Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ S Standard cable Cable color Connector D terminal no.

Base Mounted Metal Seal/Rubber Seal Series VQ

T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.

LEC-OM02704CN

S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1

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06 Thread type Nil Rc Plug-in VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.

MY1

Piston speed (mm/s) Piston speed (mm/s) 1.

AC Servo Motor Driver (CC-Link Type ）

AC200VAC230V 50Hz60Hz (2) Option Model a) Motor cable / Lock cable / Encoder cable A S C S M Connector Direction Motor Type A S Axis side AC Servo motor B Opposite axis side Cable Content Motor cable M Lock cable B Cable Length (L) [m] Encoder cable E 2m 2 5m 5 10m A Cable Type Standard cable S Robot cable R 1 12 1.

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(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)

Compact Hydraulic Cylinder

Order 100 M9BW CH D SD B 40 Magnet for auto switch Number of auto switches Series type Without Nil D Nil S n 2 pcs.

AC Servo Motor Driver (CC-Link Type ）

Power supply AC100VAC120V 50Hz60Hz AC200VAC230V 50Hz60Hz (2) Option Model a) Motor cable / Lock cable / Encoder cable A S C S M Connector Direction Motor Type A S Axis side AC Servo motor B Opposite axis side Cable Content Motor cable M Lock cable B Cable Length (L) [m] Encoder cable E 2m 2 5m 5 10m A Cable Type Standard cable S Robot cable R 1 12 1.

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

5 Port Solenoid Valve

Transmission System S (mm) VV5QC41 S Kit (Serial transmission kit: EX260) L2 (6.5) L1 39.5 (n1) x 25 Indicator light 65.5 25 Manual override 143 10 9 9 A B A A B A A B A B A B A A A A A A A 163 B B B B B SI unit n 1 2 3 4 5 6 7 Stations D side 8 U side 2 x Rc3/4 3 (R) port [Communication connector D-sub] 2 x Rc1/2 1 (P) port SMC SMC SMC SMC SMC SMC SMC SMC 101 95.5 77.5 76.7 76.7 15.7 15.7

Hydraulic

Symbol E F G H Nominal pressure 3.5MPa 7MPa 14MPa 14MPa Tube material Aluminum alloy Stainless steel Steel Stainless steel B C B-series rod size C-series rod size 32 is for B-series rod size only. CH2 H B B 50 100 CH D2 H B B 50 100 A53 With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.

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MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

Air Cylinder

CM3 S CM2 B 32 150 Z CG1 CG3 With auto switch M9BW S CDM2 32 B 150 Z JMB Number of auto switches Rod end bracket With auto switch (Built-in magnet) Bore size Auto switch MB Nil None V Single knuckle joint W Double knuckle joint 20 20 mm 25 25 mm 32 32 mm 40 40 mm Nil Without auto switch Nil 2 pcs. S 1 pc. n n pcs. * For applicable auto switches, refer to the table below.

ISO Cylinder

C85NT08A-S C85NT10A-S C85NT10A-S C85NT20A-S C85NT25A-S Mounting nut C85NT08B-S C85NT08B-S C85NT10B-S C85NT10B-S C85NT20B-S C85NT20B-S C75 Standard C75 Double acting, Single rod C75W Double acting, Double rod C75 Single acting (Spring return/extend) Direct mount C75R Double acting, Single rod XC6A only Description Bore size [mm] 32 40 Rod end nut C76NT32A-S C76NT40A-S Mounting nut C76NT32B-S

Magnetically Coupled Rodless Cylinder

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

0.4

None (Non-polar) Nil E Note1, 2) 2(B) 4(A) 2(B) (A)4 Metal Rubber B Note) VQ 4/5 Note 1) Not applicable to the S kit.

1

32 272 178 36 Stroke B Stroke A S + Stroke (A + B) ZZ + Stroke (A + B) 40 280 178 38 50 314 198 41 63 314 198 43 80 386 242 52 ZZ S Q L GC Bore size (mm) 100 386 242 52 40 282 180 66 12 42 GC 50 310 194 74 14 48 Stroke B Stroke A Series MB1 63 326 210 76 14 48 S + Stroke (A + B) 80 390 248 90 16 58 ZZ + Stroke (A + B) 100 414 270 98 18 60 Stroke B Stroke A ZZ + Stroke (A + B) S + Stroke

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

LJ1H

(B contact) 2 pcs.