Fieldbus System

double (24 VDC) SY3230-5U1-C6 (1 set) 2-position single (24 VDC) SY3130-5U1-C6 (2 sets) SS5Y3-12SNAN-04D 1 set (Type 12 4-station manifold base part no.)

mb1

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to

70astamb1

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to

High Vacuum Angle Valve

/6, 48/12, 100/24 VDC Yes 24 VDC, 100/200 VAC 10 G, C, D, T type AWG20, O.D.: 2.63 mm G type only VCTF2 x 0.75, O.D.: 2.3 mm, Sheath O.D.: 6.6 mm Class B 0.17 0.4 0.7 0.7 1.0 Note 1) Conductance is the value for an elbow with the same dimensions.

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

kg 250 Load weight m (kg) 200 63 150 Since the conditions are vertical upward mounting with a speed of 500 mm/s, use graph (2).

REC

45 150 to 700 26 M10 X 1.25 32 6 8 46.5 5.5 22 19.5 17 12 13 11 45 150 to 1000 26 M14 X 1.5 40 8 10 56.2 7 24 21 22 14 16 12.5 50 200 to1000 32 20, 25 NA S TD TT TX TY TZ Z ZZ NN P N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 8 10 32 32 52 192 202 150 to 700 20 1 8 34.5 M26 X 1.5 25 146 9 10 40 40 60 196 206 150 to 700 20 1 8 42.5 M26 X 1.5 32 159 9 10 40 40 60 209 219 150 to 1000 22

VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5

MVGQ

VDC 12 VDC 6 VDC 5 VDC 3 VDC There are only 24 VDC and 12 VDC types for type U.

MHZ

Weight (g) End boss type (Symbol) Model H E M K MHZA2-6 28 28 28 28 MHZAJ2-6 29 29 29 29 12-2-24 24 Parallel Style Air Gripper Standard Type Series MHZ2 Size: 6, 10, 16, 20, 25, 32, 40 How to Order MHZ 6 MHZ2 D 6 M9B MHF MHL Number of auto switches Number of fingers 2 2 fingers Nil S 2 pcs. 1 pc.

MHZ

Weight (g) End boss type (Symbol) Model H E M K MHZA2-6 28 28 28 28 MHZAJ2-6 29 29 29 29 12-2-24 24 Parallel Style Air Gripper Standard Type Series MHZ2 Size: 6, 10, 16, 20, 25, 32, 40 How to Order MHZ 6 MHZ2 D 6 M9B MHF MHL Number of auto switches Number of fingers 2 2 fingers Nil S 2 pcs. 1 pc.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 2) S kit: 24 VDC only 588 5 Port Solenoid Valve/Plug-in Unit 10-SQ2000 How to Order Manifold Assembly (Example) Example) D-sub connector kit, with cable (3 m) 2 position double (24 VDC) 10-SQ2231D-51-C8 (3 sets) 3 position closed center (24 VDC) 10-SQ2331-51-C8 (1 set) 2 position single (24 VDC) 10-SQ2131-51-C8 (3 sets) Blanking plate SSQ2000-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 U

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

24 STATION NO.

Electric Rotary Table

8 16 8 2 6 1 30, 50, 75 30, 50 75, 100 30, 50, 75 100, 125, 150 50, 75 50, 100 50, 100 150 16 3 25 9 25 5 Miniature Rotary Table Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Rod type Slide table type Series LEPS Basic type Series LER High precision type Series LEPY Series LERH CAT.ES100-94 CAT.ES100-92 Series LER Series LEPY Series LEPS Max. speed (/s) Rotating torque (Nm) Size Size

C95Series

0.8 V or less 3 V or less 14 Vorless Leak current 24 VDC: 10).1A or less 24 VDC 10).1A or less 24 VDC: lmA or less 100 VAC: 1mA or less 200 VAC: 1.5mA or less Indlcetor lamp.

0.4

24 stations N R Note 7) S Note) Refer to page 419 for details.

Environment

VDC) Servo Motor (24 VDC) Clean Room Specication For the LECPA, refer to page 40.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

, L2 = 10.5n + 44 n: Station (Maximum 16 stations) n L 1 45 65 125 135.5 16 15 192 212 275 285.5 14 181.5 201.5 262.5 273 13 171 191 250 260.5 12 160.5 180.5 237.5 248 11 150 170 225 235.5 10 139.5 159.5 225 232.5 9 129 149 212.5 223 8 118.5 138.5 200 210.5 7 108 128 187.5 198 6 97.5 117.5 175 185.5 5 87 107 162.5 173 4 76.5 96.5 150 160.5 3 66 86 150 160.5 2 55.5 75.5 137.5 148 L1 L2 L3

5 Port Solenoid Valve Series VQZ1000/2000/3000

VQC VQZ SQ VFS VFR +24 V +24 V VQ7 Power supply for output Power supply for output 0 V 0 V Power supply for the input and for the control unit of the Gateway Power supply for the input and for the control unit of the Gateway +24 V 24 V Caution 1. Take measures to avoid applying repeated bending force or pulling force to the cable.