Size, Body, Valve Type: 10F (Size: 1; Body Mat'l: Aluminum; Port Size 1/4; Orifice Dia: 5, N.C.), Voltage and Electrical Entry: L (230VAC; DIN Terminal w/Surge Voltage Suppressor)
Size, Body, Valve Type: 10F (Size: 1; Body Mat'l: Aluminum; Port Size 1/4; Orifice Dia: 5, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Bracket Interchangeable with Old Type: XB, Electrical Entry: A (90°)
Size, Body, Valve Type: 10F (Size: 1; Body Mat'l: Aluminum; Port Size 1/4; Orifice Dia: 5, N.C.), Voltage and Electrical Entry: L (230VAC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Bracket Interchangeable with Old Type: XB, Electrical Entry: A (90°)
P1 P2 P1 P2 Vacuum source (Vacuum pump) Nozzle Nozzle Note) Since the calculated value may not meet the approximate value due to leakage and pressure loss in the piping system, please check the result by using actual equipment. 950 Flow Sensor Series PFMV5 How to Order PFMV5 05 1 Option (shipped together) Measurement flow range 05 10 30 05F 10F 30F Nil 0.0 to 0.5 l/min None With L-type bracket
Note) Refer to the Specific Product Precautions 2 on page 274. 242 D-sub Connector 10-SV Manifold Electrical Wiring 10F/16F D-sub connector type (25 pins) 13 Common Common 25 12 Station 11 SOL.b SOL.a 11 24 Station 2 SOL.b 15 SOL.a 2 Station 1 SOL.b 14 SOL.a 1 This circuit is for the double wiring specification with up to 11 stations.
Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 10F (Ø10), A Side Port Size: 03S (PT 3/8)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 02S (PT 1/4), A Side Port Size: 10F (Ø10)
Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 10F (Ø10), A Side Port Size: 02S (PT 1/4)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 10F (Ø10), A Side Port Size: 02S (PT 1/4)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 02S (PT 1/4), A Side Port Size: 10F (Ø10), Knob Color: R (Red)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 02S (PT 1/4), A Side Port Size: 10F (Ø10), Knob Color: R (Red), Bracket: L (L Bracket)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 03S (PT 3/8), A Side Port Size: 10F (Ø10)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 03S (PT 3/8), A Side Port Size: 10F (Ø10), Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 03S (PT 3/8), A Side Port Size: 10F (Ø10), Knob Color: R (Red)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 03S (PT 3/8), A Side Port Size: 10F (Ø10), Knob Color: R (Red), Bracket: L (L Bracket)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 04S (PT 1/2), A Side Port Size: 10F (Ø10)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 04S (PT 1/2), A Side Port Size: 10F (Ø10), Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 04S (PT 1/2), A Side Port Size: 10F (Ø10), Knob Color: R (Red)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 10F (Ø10), A Side Port Size: 02S (PT 1/4), Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 10F (Ø10), A Side Port Size: 02S (PT 1/4), Knob Color: R (Red)