HRX-OM-X084

8.4.1 Replacing Particle Filters .8-13 8.4.2 Replacing the DI filter (Option DM) .8-13 8.5 Electrical schematic diagram . 8-16 8.5.1 HRR010-A/W-10.8-16 8.5.2 HRR010-A/W-20.8-18 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRR010-A-10/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-

IDX-OM-W026

T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-2 13-6 . 13-3 14 14-1 . 14-1 2 IDX-OM-W026 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W026 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W026 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDF Series i-2 i-3 IDX-OM-W026 i i 2 6 WARNING !

Step Motor Controller

Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.

Battery-less

140.5 32 20 to 100 220 263 128 13 60 69.5 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 61 8.5 1 73.5 116.5 32 101 to 500 250 293 158 40 20 to 100 242 285 128 13 60 69.5 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 61 8.5 1 95.5 138.5 32 101 to 500 272 315 158 6 Refer to page 70.

HRX-OM-W002

9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT . 9-14 9.6.3 HRR012/018/024/030-A/W-20-T . 9-15 9.6.4 HRR012/018/024/030-A/W-20-MT . 9-15 9.6.5 HRR012/018/024/030-A/W-20-T1 . 9-16 9.7 Required facility water flow (for water-cooled

Air Slide Table

13 14 Average speed Va (mm/s) Collision speed V (mm/s) 13 13 13 13 18 42 41 42 41 23 31 31 31 31 41 36 19 19 19 19 27 84 75 84 75 84 75 36 47 47 47 47 66 57 Note) Use the average speed when calculating static moment.

MXS

Buffer Specifications MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 Model Bore size (mm) 6 8 12 16 20 25 50 to 500mm/s (Horizontal mounting 50 to 300mm/s) Piston speed Buffer stroke (mm) 5 10 At 0mm stroke At max. stroke 3 5 10 13 17 21 Buffer stroke load (N) 6 8 13 17 25 29 Note) Refer to p.3.11-5 for cautions on buffer.

CNA

CXS JIS B4636 2 angle socket 10 10 40 M8 X 1.25in JIS B1181 class 3 JIS B4636 2 angle socket 13 13 CXT 50 JIS B4636 2 angle socket 13 13 MX rThe time period between the intermediate stop and the lock release should be 0.5 seconds or longer. If the duration of lock stop is not sufficient, piston rod may shoot out over the flow controls speed control capacity.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 22 24 Z ZZ G (NN 1) x H H 13 13 6.5 6.5 A B 3.2 6.5 7 7 15 1 4 3H9 depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) F 25 25 40 50 38 50 N 4 4 4 4 6 6 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 GA 17 12 33 43 43 83 HA 20 30 20 28 46 56 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 8 1 to 14 1 to 8 15 4 to 18 1.5 to 9 1.5 to 18 1.5 to 9 20 4.5 to 20 1.5 to 10 1.5 to 20 1.5 to 10 30 5 to 22 2 to 13 2 to 22 2 to 13 40 18 to 30 4.5 to 15 18 to 30 4.5 to 15 Size CRB2 CRBU2 X Y X Y 10 3 to 10 (19) 1 to 12 (3) 1 to 3 (12) 1 to 19 (10) 15 4 to 11.5 1.5 to 15.5 1.5 to 6.5 1.5 to 20.5 20 4.5 to 13 1.5 to 17 1.5 to 7.5 1.5 to

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

Electric Actuator with Integrated Guide

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

VQZ1000/2000/3000

or less 13 or less VQZ1220 0.13 0.26 0.54 0.13 0.20 0.54 Metal seal Double 10 or less 13 or less 13 or less VQZ1221 0.19 0.40 0.71 0.26 0.40 0.90 Rubber seal 20 or less 26 or less 40 or less VQZ1320 0.08 0.25 0.50 0.13 0.29 0.55 Metal seal Closed center VQZ1000 25 or less 33 or less 47 or less VQZ1321 0.18 0.39 0.68 61 0.23 0.38 0.87 Rubber seal 20 or less 26 or less 40 or less 3 position

Proposals for Energy Saving

Specifications are the same as those on page 3.4-13.

KJ

Note) D1: Max. diameter 15-4-20 13 Inch-size One-touch Fittings Series KQ2 Branch Y: KQ2U Applicable tubing O.D.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

holes) 2-3.2 (Mounting holes) 2-3.2 22 4 22 4 VS B A B A 11 VS7 2.5 17.5 11 2.5 17.5 A B A B (Lead wire length) 50.7 64.3 300 54.7[56] 52.6 [59.1] 300 (Lead wire length) 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P 13 13 5 5 10 10 10 10 5-M5 X 0.8 (Piping port) 5-M5 X 0.8 (Piping port) 14 14 14 14 15 15 [ ] for AC Other dimensions are the same as the grommet style. [ ]

Electric Grippers

34/13 28/15 11/7 Compact 22/12 8/7 Max. instantaneous power consumption [W] Note 9) Basic 61 57 51 19 Compact 42 14 Note 1) Gripping force should be from 7 to 13 times the workpiece weight.

ZP

13.9 SNJ-015A 16.2 14 3 M10 x 1 M14 x 1 SN-015A 21.9 19 5 Pad diameter: 10 to 50 ZP10B to 50B Model Size B06 A 6 ZP06B B 7 C 2.5 D 7 E F 13 G 3.3 H 9.1 Y 4 B08 8 ZP08B 9 2.5 7 13 4.7 10.1 4 B10 10 ZP10B 12 4 13 11.7 16 5.5 13.8 5.5 B13 13 ZP13B 15 4 13 14.2 18.5 8.7 19 7.5 B16 16 ZP16B 18 4 13 15.7 20 9.9 21 8.5 B20 20 ZP20B 22 4 15 19 23.5 12.4 25 10.5 B25 25 ZP25B 27 4 15 19.5 24 15.6

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

13 13 14 14 6 5.5 6 6 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Valve stations F: D-sub connector P: Flat cable connector (26 pins) Note Note Stations Stations Symbol 02 Symbol 02 2 stations 2 stations Note 1) Double wiring specification Double wiring specification ... ... ... ... ... 12 13 12 13 Connector mounting position 12 stations 12 stations 13 stations 13 stations Symbol D Mounting position Specified wiring Note 2) Specified wiring (up to 25 solenoids