Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

Air Cylinder Series CA2

4 4 1 0.5 0.5 1 7 2.5 4.5 12 10 0 0 4 0 1.5 9 8 3.5 6 4 3.5 1.5 1 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 3 8.5 7.5 6 5 4.5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 5.5 12 10 9.5 7.5 7 6 6.5 12.5 8 10 17.5 16 4 4.5 10.5 6 8 15.5 14 9 13.5 12.5 11 10 9.5 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 10.5 Note) Adjust the auto switch after confirming the operating conditions in

Series AP500

0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

JXCx-OMT0061CN

No.JXC-OMT0061CN CC-Link (DC24V) / LECPMJ 1 . 4 2. . 6 2.1 . 6 2.2 . 7 2.3 . 8 2.4 () . 9 1 . 9 2 . 9 3 . 9 4PLC . 9 5 . 9 6 . 10 7 . 10 8(). 11 9 . 11 3. . 12 3.1 . 12 3.2 . 13 3.3 . 14 (1) (LECPMJ-) . 14 (2) DIN (LECPMJD-) . 14 3.4 . 15 (1) . 15 (2) . 15 (3) . 16 4. . 17 4.1 (STATION NO.B RATE) . 17 4.2 . 18 4.3 PLC . 18 5. . 19 5.1 CN1: . 19 5.2 CN2CN3: . 19 5.3

Shock Absorbers and Rate Controls

/Tl9 Ffll7r-l2 2tE2140 PMl500 Seria 2.38 t.06 3.7 5 3.00 .34 2,16 .50 6 .38 N/A Vtt 12.0 or. j|tlt/'.17. .{ l 1 3 .3 r 1 .6 3 1 t.7 5 I.1 4 I l{ /r w 2.3lb. tfll%-t2 2t21293305PR0125/225 2.25 l.?5 2.1t 2.38 .23 1.tl .50 .90 .25 .88 *10 4.0 or. 1/A Al1 diriensions in it'ches. l.lotes: 1. PM21EO Z dinnsion is 2.6S in. 2, Shock ab.lorbr.must be orclered separately fom foot mount kit, 3.

CG1

Mounting 6/4 6/4 6/4 8/6 10/7.5 10/7.5 Applicable tube (mm) MB Applicable tube material Nylon, Soft nylon, Polyurethane Auto switch can be mounted. Refer to p.1.7-3 for other specifications.

Mist Separator

Structural Drawing, Option and Replacement Parts 10 6. Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-26 10-1. Bowl Assembly Replacement 23-24 10-2. Element Replacement 25-26 11. Disassembly Drawing 27 12.

Micro Mist Separator

Structural Drawing, Option and Replacement Parts 10 6. Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-26 10-1. Bowl Assembly Replacement 23-24 10-2. Element Replacement 25-26 11. Disassembly Drawing 27 12.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

REC

8 20 13 10 41 5 33.5 5 30 20 19 25 M10 x 1.25 Up to 700 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 32 M10 x 1.25 Up to 1000 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 19 40 M14 x 1.5 Up to 1000 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 30 NN P RR S U Z ZZ NA Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 9 146 14 217 226 30 25 M26 x 1.5 Up to 700 1/8 9 146 14 221 230

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation

5 Port Solenoid Valve SY Series

AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1

Fieldbus system EtherCAT compatible SI Unit

+10 V 1=-5+5 V 2=-20+20 mA 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080D (AXA) 40xA:01 40xA:02 Channel 0 Channel 1 (Analogue range) 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080E (AXB) 1: x = Unit No.

Lubricator

AL-OMX0056-A PRODUCT NAME Lubricator MODEL / Series / Product Number AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-D AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)06(B)(-2,3,6,8,R,W,Z)-D AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,W,Z)-D AL60-(F,N)10(B)(-2,3,6,8,R,W,Z)-D Contents Page 1. Safety Instructions 2-6 2. Application 7 3. Standard Specifications 7 4.

2/3 Port Valve for Various

) $ % *%+ * ,* VX021-003BTZ-05 Coil Combination Made to Order Specifications . / / 0 1 " 1 / / 2Splashproof Specifications ( ) ) @" A ) "=A" 1 ( 5 % / / 33 1 '4 % ) 3 ) / & / / 0 5 % / / 5 % * ,* -5 % ) / *% 5 % *%+ * ,* -6 6 7 8 6 6 8 6 6 7 8 6 6 ) 9 9 9: 9; 79 79 79: 79; ! 6 6 6 !"# !9 !9 !9: !9; -/& ,* $ % *%+ * ,* -3$ < ) ( !

0.

Blanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 L Dimensions (mm) A Applicable fitting size d Model A L D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 D L DIN rail AXT100-DR-l 7.5 As for l, enter the number from the DIN rail dimensions table.

Vacuum Ejector Series ZM

Maximum Ejector Stations (Max. operable nos. simultaneously) Ejector model ZMA053 ZMA054 ZMA073 ZMA074 ZMA103 ZMA104 ZMA133 ZMA134 ZMA153 ZMA154 Manifold model R L 10 8 5 4 3 ZZMA Stations 06 10 10 8 6 5 ZZMA Stations 06B R L 10 8 5 4 3 ZZMA Stations 04 10 10 8 6 5 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

Ionizer Nozzle type IZN10 Series IZS

PNP output Nil NPN output Port size P Power supply cable 6 : Metric size 06 Nil 6.35 (1/4") : Inch size With power supply cable (3 m) 07 6 : Metric size (Elbow) With power supply cable (10 m) Z 16 6.35 (1/4") : Inch size (Elbow) Without power supply cable N 17 Cautions when using the IZN10-11(female threads for piping) Connect the various Made-to-Order nozzles or fittings & tubing to the