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a = 2000 Pitching Mep m m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 100 L1 0 10 30 20 Transfer load m (kg) 300 L2 200 Mer m Rolling Yawing 100 L2 0 10 30 20 Mer Transfer load m (kg) m 300 a = 1000 a = 500 200 a = 2000 L3 100 m Mey a 0 10 30 20 Transfer load m (kg) Refer to page 145 for deflection data. 98 99

Specifications Compressed air 1.0MP Fluid Max. operating pressure Through the adoption of an element that is used exclusively for removing water drops and the provision of ample housing interior space, a 99% water removal rate has been achieved.

1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 12.5 3 15 20 32 15 17.5 20 4 25 30 30 12.5 15 3 (mm) L Max. 32 Max. 31.5 20 Size 32 40 15 40 17.5 20 4 Possible to change the specification from standard to"-X5" 25 Specify the part number for hexagon socket head cap screw for angle adjustment referring to the list below. 30 30 Size

Y: 4.5 to 7 D: 6 to 8 78.3 2(A) 2(A) 63 19 (A port) Rc1/2 Stations L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 : With light/surge voltage suppressor ( ): Dimensions for external pilot 4-8-15

2 VVFS5000-3A-1 3-8-98 99 For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS6000 Model VK Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics (1) (2) (3) Max. operating cycle (cpm) Port size Rc Response time (ms) Type of actuation VZ Weight (kg

Note 3) When two or more symbols are specified, indicate them alphabetically. 2-5-27 Base Mounted 28 Series VQ4000 Kit (Serial transmission unit) for I/O S 23 75.5 Mounting hole for 2-M5 8 61.5 143 10 1.6 14.5 99 32 U side 8 (128.5) L2 (In the case of DI unit, 1pc: 8 number of inputs) Min. 0 to max 4 unit (0 to 216 mm) DI unit 54 SI unit P = 25 44 n B A 8 2 4 B A C12: One-touch fitting for

20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Manufacture of Intermediate Stroke Description Intermediate stroke range Bore size (mm) 12, 16 20, 25 32 40 to 100 Intermediate stroke range (mm) Spacers are installed in a cylinder with standard stroke. 1 to 29 CUJ Description 1 to 49 Bore size (mm) 12 to 32 40 to 100 Available in 1 mm stroke increments 1 to 99

Note 2) In the case of socket equipped type. 26 5 14 5 M5 x 0.8 4.5 4 2 12 30 (40) 7.5 7.6 depth 6.5 15.5 68.5 (78.5) 29 33 42 5 5 5 16 20 24 6 8 10 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 9 9 13.5 4.5 4.5 4.5 16 20 24 36 (46) 40 (50) 42 (52) 9 9 10 9.3 depth 8 9.3 depth 9 11 depth 11.5 19.5 24.5 30.5 79 (89) 87 (97) 99 (109) 1259 Series ZCUK Vacuum Piping: Rod Piping/Rod End Shape: Pad

ZPY02U--A8 ZPY2004U 10 11 1 2 1.2 0.3 4 2.6 4.6 2 2.6 1.2 ZPY13UT ZPY04U--A8 ZPY3507U 13 14 3.5 1.8 0.5 7 4.3 7.8 4 4.8 1.6 0.8 1.5 ZPY16UT ZPY06U--A8 ZPY4010U 16 17 4 2 0.8 10 5 11 6 7 2.5 2.5 ZPY10CT 10 11 0.8 ZPY08U--A8 8 9 1 ZPY13CT 13 14 Dimensions by Stroke 1 ZPY16CT 16 17 4 tube 6 tube E F D Model G H J G H J ZPYU16--A8 63 15 37 ZPYU10--A8 94 40 15.5 2.5 7 12.5 1.8 5 ZPYU15--A8 45 99

Side flange style: CLQG/CDLQG Head Side Flange Style MLGP (mm) Stroke range Without auto switch With auto switch Bore size (mm) FD FT ML1C A A B B 36 46 43.5 53.5 53 63 91 101 107.5 117.5 126 136 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 FV 63 101 46 9 9 M 80 117.5 53.5 11 11 4 x FD G B + Stroke L FT FX FZ A + Stroke 100 136 63 11 11 Bore size (mm) FV FX FZ G L L1 M 63 80 100 80 99

Franklin Road Indianapolis, Indiana 46226 1-800-SMC-SMC1 (762-7621) www.smcusa.com US98-E464 12/99 Solid State Vacuum Regulator Series ITV2090/2091 Stepless control of vacuum pressure in proportion to an electric signal Able to operate with vacuum only Pilot air required by the previous series (IT209) is unnecessary Air consumption is approximately 0l/min (ANR) (when balanced) Two types of

If the min. display unit is 1 [kPa], display indicates in each 1 [kPa] (by [kPa]) i.e. 0, 1, 2, 3 . . . 99, 100 [kPa]. Protective construction Refer to Technical Information on page 16-13-13. Minimum setting unit (digit) The least possible unit to set pressure value on the digital pressure switch.

R Pilot port Sensor (breathing) port Rc 1/8 (NPT 1/8) Pilot port LQ1 integral fitting 1/8 (3), (4) Rc 1/8 (NPT 1/8) Pilot port A B SMC A B SMC LVQ S-S Dimensions (N.O. valve, double acting valve) 2 1 (mm) A B C D E F G H J K L M N P Q R W Model LVQ2 S-S07 LVQ3 S-S11 LVQ4 S-S13 LVQ5 S-S19 LVQ6 S-S25 2 1 25.5 46 31.5 58 33.6 81 12 92 21.8 37 5 7 15 31.3 21 25.3 64 2 1 23.5 47 29.5 59 45.4 99

Operating Fluid and Ambient Temperature Tightness of Valve (Leakage Rate) NBR, FKM, EPDM Seal material Leakage rate (With water pressure) 0.1 cm3/min or less Operating fluid temperature (C) Solenoid valve option (symbol) Ambient temperature (C) Power source Nil, G, L E, P 1 to 99 1 to 60 1 to 40 20 to 60 20 to 40 AC DC Note) With no freezing 3 4 Direct Operated 2 Port Solenoid Valve Series

VX3235-00 VX3335-00 3 1.1 0.25 0.27 AC DC 60 40 1 99 60 120 183 Maximun VX3245-00 40 1.6 0.20 0.38 4 20 VX3345-00 Minimum AC, DC Ambient temperature (C ) 40 10 Operating fluid temp.

Model Power source Frequency (Hz) 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 AC VXD21 DC AC VXD22 DC AC VXD23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil (3) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC

Hz) 50 20 (32) 11 60 17 (28) 7 Model Power source AC VXP21 DC 50 40 18 60 35 12 AC VXP22 DC 50 50 21 60 45 17 AC VXP23 DC 4 5 6 7 8 9 Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99

ACCESSORIES M A N I F O L D T Y P E 41 B O T T O M P O R T E D DXT201-15-1A Blanking Plate Kit Stations (n) 2 3 4 5 6 7 8 9 10 L1 61 80 99 118 137 156 175 194 213 L2 49 68 87 106 125 144 163 182 201 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

Manifold Specification Sheets Dept. code 99 Date: Customer name Circular Connector Type Manifold Contact person 1 2 3 4 Series SV 000: Tie-rod base Cassette base Manifold Specification Sheet Follow procedures through . Specification sheet no. Purchase order no.

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com With unit switching function (1) Nil With vacuum pressure gauge Exhaust specifications SI unit only (2) M Note 1) W/ unit switching function is not permitted to sell for the domestic use in japan, because the new Weight and Measure Act has been implemented since October ,99