632-54-3 AXT632-54-5 AXT632-54-6 AXT632-54-7 AXT632-54-8 AXT632-54-9 AXT632-54-10 AXT632-54-11 Mounting bolt Size M6 X 45 with SW M6 X 18 with SW M6 X 55 with SW M6 X 85 with SW M6 X 100 with SW M6 X 105 with SW M6 X 125 with SW M6 X 140 with SW M6 X 145 with SW M6 X 160 with SW Option mounting diagram Interface regulator Interface regulator Double check spacer

Stopper Cylinder

x 1 10 32 48 M6 x 1 10 40 52.5 M6 x 1 10 50 54 M8 x 1.25 14 O1 thread B + stroke R R * Dimensions other than those shown above are the same as the drawings above.

VQ7-6/7-8

AXT632-54-1 AXT632-54-2 AXT632-54-3 AXT632-54-5 AXT632-54-6 AXT632-54-7 AXT632-54-8 AXT632-54-9 AXT632-54-10 AXT632-54-11 Mounting bolt Size M6 x 45 with SW M6 x 18 with SW M6 x 55 with SW M6 x 85 with SW M6 x 100 with SW M6 x 105 with SW M6 x 125 with SW M6 x 140 with SW M6 x 145 with SW M6 x 160 with SW Option mounting diagram Interface regulator Interface regulator Double check spacer

Magnetically Coupled Rodless Cylinder

B Counter bore depth C 2-P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K Plug HS Q + Stroke G G HR CR Z + Stroke CY3R25, 32, 40 CY3R15, 20 (mm) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51