Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

L1 + Stroke A1 + 2 (Stroke) Basic Style Bore size (mm) Stroke range (mm) H Q A S B U C V D E K L M N O 12 16 20 25 M3 x 0.5 6.5 depth 3.5 10.5 35.5 32.4 19.5 6 25 6 32 5 3.5 22 3.5 5 to 30 39.4 M4 x 0.7 6.5 depth 3.5 10 41.5 36 22.5 8 29 8 38 6 3.5 28 3.5 5 to 30 43 M5 x 0.8 9 depth 7 10.5 48 38 24.5 7 36 10 47 8 4.5 36 5.5 5 to 50 47 M6 x 1.0 9 depth 7 11 53.5 39 27.5 12 40 12 52 10 5 40

Table of Contents

3 5 4.5 24 4 4 4 33 33 33 (mm) I G 25 27 28 FY FZ 3 3 5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 0 0.030 0 0.030 0 0.030 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O P M3 x 0.5 M5 x 0.8 M5 x 0.8 Model MHS2-16D MHS2-20D MHS2-25D 4 5 5 5h9 6h9 6h9 2 2.5 3 11 13 14.5 VA 2H9 2H9 3H9 SC TB 5 6 6 RB 16 18 22 WA RA 18 24 26 VB 2

Air Slide Table

Pilot port side 27 Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ12C-10Z 28 17 11 32 46 11 32 82.5 4 2 62.5 75 MXQ12C-20Z 28 19 11 32 48 13 32 92.5 4 2 64.5 77 MXQ12C-30Z 38 21 11 40 58 15 40 102.5 4 2 74.5 87 MXQ12C-40Z 34 27 60 23 50 120.5 6 3 92.5 105 MXQ12C-50Z 34 11 37 39 60 23 60 130.5 6 3 102.5 115 MXQ12C-75Z 36 25 41 36 100 42 85 174.5 8 4 146.5 159 MXQ12C-100Z 36 14 66 36

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Smooth Cylinder/Low Speed Cylinder

4 6 21.5 4 6 6 4 8 1.5 [1] 6 3.5 6 3.5 22.5 10 7.5 10 25 7.5 2.5 10 7.5 4.5 3.5 [1] 7 5.5 7 5.5 24.5 11 9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

5

4 6 6 4 8 6 4 21.5 2 0 2 [4.5] 2 0 19 20 10 7.5 2.5 10 7.5 4.5 10 7.5 25 6 3.5 1.5 [1] 6 3.5 22.5 25 11 9.5 0.5 11 9.5 2.5 11 9.5 27 7 5.5 3.5 [1] 7 5.5 24.5 6.5 5 33 DNote 1) [ ]: Denotes the dimensions of the D-A93.

Table of Contents

Wall mounting z y P. 8-11-36 P. 8-11-6 MY1HT50-600 x y x z Wd: Workpiece (500 g) x 3. Ceiling mounting 4.

CL

6 !

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Table of Contents

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Free Mount Cylinder

4.5 4.5 19 21.5 23 Note) 5 stroke (CUW16-5D): GA = 14.5 Without auto switch With auto switch Bore size (mm) R SA W T Z 70 74 79.5 93 105 116 S 38 36 30 36 40 42 Z 70 74 69.5 83 95 106 S 6 10 16 20 25 32 38 36 40 46 50 52 7 9 12 16 20 24 6 6 7.5 9 9 10 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 13 16 16 19 23 27 11 13 Free Mount Cylinder Double Acting, Double

CM2

, refer to pages 6-4-21 to 6-4-22.

CL

6 !7 !8 !

Cylinder with Lock

6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

ISO Cylinder

15 12 10 7 6 16 10 12 M12 x 1.25 4 4 M5 x 0.8 8 12 5 28 14.2 M4 x 0.7 19 6 15 12 10 7 6 16 12 16 M16 x 1.5 6 6 M5 x 0.8 12 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 14 10 9 22 16 16 M16 x 1.5 6 6 M5 x 0.8 12 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 13 10 9 22 20 20 M22 x 1.5 8 8 G1/8 16 20 8 44 17 6 M8 x 1.25 32 11 24 22 11 13 12 24 25 22 M22 x 1.5 10 8 G1/8 16 22 8 50 20 8 M10 x 1.25 32 11 30 22 11

Speed Controller with

D1 D2 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric size Inch size TMH-23J TMH-01J 8.5 3.3 4.5 4.6 7.5 6 12 7.2 6.6 18 1/8J TMH-04J TMH-03J 9.4 4 5/32J TMH-06J 11.7 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 6J TMH-07J 12.1 1/4J TMH-06 13.1 4.3 7.1 7.2 11.1 10 20 11 10.6 26.5 6 TMH-07 13.5 1/4 TMH-08 TMH-09 15.5 8 5/16 TMH-10 18.8 4.3 9.5 9.6 13.5 14 28 14.2 14.6 34 10 TMH-12 21.2 12 TMH-13 22 1/

LX

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

2 Phase Stepper Motor/Without Motor Brake Series LXS

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 C Work piece mounting reference plane Refer to Cross section C-C. depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B (mm) Cross section C-C 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6

CM2

, #6, #19 CM2C32SCM232A, #6 SCM232A, #6, #19 CM2C40SCM240A, #6 SCM240A, #6, #19 The data shows auto switch equipped styles.

Air Cylinder

4 6 20 45 (53) 3 32 44 3 M8 x 1.25 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 38.5 17 16.5 10 40 6 31 M5 x 0.8 5.5 8 4 6 22 45 (53) 3 36 49 3.5 M10 x 1.25 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 45 17 20 12 40 6 38 M5 x 0.8 5.5 10 4 7 25 45 (53) 3 44 58 3.5 M10 x 1.25 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 54.5