XL

Fasten the VCR and SWJ (Swagelok) properly, in accordance with the specified torque and methods prescribed by both companies. Reference VCR: 1/8 turn after tightening by hand SWJ: 1 1/4 turns after tightening by hand 3. Attach the valve using body bottom mounting screws (2-M5 P=15). 1.

Electric Actuator Miniature Rod Type Miniature Slide table Type

/See Example of step data entry(4) on p.26 4 Positioning repeatability is out of specified range. 1) It shifts to the next operation by receiving the "INP" output signal.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

4 port base mounted 10-SYJ3000 Common SUP/Common EXH Common SUP/ Individual EXH R P A P. 299 B Type 32 4 port base mounted 10-SYJ3000 P R A P. 299 B Type 40 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 P. 357 Type 41 10-SYJ3000 5 port base mounted P. 299 10-SYJ5000 P. 327 10-SYJ7000 P A P. 357 B Type 42 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 B B R P A P. 357 Type 43 5 port

HRX-OM-X037

Press the numeric section to change the set temperature. (11) Circulating fluid set temperature P.5-10 CH2 (12) Circulating fluid discharge pressure It indicates the discharge pressure. P.5-11 It indicates the flow rate measured by a flowmeter.

Aluminum High Vacuum Angle Valve

By applying the pilot pressure from the pilot port P-1, the piston-coupled valve overcomes the operating force by pressure, and the valve opens. (Pilot port P-2 is open.) Conversely, by applying the pilot pressure to the pilot port P-2, the valve closes. (Pilot port P-1 is open.)

Step Motor Controller

P Signals and terminal status can be monitored. P Parameters can be set.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Type 2-Port Solenoid Valve JSXM Series p. 39 JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Brass p. 19 JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Aluminum p. 21 Glossary of Terms Bracket Options p. 23 How to Order p. 39 Flow Rate Characteristics, Common Specifications p. 40 Construction p. 41 Dimensions p. 42 Modular Connection Examples p. 44 Spacer / Spacer with Bracket

2/3 Port Valve

=2.4): P 0.08MPa VNH133AB(Cv=1.7): P 0.16MPa VNH413AB(Cv=1.4): P 0.23MPa VNH313AB(Cv=1.0): P 0.45MPa VNH213AB(Cv=0.7): P 0.9MPa VNH113AB(Cv=0.4): P 0.8MPa Calculation by Cv factor Q=14.2 Cv .l/min 10.2P G Calculation by effective area Q=0.8 S .l/min 10.2P G (Symbol) Q : Flow rate(l/min) P : Pressure differential P1-P2(MPa) P1 : Primary pressure(MPa) P2

SX

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

ZP

P Applicable tubing O.D.

HRX-OM-Y098

P.5-11 It indicates the flow rate measured by a flowmeter. (13) Circulating fluid flow rate P.5-11 It does not include the flow rate in the bypass circuit. (14) Circulating fluid electrical conductivity It indicates the electrical conductivity. P.5-11 (15) CH1 Independent pump operation CH1 pump operates independently while the button is pressed.

Vacuum Module Series ZX

How to Order P.866 Combination of supply valve and release valve P.868 Construction P.869 Ejector unit P.870 Valve unit P.872 Suction filter unit P.874 Vacuum pressure switch unit P.875 Dimensions/Without valve unit P.881 Dimensions/Combination of supply valve and release valve Type K1, K3, K8, J1, J2 P.882 to 893 Manifold specifications P.894 Dimensions P.896 to 901 ZY ZF ZP SP ZCUK . .

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

P. 92 EB P EA Type 23SA Stacking type EX510 gateway type Can be used with a serial transmission system. 10-SY920 P. 97 Type 60 10-SY360 10-SY560 10-SY760 Cassette type Individual wiring Size and weight reduced by eliminating the manifold base. P. 104 R + + P Standard Option Made to order (Refer to page Made to Order.)

7

P. 142 Body material: CAC408 . P. 146 For Heated water/High temperature oil Body material: C37, Stainless steel . P. 148 Body material: CAC408 . P. 153 Replacement Parts . P. 155 Glossary of Terms . P. 156 Solenoid Valve Flow Rate Characteristics . P. 157 Flow Rate Characteristics . P. 162 Specific Product Precautions .

Sine Rodless Cylinder Series REA/REB

thread length E TC X F WP WP GW GP QW PW 4 x LD D Piping port P Operating direction A 7 W K G Piping port P Operating direction B Piping port P (Plug) Operating direction B HS CR With switch rail Q + Stroke Z + Stroke HR Plug 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction A 12.5 19.5 16 Plug REBR15 REBR15 REA (mm) A

New

Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Fluid density [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow-rate characteristics are shown in Graph (2).

3 Port Solenoid Valve/

M12 connector pin number 1(P) 1(P) Safety limit switch Made by Rockwell Automation Symbol Pin Numbers (Built-in switch 3N.C.)

Thermo-chiller

9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17 Communication Functions. p. 18 Options. p. 19 Optional Accessories. . p. 20 VCooling Capacity Calculation Required Cooling Capacity Calculation. p.

Fieldbus System

P P P P P P P P SY5000 P P P P P P P P SY5000 P P P P C2 C3 C4 C6 C8 CM N1 N3 N7 N9 CM 2 One-touch fitting 1/8" One-touch fitting 3.2 One-touch fitting 5/32" One-touch fitting P P P P P P P P P P P P P P Straight Elbow Straight Elbow 4 One-touch fitting 1/4" One-touch fitting 6 One-touch fitting 5/16" One-touch fitting 8 One-touch fitting Straight port, mixed sizes LN3 LN7 LN9